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1. 发明公开

KR1020120062721A 자기장 센서 및 이의 제조 방법 有权
标题翻译：磁场传感器及其生产磁场传感器的方法
公开(公告)号：KR1020120062721A
公开(公告)日：2012-06-14
申请号：KR1020127004315
申请日：2010-07-26
申请人： 로베르트 보쉬 게엠베하
发明人： 샷츠프랑크 , 푹스티노 , 파이안도
IPC分类号： G01R33/04 , H01F27/28 , G01R33/028
CPC分类号： G01R33/04 , H01F27/2804 , Y10T29/49073 , G01R33/0286
摘要： 본 발명은 기판과 자심을 구비한 자력계에 관한 것이며, 이 경우 기판은 자심에 자속을 생성하기 위한 여기 코일을 포함하고, 여기 코일은 기판의 주 연장 평면에 대해 실질적으로 수직으로 배향된 코일 횡단면을 포함하며, 자심은 코일 횡단면의 외측에 배치된다.

2. 发明公开

KR1020080064084A 터널링 전류 제어 시스템 有权
标题翻译：使用隧道式电流传感校准微机电系统（MEMS）传感器的方法和系统
公开(公告)号：KR1020080064084A
公开(公告)日：2008-07-08
申请号：KR1020080000124
申请日：2008-01-02
申请人： 제너럴 일렉트릭 캄파니
发明人： 앤다라위스에마드앤다라위스 , 버캔어터그럴
IPC分类号： B81B7/02 , B81B7/00 , G01R15/20
CPC分类号： G01R35/00 , B81B3/0021 , G01R15/207 , G01R33/0283 , G01R33/0286 , G01R35/005
摘要： A tunneling current control system is provided to obtain a current sensor to be appropriately used even in a small space by using a tunneling current based magneto-MEMS component. A tunneling current control system includes a current sensor(100) having a conductor(4). The conductor generates a magnetic field(20). The current sensor is used to detect current(I) flowing through a current conductor in a non-contact manner. The current sensor use Lorenz power formed when the current sensor is disposed in the magnetic field induced by the current. The current sensor includes a tunneling current based magneto-MEMS component.
摘要翻译：提供隧道电流控制系统以通过使用基于隧道电流的磁MEMS组件来获得即使在小空间中也能适当使用的电流传感器。隧道电流控制系统包括具有导体（4）的电流传感器（100）。导体产生磁场（20）。电流传感器用于以非接触方式检测流过电流导体的电流（I）。电流传感器使用当电流传感器设置在由电流引起的磁场中时形成的Lorenz功率。电流传感器包括基于隧道电流的磁MEMS组件。

3. 发明公开

KR1020060126739A 자기장 센서 디바이스 및 나침반 失效
标题翻译：组合磁场梯度和磁场强度传感器
公开(公告)号：KR1020060126739A
公开(公告)日：2006-12-08
申请号：KR1020067014899
申请日：2004-12-16
申请人： 키네티큐 리미티드
发明人： 킹,다비드,오우리 , 브룬손,케빈,마이클
IPC分类号： G01R33/022
CPC分类号： G01R33/0286 , G01R33/022 , G01R33/0283
摘要： A magnetic field sensor device (2) is described that comprises an oscillatory member (8) and current control means (6). The current control means (6) is arranged to pass an alternating current (AC) along at least first (10) and second (12) current paths provided through the oscillatory member (8) and is arranged to provide magnetic gradiometer mode operation (i.e. to measure magnetic field gradient) in which current flow through the first current path (10) is in substantially the opposite direction to current flow through the second current path (12). The current control means (6) can also prove magnetometer mode operation (i.e. to measure magnetic field strength). The magnetic field sensor (2) may be used in a compass.
摘要翻译：描述了包括振荡构件（8）和电流控制装置（6）的磁场传感器装置（2）。电流控制装置（6）被布置成沿着通过振荡构件（8）提供的至少第一（10）和第二（12）电流路径传递交流电（AC），并且布置成提供磁梯度计模式操作以测量磁场梯度），其中流过第一电流路径（10）的电流基本上与通过第二电流路径（12）的电流相反。电流控制装置（6）还可以证明磁力计模式操作（即测量磁场强度）。磁场传感器（2）可以用于罗盘。

