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    • 4. 发明授权
    • Nanoporous silicone resins having low dielectric constants and method for preparation
    • 具有低介电常数的纳米多孔硅树脂及其制备方法
    • US06313045B1
    • 2001-11-06
    • US09459331
    • 1999-12-13
    • Bianxiao ZhongRussell Keith KingKyuha ChungShizhong Zhang
    • Bianxiao ZhongRussell Keith KingKyuha ChungShizhong Zhang
    • H01L2131
    • C08G77/02C08G77/12C09D183/04Y10S977/70Y10S977/831Y10S977/891
    • Nanoporous silicone resins and silicone resin films having low dielectric constants and a method for preparing such nanoporous silicone resins. The silicone resin comprises the reaction product of a mixture comprising (A) 15-70 mol % of a tetraalkoxysilane described by formula Si(OR1)4,  where each R1 is an independently selected alkyl group comprising 1 to about 6 carbon atoms, (B) 12 to 60 mol % of an organosilane described by formula R4SiX3,  where R4 is selected from the group consisting of alkyl groups comprising 1 to about 6 carbon atoms and phenyl and each X is an independently selected hydrolyzable substituent, (C) 15 to 70 mol % of an organotrialkoxysilane described by formula R2Si(OR3)3,  where R2 is a hydrocarbon group comprising about 8 to 24 carbon atoms or a substituted hydrocarbon group comprising a hydrocarbon chain having about 8 to 24 carbon atoms and each R3 is an independently selected alkyl group comprising 1 to about 6 carbon atoms; in the presence of (D) water, (E) hydrolysis catalyst, and (F) organic solvent for the reaction product. The silicone resin is cured and heated in preferably an inert atmosphere at a temperature sufficient to effect thermolysis of carbon-carbon bonds of the R2 groups thereby forming a nanoporous silicone resin.
    • 具有低介电常数的纳米多孔有机硅树脂和有机硅树脂薄膜以及这种纳米多孔硅树脂的制备方法。 硅氧烷树脂包括含有(A)15-70mol%四烷氧基硅烷的混合物的反应产物,其中R1是独立选择的含有1至约6个碳原子的烷基,(B)12至60mol% 的式中R 4选自包含1至约6个碳原子的烷基和苯基,并且每个X是独立选择的可水解取代基的有机硅烷,(C)15至70mol%由式(I)表示的有机基三烷氧基硅烷 其中R 2是包含约8至24个碳原子的烃基或包含具有约8至24个碳原子的烃链的取代烃基,并且每个R 3是独立选择的包含1至约6个碳原子的烷基; 在(D)水,(E)水解催化剂和(F)反应产物的(F)有机溶剂的存在下)。有机硅树脂在优选惰性气氛中在足以实现碳 - 碳键热解的温度下固化和加热 的R2基团,从而形成纳米多孔硅树脂。
    • 6. 发明授权
    • Method for forming pattern on substrate and method for fabricating liquid crystal display using the same
    • 在基板上形成图案的方法及使用该方法制造液晶显示器的方法
    • US06979604B2
    • 2005-12-27
    • US10469495
    • 2002-03-05
    • Young-Mi TakWoon-Yong ParkJung-Ho LeeMun-Pyo HongKyuha Chung
    • Young-Mi TakWoon-Yong ParkJung-Ho LeeMun-Pyo HongKyuha Chung
    • G02F1/1368G02F1/1333G02F1/1362G03F7/00G03F7/20H01L21/475G03C5/56
    • G03F7/0007G02F1/1362G02F2001/13625G03F7/0035Y10S438/946
    • The present invention relates to a method of forming a pattern on a substrate and a method of manufacturing a liquid crystal display panel using the same. In order to decrease stitch defect, the shot boundary lines for respective layers of patterns do not overlap each other to be dispersed. Specifically, according to a method of forming patterns of the present invention, after a first material layer is first formed on a substrate, a first pattern is formed by performing a first photo etching including divisional light exposure with at least two areas across at least one shot boundary line on the first material layer. Subsequently, after a second material layer is formed on the first pattern, a second pattern is formed by performing a second photo etching including divisional light exposure with at least two areas across at least one shot boundary line on the second material layer. The shot boundary line in the second photo etching is spaced apart from the shot boundary line in the first photo etching. A liquid crystal display panel is manufactured by using this forming method.
    • 本发明涉及在基板上形成图案的方法以及使用该图案的液晶显示面板的制造方法。 为了减少针迹缺陷,各层图案的拍摄边界线彼此不重叠以分散。 具体而言,根据本发明的图案的形成方法,首先在基板上形成第一材料层后,通过进行第一光蚀刻而形成第一图案,所述第一图案蚀刻包括具有至少两个区域的分光曝光 在第一材料层上拍摄边界线。 随后,在第一图案上形成第二材料层之后,通过在第二材料层上进行至少两个区域的至少两个区域的至少两个区域进行包括分光照射的第二光蚀刻来形成第二图案。 在第一光刻蚀中,第二光蚀刻中的照射边界线与第一光蚀刻中的照射边界线隔开。 通过使用该形成方法制造液晶显示面板。