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1. 发明授权

US06220084B1 Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope 失效
标题翻译：用单通，双幅度扫描力显微镜检测场
公开(公告)号：US06220084B1
公开(公告)日：2001-04-24
申请号：US09606623
申请日：2000-06-29
申请人： Dong Chen , Edwin Flecha , James Michael Hammond , Kenneth Gilbert Roessler
发明人： Dong Chen , Edwin Flecha , James Michael Hammond , Kenneth Gilbert Roessler
IPC分类号： G01B734
CPC分类号： G01Q60/34 , G01Q60/30 , G01R29/0878 , G01R31/303 , Y10S977/851 , Y10S977/852
摘要： A scanning probe microscope operates in the manner of an atomic force microscope during intermittent periods of scanning motion, in which a sample surface is driven so that a scan line on the surface is moved past a probe tip being vibrated in engagement with the surface. Between these intermittent periods of scanning motion, the vibrating probe tip is moved out of engagement with the sample surface, so that the amplitude and phase shift of probe tip vibrations are determined by the gradient of a force field extending outward from the sample surface. Such a force field is established when the probe tip is attracted by, or repelled from, a magnetic or electric field at or near the sample surface. For each sample point, the system stores data representing the height of the sample surface and the force field.
摘要翻译：扫描探针显微镜在扫描运动的间歇期期间以原子力显微镜的方式工作，其中驱动样品表面，使得表面上的扫描线移动通过与表面接合而振动的探针尖端。在扫描运动的这些间歇期间，振动探针尖端移动离开与样本表面的接合，使得探针尖端振动的振幅和相移由通过从样品表面向外延伸的力场的梯度来确定。当探针尖端被样品表面处或附近的磁场或电场吸引或排斥时，建立这样的力场。对于每个采样点，系统存储表示样品表面的高度和力场的数据。

2. 发明授权

US5902928A Controlling engagement of a scanning microscope probe with a segmented piezoelectric actuator 失效
标题翻译：控制扫描显微镜探头与分段压电执行器的接合
公开(公告)号：US5902928A
公开(公告)日：1999-05-11
申请号：US867138
申请日：1997-06-02
申请人： Dong Chen , Edwin Flecha , James Michael Hammond , Kenneth Gilbert Roessler
发明人： Dong Chen , Edwin Flecha , James Michael Hammond , Kenneth Gilbert Roessler
IPC分类号： G01B7/34 , G01B7/00 , G01B21/30 , G01N37/00 , G01Q20/04 , G01Q30/06 , G01Q70/00
CPC分类号： G01Q10/065 , B82Y35/00 , G01Q10/02 , G01Q10/04 , Y10S977/851
摘要： A scanning probe microscope includes a segmented piezoelectric actuator having a course segment and a fine segment, the outputs of which are combined to determine the movement of a distal end of the actuator, to which the probe is mechanically coupled. Movement of the probe tip, or a change in the level of its engagement with a sample surface is sensed by a detector, which generates a feedback signal. A correction signal, which is used to determine how the actuator should be moved to maintain a constant level of such engagement, is generated in a comparison circuit, which compares the feedback signal with a control signal. The correction signal is used to drive the fine segment of the actuator, while an integral of the correction signal is used to drive the coarse segment.
摘要翻译：扫描探针显微镜包括分段压电致动器，其具有过程段和精细段，其输出被组合以确定致动器的远端的运动，探针机械耦合到该远端。探针尖端的运动或其与样品表面的接合水平的变化由检测器感测到，其产生反馈信号。在比较电路中产生用于确定致动器如何移动以维持这种接合的恒定水平的校正信号，该比较电路将反馈信号与控制信号进行比较。校正信号用于驱动致动器的细段，而校正信号的积分用于驱动粗细段。

