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    • 3. 发明授权
    • Cantilever beam MEMS variable optical attenuator
    • 悬臂梁MEMS可变光衰减器
    • US07242825B2
    • 2007-07-10
    • US11010769
    • 2004-12-13
    • Pinyen LinYao Rong WangJun MaXueyuan LiuPeter M. GulvinKristine A. GermanJoel A. Kubby
    • Pinyen LinYao Rong WangJun MaXueyuan LiuPeter M. GulvinKristine A. GermanJoel A. Kubby
    • G02B6/35
    • G02B6/3508G02B6/266G02B6/3566G02B6/357G02B6/358G02B6/3594G02B6/3596
    • An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
    • 改进的悬臂光束开关设计,提供可变光衰减器(VOA)的功能。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准,可以实现单个设备,其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。
    • 6. 发明授权
    • Thermal actuator and an optical waveguide switch including the same
    • 热致动器和包括其的光波导开关
    • US06983088B2
    • 2006-01-03
    • US10634941
    • 2003-08-05
    • Joel A. KubbyJun MaKristine A. GermanPeter M. GulvinPinyen Lin
    • Joel A. KubbyJun MaKristine A. GermanPeter M. GulvinPinyen Lin
    • G02B6/26G02B6/42H01H37/00
    • G02B6/3576B81B3/0018G02B6/3566G02B6/3584
    • A thermal actuator comprises a plurality of substantially straight and parallel beams arranged to form a beam array. The midpoint of each beam is attached or coupled to an orthogonal coupling beam. Each array beam has a beam heating parameter with a corresponding beam heating parameter value. The beam heating parameter values vary across the beam array based on a predetermined pattern. As the beams are heated by an included heating means, the distribution of beam temperatures in the beam array becomes asymmetric, thus causing the beam array to buckle. The buckling of the beams in the beam array, in turn, causes the attached coupling beam to move in a predetermined direction. The coupling beam motion, in turn, operates an included optical waveguide switch. The beams in the beam array are heated by any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
    • 热致动器包括布置成形成束阵列的多个基本上直的和平行的光束。 每个光束的中点附加或耦合到正交耦合光束。 每个阵列光束具有具有对应的光束加热参数值的光束加热参数。 光束加热参数值基于预定图案在波束阵列上变化。 当束被加热装置加热时,光束阵列中光束温度的分布变得不对称,从而使光束阵列发生弯曲。 光束阵列中的光束的弯曲又使连接的光束沿预定的方向移动。 耦合光束运动反过来操作包括的光波导开关。 光束阵列中的光束通过焦耳加热,涡流加热,传导加热,对流加热和辐射加热中的任何一种加热。