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    • 1. 发明授权
    • Techniques for impeding reverse engineering
    • 阻止逆向工程的技术
    • US07994042B2
    • 2011-08-09
    • US11924735
    • 2007-10-26
    • Louis L. HsuRajiv V. JoshiDavid W. Kruger
    • Louis L. HsuRajiv V. JoshiDavid W. Kruger
    • H01L21/00
    • H01L21/76816H01L21/76825H01L21/76831H01L21/76834H01L23/573H01L27/02H01L27/0203H01L2924/0002H01L2924/00
    • Anti-reverse engineering techniques are provided. In one aspect, a method for forming at least one feature in an insulating layer is provided. The method comprises the following steps. Ions are selectively implanted in the insulating layer so as to form at least one implant region within the insulating layer, the implanted ions being configured to alter an etch rate through the insulating layer within the implant region. The insulating layer is etched to, at the same time, form at least one void both within the implant region and outside of the implant region, wherein the etch rate through the insulating layer within the implant region is different from an etch rate through the insulating layer outside of the implant region. The void is filled with at least one conductor material to form the feature in the insulating layer.
    • 提供了反逆向工程技术。 一方面,提供了一种在绝缘层中形成至少一个特征的方法。 该方法包括以下步骤。 离子选择性地植入绝缘层中,以在绝缘层内形成至少一个注入区域,所述注入离子被配置为改变通过植入区域内的绝缘层的蚀刻速率。 蚀刻绝缘层,同时在植入区域内和植入区域外部形成至少一个空隙,其中通过绝缘层在植入区域内的蚀刻速率与通过绝缘体的蚀刻速率不同 在植入区域外侧。 空隙填充有至少一种导体材料以在绝缘层中形成特征。
    • 4. 发明授权
    • Techniques for impeding reverse engineering
    • 阻止逆向工程的技术
    • US08324102B2
    • 2012-12-04
    • US13169248
    • 2011-06-27
    • Louis L. HsuRajiv V. JoshiDavid W. Kruger
    • Louis L. HsuRajiv V. JoshiDavid W. Kruger
    • H01L21/00
    • H01L21/76816H01L21/76825H01L21/76831H01L21/76834H01L23/573H01L27/02H01L27/0203H01L2924/0002H01L2924/00
    • Anti-reverse engineering techniques are provided. In one aspect, a method for forming at least one feature in an insulating layer is provided. The method comprises the following steps. Ions are selectively implanted in the insulating layer so as to form at least one implant region within the insulating layer, the implanted ions being configured to alter an etch rate through the insulating layer within the implant region. The insulating layer is etched to, at the same time, form at least one void both within the implant region and outside of the implant region, wherein the etch rate through the insulating layer within the implant region is different from an etch rate through the insulating layer outside of the implant region. The void is filled with at least one conductor material to form the feature in the insulating layer.
    • 提供了反逆向工程技术。 一方面,提供了一种在绝缘层中形成至少一个特征的方法。 该方法包括以下步骤。 离子选择性地植入绝缘层中,以在绝缘层内形成至少一个注入区域,所述注入离子被配置为改变通过植入区域内的绝缘层的蚀刻速率。 蚀刻绝缘层,同时在植入区域内和植入区域外部形成至少一个空隙,其中通过绝缘层在植入区域内的蚀刻速率与通过绝缘体的蚀刻速率不同 在植入区域外侧。 空隙填充有至少一种导体材料以在绝缘层中形成特征。