3. 发明授权

US5801381A Method for protecting a probe tip using active lateral scanning control 失效
标题翻译：使用主动横向扫描控制来保护探头尖端的方法
公开(公告)号：US5801381A
公开(公告)日：1998-09-01
申请号：US861118
申请日：1997-05-21
申请人： Edwin Flecha , Kenneth Gilbert Roessler , Robert Marshall Stowell
发明人： Edwin Flecha , Kenneth Gilbert Roessler , Robert Marshall Stowell
IPC分类号： G01Q20/04 , G01Q10/06 , G01Q70/00 , H01J37/26
CPC分类号： G01Q10/065 , B82Y35/00 , Y10S977/851
摘要： A scanning probe microscope includes a detection mechanism producing a feedback signal indicating a condition of engagement between the scanning probe and the surface of a sample being examined. When this engagement is above a threshold level, the lateral scanning movement between the probe and sample is stopped. The scanning movement occurs in incremental movements, and a feedback signal above the threshold level indicates that, if the scanning movement were to continue, the probe could not be moved upward fast enough to prevent a crash condition between the probe and the sample surface. The scanning movement is not re-started until the feedback signal indicates that the probe has been moved far enough away from the sample surface that such a crash condition can be avoided during the next incremental movement.
摘要翻译：扫描探针显微镜包括产生反馈信号的检测机构，该反馈信号指示扫描探针与正在检查的样品的表面之间的接合状态。当该接合高于阈值水平时，探针和样品之间的横向扫描运动停止。扫描运动发生在增量运动中，并且高于阈值水平的反馈信号指示，如果扫描运动持续，则探头不能快速向上移动，以防止探头和样品表面之间的碰撞状况。直到反馈信号表明探头已经远离样品表面移动足够远的扫描运动才能重新启动，在下一次增量运动期间可以避免这样的碰撞情况。

4. 发明授权

US07993464B2 Apparatus and method for indirect surface cleaning 有权
标题翻译：用于间接表面清洗的设备和方法
公开(公告)号：US07993464B2
公开(公告)日：2011-08-09
申请号：US12055178
申请日：2008-03-25
申请人： Jeffrey E. LeClaire , Kenneth Gilbert Roessler , David Brinkley
发明人： Jeffrey E. LeClaire , Kenneth Gilbert Roessler , David Brinkley
IPC分类号： B08B7/00
CPC分类号： B08B7/0042 , G03F1/82 , Y10S134/902
摘要： A method for laser surface cleaning of a target surface that has limited or no access to the environment directly above the surface to be cleaned. The method includes the ability to clean the surface with a reduced risk of substrate damage. The method includes direct laser excitation of a contaminated substrate surface and thermal transfer from the substrate to the contaminating particulate or contamination layer. The method also includes producing a thermally based removal and reducing a risk of substrate damage by keeping the temperature required to produce surface cleaning below the thermal damage level of the substrate material. In addition, the method includes reducing the risk of substrate damage by utilizing relatively long pulse-widths, providing for improved removal of small contaminants/particles, and directing the beam through a material disposed relative to the surface that is part of the substrates environmental enclosure.
摘要翻译：一种用于目标表面的激光表面清洁的方法，该方法在待清洁表面正上方有限制或无法进入环境。该方法包括清洁表面的能力，降低了底物损伤的风险。该方法包括对受污染的基底表面的直接激光激发和从基底到污染颗粒或污染层的热转移。该方法还包括通过将产生表面清洁所需的温度保持在基底材料的热损伤水平以下来产生基于热的去除并降低基底损伤的风险。此外，该方法包括通过利用相对较长的脉冲宽度降低衬底损伤的风险，提供改善的小污染物/颗粒的去除，以及引导光束穿过相对于作为衬底环境外壳的一部分的表面设置的材料。

5. 发明申请

US20090038637A1 APPARATUS AND METHOD FOR INDIRECT SURFACE CLEANING 有权
标题翻译：用于间接表面清洁的装置和方法
公开(公告)号：US20090038637A1
公开(公告)日：2009-02-12
申请号：US12055178
申请日：2008-03-25
申请人： Jeffrey E. LeClaire , Kenneth Gilbert Roessler , David Brinkley
发明人： Jeffrey E. LeClaire , Kenneth Gilbert Roessler , David Brinkley
IPC分类号： B08B7/00
CPC分类号： B08B7/0042 , G03F1/82 , Y10S134/902
摘要： A method for laser surface cleaning of a target surface that has limited or no access to the environment directly above the surface to be cleaned. The method includes the ability to clean the surface with a reduced risk of substrate damage. The method includes direct laser excitation of a contaminated substrate surface and thermal transfer from the substrate to the contaminating particulate or contamination layer. The method also includes producing a thermally based removal and reducing a risk of substrate damage by keeping the temperature required to produce surface cleaning below the thermal damage level of the substrate material. In addition, the method includes reducing the risk of substrate damage by utilizing relatively long pulse-widths, providing for improved removal of small contaminants/particles, and directing the beam through a material disposed relative to the surface that is part of the substrates environmental enclosure.
摘要翻译：一种用于目标表面的激光表面清洁的方法，该方法在待清洁表面正上方有限制或无法进入环境。该方法包括清洁表面的能力，降低了底物损伤的风险。该方法包括对受污染的基底表面的直接激光激发和从基底到污染颗粒或污染层的热转移。该方法还包括通过将产生表面清洁所需的温度保持在基底材料的热损伤水平以下来产生基于热的去除并降低基底损伤的风险。此外，该方法包括通过利用相对较长的脉冲宽度降低衬底损伤的风险，提供改善的小污染物/颗粒的去除，以及引导光束穿过相对于作为衬底环境外壳的一部分的表面设置的材料。

