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    • 6. 发明公开
    • 탐침형 원자현미경 기반 나노정보저장장치의 헤드, 그 제조방법 및 나노저장장치
    • 基于扫描探针显微镜及其制造方法和纳米储存装置的纳米数据写入和读取装置的头
    • KR1020080098143A
    • 2008-11-07
    • KR1020070043449
    • 2007-05-04
    • 엘지전자 주식회사
    • 장성수
    • G01Q60/38G01Q60/42G01Q70/14B82Y10/00
    • G01Q60/38G01R1/06711G11B5/1272G11B9/149
    • A head of an SPM(Scanning Probe Microscope) based nano data storage, a manufacturing method thereof and a nano storage device are provided to improve the thickness uniformity of the cantilever and the probe and the abrasion resistance of the probe, and to enhance the resistance uniformity of a thermal recording heater and a thermal detective resistance sensor. A head(20) of an SPM(Scanning Probe Microscope) based nano data storage comprises a cantilever body(21), a probe(22), and a heater(23). The cantilever body comprises a resistance sensor(24) used for the reproduction of data. The probe is formed on one end of the cantilever body. The heater is formed on the upper side of the probe and heats up the probe. The cantilever body and probe are formed made of nitride films.
    • 提供基于SPM(扫描探针显微镜)的纳米数据存储的头,其制造方法和纳米存储装置,以改善悬臂和探针的厚度均匀性以及探针的耐磨性,并提高电阻 热敏记录加热器和热敏检测电阻传感器的均匀性。 基于SPM(扫描探针显微镜)的纳米数据存储器的头部(20)包括悬臂体(21),探针(22)和加热器(23)。 悬臂体包括用于再现数据的电阻传感器(24)。 探针形成在悬臂体的一端。 加热器形成在探头的上侧,并加热探头。 悬臂体和探针由氮化物膜制成。