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    • 3. 发明授权
    • Techniques for impeding reverse engineering
    • 阻止逆向工程的技术
    • US08324102B2
    • 2012-12-04
    • US13169248
    • 2011-06-27
    • Louis L. HsuRajiv V. JoshiDavid W. Kruger
    • Louis L. HsuRajiv V. JoshiDavid W. Kruger
    • H01L21/00
    • H01L21/76816H01L21/76825H01L21/76831H01L21/76834H01L23/573H01L27/02H01L27/0203H01L2924/0002H01L2924/00
    • Anti-reverse engineering techniques are provided. In one aspect, a method for forming at least one feature in an insulating layer is provided. The method comprises the following steps. Ions are selectively implanted in the insulating layer so as to form at least one implant region within the insulating layer, the implanted ions being configured to alter an etch rate through the insulating layer within the implant region. The insulating layer is etched to, at the same time, form at least one void both within the implant region and outside of the implant region, wherein the etch rate through the insulating layer within the implant region is different from an etch rate through the insulating layer outside of the implant region. The void is filled with at least one conductor material to form the feature in the insulating layer.
    • 提供了反逆向工程技术。 一方面,提供了一种在绝缘层中形成至少一个特征的方法。 该方法包括以下步骤。 离子选择性地植入绝缘层中,以在绝缘层内形成至少一个注入区域,所述注入离子被配置为改变通过植入区域内的绝缘层的蚀刻速率。 蚀刻绝缘层,同时在植入区域内和植入区域外部形成至少一个空隙,其中通过绝缘层在植入区域内的蚀刻速率与通过绝缘体的蚀刻速率不同 在植入区域外侧。 空隙填充有至少一种导体材料以在绝缘层中形成特征。
    • 7. 发明授权
    • Flash memory gate structure for widened lithography window
    • 用于加宽光刻窗的闪存门结构
    • US07888729B2
    • 2011-02-15
    • US12198345
    • 2008-08-26
    • Kangguo ChengLawrence A. ClevengerTimothy J. DaltonLouis L. Hsu
    • Kangguo ChengLawrence A. ClevengerTimothy J. DaltonLouis L. Hsu
    • H01L21/336
    • H01L29/7881H01L29/66825
    • A first portion of a semiconductor substrate belonging to a flash memory device region is recessed to a recess depth to form a recessed region, while a second portion of the semiconductor substrate belonging to a logic device region is protected with a masking layer. A first gate dielectric layer and a first gate conductor layer formed within the recessed region such that the first gate conductive layer is substantially coplanar with the top surfaces of the shallow trench isolation structures. A second gate dielectric layer, a second gate conductor layer, and a gate cap hard mask layer, each having a planar top surface, is subsequently patterned. The pattern of the gate structure in the flash memory device region is transferred into the first gate conductor layer and the first gate dielectric layer to form a floating gate and a first gate dielectric, respectively.
    • 属于闪存器件区域的半导体衬底的第一部分凹陷到凹陷深度以形成凹陷区域,而属于逻辑器件区域的半导体衬底的第二部分被掩蔽层保护。 形成在凹陷区域内的第一栅介质层和第一栅极导体层,使得第一栅极导电层与浅沟槽隔离结构的顶表面基本共面。 随后对第二栅介质层,第二栅极导体层和栅帽硬掩模层进行构图,每个具有平坦的顶表面。 闪存器件区域中的栅极结构的图案被转移到第一栅极导体层和第一栅极介电层中,以分别形成浮置栅极和第一栅极电介质。
    • 8. 发明申请
    • AIR CHANNEL INTERCONNECTS FOR 3-D INTEGRATION
    • 用于三维集成的空气通道互连
    • US20110031633A1
    • 2011-02-10
    • US12536176
    • 2009-08-05
    • Louis L. HsuBrain L. JiFei LiuConal E. Murray
    • Louis L. HsuBrain L. JiFei LiuConal E. Murray
    • H01L23/532H01L21/50H01L21/768
    • H01L23/467H01L21/76898H01L23/481H01L25/0657H01L25/50H01L2225/06513H01L2225/06541H01L2225/06589H01L2924/0002H01L2924/00
    • A three-dimensional (3D) chip stack structure and method of fabricating the structure thereof are provided. The 3D chip stack structure includes a plurality of vertically stacked chips which are interconnected and bonded together, wherein each of the vertically stacked chips include one or more IC device strata. The 3D chip stack structure further includes an air channel interconnect network embedded within the chip stack structure, and wherein the air channel interconnect network is formed in between at least two wafers bonded to each other of the vertically stacked wafers and in between at least two bonded wafers of the vertically stacked wafers at a bonding interface thereof. In addition, the 3D chip stack structure further includes one or more openings in a peripheral region of the chip stack structure that lead into and out of the air channel interconnect network, so that air can flow into and out of the air channel interconnect network through the one or more openings to remove heat from the chip stack structure.
    • 提供三维(3D)芯片堆叠结构及其结构的制造方法。 3D芯片堆叠结构包括互连并结合在一起的多个垂直堆叠的芯片,其中每个垂直堆叠的芯片包括一个或多个IC器件层。 3D芯片堆叠结构还包括嵌入在芯片堆叠结构内的空气通道互连网络,并且其中空气通道互连网络形成在至少两个晶片之间,所述至少两个晶片彼此接合在垂直堆叠的晶片之间,并且在至少两个结合 在其接合界面处的垂直堆叠的晶片的晶片。 此外,3D芯片堆叠结构还包括在芯片堆叠结构的外围区域中的一个或多个开口,其引入和流出空气通道互连网络,使得空气可以流入和流出空气通道互连网络,通过 一个或多个开口以从芯片堆叠结构移除热量。