4. 发明授权

KR100444235B1 자기 및 가속도 동시 검출 방법 및 장치 失效
标题翻译： 자기및가속도동시검출방법및장치
公开(公告)号：KR100444235B1
公开(公告)日：2004-08-16
申请号：KR1020020078223
申请日：2002-12-10
申请人： 삼성전기주식회사
发明人： 김경수 , 안승도 , 조지만
IPC分类号： G01P1/02
CPC分类号： G01R33/0286 , G01D21/02 , G01P15/125 , G01P15/18 , G01R33/02
摘要： A method and a magnetic field and acceleration sensor for simultaneously sensing magnetism and acceleration are disclosed, the method comprising the steps of applying a current to first and second movable structures which are movable in a first direction, spaced from fixedly arranged first and second sensing electrodes, respectively, and arranged in a plane perpendicular to the first direction, applying magnetic field and/or acceleration signals to the first and second movable structures, detecting capacitance changes from the first and second sensing electrodes, the capacitance changes being caused by the distance change between the first and second movable structures and the first and second sensing electrodes, respectively, outputting a magnetic field signal by subtracting a signal detected from the second sensing electrode from a signal detected from the first sensing electrode, and outputting an acceleration signal by adding the signals detected from the first and second sensing electrodes.
摘要翻译：公开了一种用于同时感测磁性和加速度的方法和磁场及加速度传感器，所述方法包括以下步骤：向可在第一方向上移动的第一和第二可移动结构施加电流，所述第一和第二可移动结构与固定布置的第一和第二感测电极并且布置在垂直于第一方向的平面中，向第一和第二可移动结构施加磁场和/或加速度信号，检测来自第一和第二感测电极的电容变化，电容变化由距离变化引起在第一和第二可移动结构与第一和第二感测电极之间分别通过从第一感测电极检测到的信号中减去从第二感测电极检测到的信号来输出磁场信号，从第一和第二感测e检测到的信号 lectrodes。

5. 发明公开

KR1020040050399A 자기 및 가속도 동시 검출 방법 및 장치 失效
标题翻译：用于同时检测磁信号和加速信号的方法和装置
公开(公告)号：KR1020040050399A
公开(公告)日：2004-06-16
申请号：KR1020020078223
申请日：2002-12-10
申请人： 삼성전기주식회사
发明人： 김경수 , 안승도 , 조지만
IPC分类号： G01P1/02
CPC分类号： G01R33/0286 , G01D21/02 , G01P15/125 , G01P15/18 , G01R33/02
摘要： PURPOSE: A method and apparatus for detecting magnetic signal and acceleration signal simultaneously are provided to detect a magnetic signal and an acceleration signal simultaneously using one MEMS diaphragm type sensor. CONSTITUTION: The first and the second diaphragm structure(31,32) move along a constant direction by a physical force and are arranged in parallel each other. The first and the second sensing electrode(37,38) are fixed on a position separated from the first and the second diaphragm structure. An input electrode(33) is connected to one end of the first diaphragm structure and a current of a fixed frequency is inputted to the input electrode. A ground electrode(34) is connected to one end of the second diaphragm structure. And common electrodes(35,36) transfer a current transferred from the first diaphragm structure to another end of the second diaphragm structure.
摘要翻译：目的：提供一种用于同时检测磁信号和加速度信号的方法和装置，以使用一个MEMS膜片式传感器同时检测磁信号和加速度信号。构成：第一和第二隔膜结构（31,32）通过物理力沿恒定方向移动并且彼此平行布置。第一和第二感测电极（37,38）固定在与第一和第二隔膜结构分离的位置上。输入电极（33）连接到第一光阑结构的一端，固定频率的电流被输入到输入电极。接地电极（34）连接到第二隔膜结构的一端。并且公共电极（35,36）将从第一膜结构传递的电流传递到第二膜结构的另一端。

6. 发明公开

KR1020150132411A 가속도계 상에서 자기 물질들을 이용하는 자력계 审中-实审
标题翻译：磁力计使用磁性材料加速度计
公开(公告)号：KR1020150132411A
公开(公告)日：2015-11-25
申请号：KR1020157029236
申请日：2014-03-13
申请人： 인벤센스, 인크.
发明人： 시거,조셉 , 키우,진 , 톰슨,매튜,줄리안
IPC分类号： G01R33/028 , G01R33/02 , G01P15/08
CPC分类号： G01R33/02 , B81B2201/00 , G01P15/08 , G01R33/0286 , H01L21/00 , H01L2221/00
摘要： MEMS 디바이스는제 1 프루프매스, 제 1 프루프매스의표면상에부분적으로증착된제 1 자화된자기물질, 제 1 프루프매스를지지하기위해기판에고정된제 1 스프링, 및제 1 프루프매스에결합되고주변가속도에의해야기된제 1 프루프매스의움직임을감지하도록동작가능한제 1 감지요소를포함한다. MEMS 디바이스는제 1 프루프매스에결합되고주변자기장에의해야기된제 1 프루프매스의움직임을감지하도록동작가능한제 2 감지요소를더 포함한다.

