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    • 6. 发明申请
    • Microelectronic Devices Using Sacrificial Layers and Structures Fabricated by Same
    • 使用牺牲层的微电子器件和由其制造的结构
    • US20080011999A1
    • 2008-01-17
    • US11860674
    • 2007-09-25
    • Suk-Hun ChoiYoon-Ho SonSung-Lae ChoJoon-Sang Park
    • Suk-Hun ChoiYoon-Ho SonSung-Lae ChoJoon-Sang Park
    • H01L45/00
    • H01L45/06H01L27/2436H01L45/1233H01L45/126H01L45/16
    • A dielectric layer is formed on a region of a microelectronic substrate. A sacrificial layer is formed on the dielectric layer, and portions of the sacrificial layer and the dielectric layer are removed to form an opening that exposes a portion of the region. A conductive layer is formed on the sacrificial layer and in the opening. Portions of the sacrificial layer and the conductive layer on the dielectric layer are removed to leave a conductive plug in the dielectric layer and in contact with the region. Removal of the sacrificial layer and portions of the conductive layer on the dielectric layer may include polishing to expose the sacrificial layer and to leave a conductive plug in the sacrificial layer and the dielectric layer, etching the sacrificial layer to expose the dielectric layer and leave a portion of the conductive plug protruding from the dielectric layer, and polishing to remove the protruding portion of the conductive plug. Phase-change memory devices formed by such techniques are also discussed.
    • 在微电子基板的区域上形成介电层。 在电介质层上形成牺牲层,去除牺牲层和电介质层的部分以形成露出该区域的一部分的开口。 在牺牲层和开口中形成导电层。 去除部分牺牲层和电介质层上的导电层,以在电介质层中留下导电插塞并与该区域接触。 消除牺牲层和电介质层上的导电层的部分可以包括抛光以暴露牺牲层并在牺牲层和电介质层中留下导电插塞,蚀刻牺牲层以暴露电介质层并留下 导电插头从电介质层突出的部分,并且抛光以去除导电插塞的突出部分。 还讨论了通过这种技术形成的相变存储器件。
    • 8. 发明申请
    • Polishing pad conditioner and chemical mechanical polishing apparatus having the same
    • 抛光垫调节剂及其化学机械抛光装置
    • US20050113009A1
    • 2005-05-26
    • US10985206
    • 2004-11-10
    • Jong-Won LeeJoon-Sang ParkChang-Ki Hong
    • Jong-Won LeeJoon-Sang ParkChang-Ki Hong
    • B24B53/007B24B53/02B24B7/00
    • B24B53/017B24B53/02
    • Chemical mechanical apparatuses including a polishing pad conditioning unit for improving a conditioning rate and wear uniformity of a polishing pad are provided. In one aspect, a chemical mechanical polishing apparatus includes a polishing pad conditioner including conditioning disks disposed in a radial direction of a planarizing surface of a circular polishing pad and contacted with the planarizing surface of the circular polishing pad during rotation of the circular polishing pad. The conditioning disks are connected to first drive units supported by an arm disposed over the circular polishing pad and extended in a radial direction of a planarizing surface of the circular polishing pad. The arm is connected to second drive units. The second drive units move the arm horizontally and reciprocally in the radial direction of the planarizing surface of the circular polishing pad. Thus, a conditioning rate and wear uniformity of the polishing pad may be improved.
    • 提供了包括用于改善抛光垫的调理率和磨损均匀性的抛光垫调节单元的化学机械设备。 在一个方面,一种化学机械抛光装置包括抛光垫调节器,其包括在圆形抛光垫的平坦化表面的径向方向上设置的调节盘,并且在圆形抛光垫的旋转期间与圆形抛光垫的平坦化表面接触。 调节盘连接到由设置在圆形抛光垫上的臂支撑的第一驱动单元,并且在圆形抛光垫的平坦化表面的径向方向上延伸。 臂连接到第二个驱动单元。 第二驱动单元在圆形抛光垫的平坦化表面的径向水平和往复地移动臂。 因此,可以提高抛光垫的调理率和磨损均匀性。