6. 发明授权

US06318159B1 Scanning force microscope with automatic surface engagement 失效
标题翻译：扫描力显微镜具有自动表面接合
公开(公告)号：US06318159B1
公开(公告)日：2001-11-20
申请号：US09557457
申请日：2000-04-24
申请人： Dong Chen , Edwin Flecha , James Michael Hammond , Kenneth Gilbert Roessler
发明人： Dong Chen , Edwin Flecha , James Michael Hammond , Kenneth Gilbert Roessler
IPC分类号： G01B528
CPC分类号： G01Q60/34 , Y10S977/851
摘要： The vibrating probe of a scanning force microscope is brought into engagement with a sample surface in an initial approach process moving the probe toward the sample surface until the amplitude of probe vibration at an excitation frequency is measurably affected by forces between the tip and the sample, an then in a final approach process in which a change in vibration amplitude caused by a dithering vibration superimposed on the excitation vibration exceeds a pre-determined threshold limit. The excitation frequency is reduced if the phase angle of vibrations exceeds another limit, and the amplitude of the excitation driving function is increased as the amplitude or tip vibration falls below a setpoint. During approach and scanning, vibration amplitude is measured through a demodulator having an intermediate reference signal locked in phase with the tip motion signal.
摘要翻译：扫描力显微镜的振动探针在初始逼近过程中与样品表面接合，使探针朝向样品表面移动，直到探针振动在激发频率处的振幅受到尖端和样品之间的力的可测量影响，然后在最终进场过程中，由激励振动叠加的抖动振动引起的振动振幅的变化超过预定的阈限。如果振动的相位角超过另一极限，则励磁频率降低，激励驱动功能的振幅随振幅或尖端振动下降到设定点以下而增加。在接近和扫描期间，通过具有与尖端运动信号同相锁定的中间参考信号的解调器来测量振幅。

7. 发明授权

US06234009B1 Controlling motion of a scanning force microscope probe tip moving into engagement with a sample surface 失效
标题翻译：控制扫描力显微镜探针尖端移动与样品表面接合的运动
公开(公告)号：US06234009B1
公开(公告)日：2001-05-22
申请号：US09557458
申请日：2000-04-24
申请人： Dong Chen , Edwin Flecha , James Michael Hammond , Kenneth Gilbert Roessler
发明人： Dong Chen , Edwin Flecha , James Michael Hammond , Kenneth Gilbert Roessler
IPC分类号： G01B734
CPC分类号： G01Q60/34 , Y10S977/851
摘要： The vibrating probe of a scanning force microscope is brought into engagement with a sample surface in an initial approach process moving the probe toward the sample surface until the amplitude of probe vibration at an excitation frequency is measurably affected by forces between the tip and the sample, an then in a final approach process in which a change in vibration amplitude caused by a dithering vibration superimposed on the excitation vibration exceeds a pre-determined threshold limit. The excitation frequency is reduced if the phase angle of vibrations exceeds another limit, and the amplitude of the excitation driving function is increased as the amplitude or tip vibration falls below a setpoint. During approach and scanning, vibration amplitude is measured through a demodulator having an intermediate reference signal locked in phase with the tip motion signal.
摘要翻译：扫描力显微镜的振动探针在初始逼近过程中与样品表面接合，使探针朝向样品表面移动，直到探针振动在激发频率处的振幅受到尖端和样品之间的力的可测量影响，然后在最终进场过程中，由激励振动叠加的抖动振动引起的振动振幅的变化超过预定的阈限。如果振动的相位角超过另一极限，则励磁频率降低，激励驱动功能的振幅随振幅或尖端振动下降到设定点以下而增加。在接近和扫描期间，通过具有与尖端运动信号同相锁定的中间参考信号的解调器来测量振幅。

