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    • 9. 发明授权
    • 마스크 템플릿을 이용한 미세패턴 형성방법
    • 使用掩模模板制作精细图案的方法
    • KR100969172B1
    • 2010-07-14
    • KR1020090055437
    • 2009-06-22
    • 한국기계연구원
    • 신동윤이택민김동수
    • H01L21/027B82Y40/00
    • H01L51/0021H05K3/02H05K3/105H05K3/1258H05K2203/0568H05K2203/1105H05K2203/1142H05K2203/121G03F7/0032G03F7/161G03F7/2012
    • PURPOSE: A fine pattern forming method using a mask template is provided to implement a circuit which has high conductivity by using an ink where a silver nano particle is dispersed on the solution or solution type organic silver ink as a conductivity ink. CONSTITUTION: A mask template(M) is formed on a substrate(T). A mask template comprises an exposure part(E) which exposes one region of the substrate to the outside and a non-exposure part(A) which is prepared by polymer spread on the other region of the substrate. The conductivity ink(120) is laminated on the non-exposure part by supplying a conductivity ink to the upper side of the mask template. The conductivity ink is laminated on the substrate which is exposed by the exposure part. A heat processing step is included in order to extract a conductivity nano-cluster which is melted or dispersed to the conductivity ink.
    • 目的:提供一种使用掩模模板的精细图案形成方法,通过使用将银纳米颗粒分散在溶液或溶液型有机银墨作为导电油墨的墨水来实现具有高导电性的电路。 构成:在基板(T)上形成掩模模板(M)。 掩模模板包括将衬底的一个区域暴露于外部的曝光部分(E)和通过聚合物扩散在衬底的另一区域上而制备的非曝光部分(A)。 通过向掩模模板的上侧供给导电性油墨,将导电性油墨(120)层叠在非曝光部上。 导电性油墨层叠在被曝光部暴露的基板上。 包括热处理步骤以提取熔融或分散到导电性油墨中的导电性纳米簇。