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    • 1. 发明授权
    • Dispensing device, dispensing method and method of detecting defective discharge of solution containing biological sample
    • 分配装置,分配方法和检测含有生物样品的溶液的不良排放的方法
    • US07396511B2
    • 2008-07-08
    • US10626828
    • 2003-07-25
    • Masahiro FujiiHiroshi KoedaFumio Takagi
    • Masahiro FujiiHiroshi KoedaFumio Takagi
    • B41J29/38B41J2/045B01L3/00
    • G01N35/1074G01N2035/1018G01N2035/1041Y10T436/2575
    • Proposed is dispensing technology capable of reliably spotting a biological sample on a solid phase. A head chip applies a voltage pulse between a diaphragm and separate electrodes based on a drive control signal output from a head driver IC, and discharges a solution containing protein filled in a pressurized chamber as a result of the elastic deformation of the diaphragm. A drive pulse generation circuit generates a drive voltage pulse and supplies this to the head chip in order to discharge a solution containing protein from the head chip. The drive current detection circuit detects a drive current flowing between the diaphragm and separate electrodes. Since the waveform of the detected drive current and the peak current value and so on differ in the case where the discharge status is normal and in the case where it is abnormal, a defective discharge can be discriminated by detecting such change.
    • 提出了能够在固相上可靠地点样生物样品的分配技术。 头片基于从头驱动器IC输出的驱动控制信号在隔膜和分离的电极之间施加电压脉冲,并且由于隔膜的弹性变形而放出包含加压室中的蛋白质的溶液。 驱动脉冲产生电路产生驱动电压脉冲,并将其提供给头部芯片,以便从头部芯片排出含有蛋白质的溶液。 驱动电流检测电路检测在隔膜和分离电极之间流动的驱动电流。 由于在放电状态正常的情况下检测到的驱动电流和峰值电流值等的波形不同,并且在异常的情况下,可以通过检测这种变化来区分不良放电。
    • 2. 发明申请
    • Surface treatment apparatus
    • 表面处理装置
    • US20050115679A1
    • 2005-06-02
    • US10953871
    • 2004-09-29
    • Ryuichi KurosawaFumio TakagiHiroshi KoedaKazufumi OyaKatsuji Arakawa
    • Ryuichi KurosawaFumio TakagiHiroshi KoedaKazufumi OyaKatsuji Arakawa
    • H01L21/02C23F1/08H01L21/306H01L21/683C23F1/00
    • H01L21/6838C23F1/08
    • A surface treatment apparatus 1 is constructed to hold a substrate 10 when surface treatment is carried out to a back surface 101 of the substrate 10. The surface treatment apparatus 1 includes at least one enclosed space each defined by a concave portion 32 and a front surface 102 of the substrate 10; and an O-ring 2 (contact portion) adapted to hermetically contact with the front surface 102 of the substrate 10 to produce negative pressure in cooperation with the O-ring 2 and the front surface 102 of the substrate 10. The surface treatment apparatus 1 is constructed so that the substrate 10 is attracted onto the surface treatment apparatus 1 using a difference between the negative pressure and atmospheric pressure by decompressing the enclosed space in a decompression chamber and then bringing out the substrate 10 from the inside of the decompression chamber to environment under atmospheric pressure.
    • 当对基板10的背面101进行表面处理时,表面处理装置1被构造成保持基板10。 表面处理装置1包括由凹部32和基板10的前表面102限定的至少一个封闭空间; 以及适于与基板10的前表面102气密接触以产生与O形环2和基板10的前表面102协作的负压的O形环2(接触部分)。 表面处理装置1被构造成使得通过减压减压室中的封闭空间将衬底10从负压和大气压之间的差异吸引到表面处理装置1上,然后从衬底10的内部引出衬底10 减压室在大气压下环境。