8. 发明授权

US06169281A Apparatus and method for determining side wall profiles using a scanning probe microscope having a probe dithered in lateral directions 失效
标题翻译：使用具有在横向方向上抖动的探针的扫描探针显微镜来确定侧壁轮廓的装置和方法
公开(公告)号：US06169281A
公开(公告)日：2001-01-02
申请号：US09124302
申请日：1998-07-29
申请人： Dong Chen , Edwin Flecha , James Michael Hammond , Yves Corfield Martin , Kenneth Gilbert Roessler
发明人： Dong Chen , Edwin Flecha , James Michael Hammond , Yves Corfield Martin , Kenneth Gilbert Roessler
IPC分类号： H01J3726
CPC分类号： G01Q60/38 , G01Q70/10 , Y10S977/851 , Y10S977/852
摘要： The probe tip of a scanning probe microscope is scanned either along an X- or Y-direction of the apparatus, or along a scan line forming an acute angle with both the X- and Y-directions. During scanning, an excitation vibration is applied in the Z-direction, perpendicular to the surface of the sample being scanned. In a first mode of operation, a dithering vibration is applied to the probe tip, along the scan line. In a second mode of operation, the probe tip is dithered in a circular motion, which is used to identify the direction in which a wall extends along the sample surface. Alternately, in a third mode of operation, the probe tip is dithered in X- and Y-directions at differing vibrational frequencies to identify this direction of a wall. When this direction is identified, the probe proceeds straight up or down the wall to obtain an accurate profile thereof.
摘要翻译：扫描探针显微镜的探针尖端沿着装置的X方向或Y方向扫描，或者沿着与X方向和Y方向成锐角的扫描线扫描。在扫描期间，Z方向施加激励振动，垂直于被扫描样品的表面。在第一操作模式中，沿着扫描线向探针尖端施加抖动振动。在第二种操作模式中，探针尖端以圆周运动颤动，用于识别壁沿着样品表面延伸的方向。或者，在第三种操作模式中，探针尖端以不同的振动频率在X和Y方向上抖动以识别壁的这个方向。当该方向被识别时，探针直接向上或向下延伸到壁上以获得其准确的轮廓。

9. 发明授权

US08287653B2 Debris removal in high aspect structures 有权
标题翻译：高层结构中的碎屑去除
公开(公告)号：US08287653B2
公开(公告)日：2012-10-16
申请号：US11898836
申请日：2007-09-17
申请人： Tod Evan Robinson , Bernabe J. Arruza , Kenneth Gilbert Roessler
发明人： Tod Evan Robinson , Bernabe J. Arruza , Kenneth Gilbert Roessler
IPC分类号： B08B7/00 , B08B7/04
CPC分类号： G03F7/70925 , B03C7/006 , B08B1/00 , B08B7/0028 , G03F1/72 , G03F1/82
摘要： A method of debris removal is provided. The method includes positioning a nanometer-scaled tip adjacent to a piece of debris on a substrate. The method also includes adhering the piece of debris to the tip. In addition, the method also includes removing the piece of debris from the substrate by moving the tip away from the substrate.
摘要翻译：提供了一种清除碎屑的方法。该方法包括将邻近碎片的纳米级尖端定位在基底上。该方法还包括将碎片粘附到尖端。此外，该方法还包括通过将尖端远离基底从基片上去除碎片。

10. 发明申请

US20090070979A1 Vertical indent production repair 有权
标题翻译：垂直缩进生产维修
公开(公告)号：US20090070979A1
公开(公告)日：2009-03-19
申请号：US11898837
申请日：2007-09-17
申请人： Bernabe J. Arruza , Ronald Bozak , Kenneth Gilbert Roessler , Andrew Dinsdale , Tod Evan Robinson , David Brinkley
发明人： Bernabe J. Arruza , Ronald Bozak , Kenneth Gilbert Roessler , Andrew Dinsdale , Tod Evan Robinson , David Brinkley
IPC分类号： B82B3/00 , B30B9/28 , B30B13/00
CPC分类号： B81C1/00634 , B81C2201/0146 , Y10T29/49778
摘要： A method of nanomachining is provided. The method includes plunging a nanometer-scaled tip into a surface of a substrate at a first location in a first direction that is substantially perpendicular to the surface, thereby displacing a first portion of the substrate with the tip. The method also includes withdrawing the tip from the substrate in a second direction that is substantially opposite to the first direction. The method further includes moving at least one of the tip and the substrate laterally relative to each other. In addition, the method also includes plunging the tip into the substrate at a second location in a third direction that is substantially parallel to the first direction, thereby displacing a second portion of the substrate with the tip and withdrawing the tip from the substrate in a fourth direction that is substantially opposite to the third direction.
摘要翻译：提供了一种纳米加工的方法。该方法包括在基本上垂直于表面的第一方向上的第一位置处将纳米级尖端突入基片的表面，从而使基片的第一部分与尖端移位。该方法还包括在基本上与第一方向相反的第二方向从衬底取出尖端。该方法还包括相对于彼此横向移动尖端和衬底中的至少一个。此外，该方法还包括在基本上平行于第一方向的第三方向上的第二位置处将尖端插入基板，从而使基板的第二部分与尖端移位，并且将尖端从基板中取出第四方向与第三方向基本相反。

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