7. 发明公开

KR1020140131229A 멤스 자계 센서 审中-实审
标题翻译：微电子机械系统磁场传感器
公开(公告)号：KR1020140131229A
公开(公告)日：2014-11-12
申请号：KR1020130050332
申请日：2013-05-03
申请人： 엘지이노텍 주식회사
发明人： 서상원 , 고용준 , 권승화 , 서정기 , 지칠영 , 최완섭
IPC分类号： G01R33/02 , G01R27/26 , B81B3/00
CPC分类号： G01R33/0286
摘要： The present disclosure provides a magnetic field sensor, for a magnetic field sensor sensing a magnetic field by current to be measured, which comprises: a substrate; a first driving electrode which has a path for flowing the reference current to be supplied from the substrate and which can move by the magnetic field of the current to be measured; and a second driving electrode which has a path for flowing the reference current to be supplied from the substrate and which can move by the magnetic field of the current to be measured, wherein the magnetic field sensor is configured to measure a change in capacitance in caused by the movement of the first driving electrode and the second driving electrode. Therefore, it is possible to improve a sensing function by detecting with two driving electrodes without a fixed electrode to maximize the mechanical displacement amount.
摘要翻译：本公开提供了一种用于磁场传感器的磁场传感器，其通过待测量的电流感测磁场，其包括：衬底; 第一驱动电极，其具有用于使从基板供给的基准电流流过并能够通过待测电流的磁场移动的路径; 以及第二驱动电极，其具有用于使从基板供给的基准电流流过并且可以通过待测电流的磁场移动的路径，其中，所述磁场传感器被配置为测量所引起的电容的变化通过第一驱动电极和第二驱动电极的移动。因此，可以通过用没有固定电极的两个驱动电极进行检测来提高感测功能，以使机械位移量最大化。

8. 发明公开

KR1020120066008A 자기장 센서 有权
标题翻译：磁场传感器
公开(公告)号：KR1020120066008A
公开(公告)日：2012-06-21
申请号：KR1020127005040
申请日：2010-08-03
申请人： 로베르트 보쉬 게엠베하
发明人： 람멜게르하르트 , 바이쓰슈테판
IPC分类号： G01R33/00 , G01R33/028
CPC分类号： G01R33/0035 , G01R33/0017 , G01R33/0286
摘要： 본 발명은 센서 위치에서 자기장을 측정하기 위한 자기장 센서에 관한 것이며, 상기 자기장 센서는 전기 절연 재료로 이루어진 회로 기판과, 회로 기판상에 배치되고 전기 접점들(3, 5)을 통해서 회로 기판상에 제공되는 제1 스트립 도체들과 연결되는 자기장 센서 소자와, 회로 기판상에 제공되어 센서 위치에서 보정 전류의 인가 시 사전 결정된 시험 자기장을 생성하는, 시험 자기장을 생성하기 위한 하나 이상의 제2 스트립 도체를 포함한다.
摘要翻译：用于测量传感器位置处的磁场的磁场传感器具有包括电绝缘材料的印刷电路板; 位于印刷电路板上的磁场传感器元件，经由电触头连接到设置在印刷电路板上的第一印刷导体; 以及用于产生测试磁场的至少一个第二印刷导体，当在传感器位置处施加校准电流时，第二印刷导体设置在印刷电路板上并产生预定的测试磁场。

9. 发明公开

KR1020090001651A 자기변형 멤스 작동기의 거동 예측 프로그램 개발 无效
标题翻译：自主修改MEMS机器行为的可预测性计划开发
公开(公告)号：KR1020090001651A
公开(公告)日：2009-01-09
申请号：KR1020070044332
申请日：2007-05-08
申请人： 인하대학교 산학협력단
发明人： 원태영 , 김한건 , 김영규 , 박순열 , 조범구 , 이승배
IPC分类号： G06Q50/04
CPC分类号： Y02P90/30 , G06F17/5036 , G01R33/0286
摘要： A program development capable of expecting conduct of magnetostrictive MEMS operator is provided to reduce design cost by estimating efficiency of MEMS device by using the program. The program enhance reliability of the simulation result by considering elastic energy of magnetostrictive materials. A program development capable of expecting conduct of magnetostrictive MEMS operator comprises an extracting step of magnetostrictive coefficient and a beam element and a plate element which are proposed for finite element method application.
摘要翻译：提供能够期待磁致伸缩MEMS操作器的行为的程序开发，以通过使用程序估计MEMS器件的效率来降低设计成本。该程序通过考虑磁致伸缩材料的弹性能来提高仿真结果的可靠性。能够期待磁致伸缩MEMS算法的运行的程序开发包括提出用于有限元法应用的磁致伸缩系数的提取步骤和梁元件和板元件。

10. 发明授权

KR101903914B1 박막 기반 자력계 有权
公开(公告)号：KR101903914B1
公开(公告)日：2018-10-02
申请号：KR1020177004069
申请日：2015-08-05
申请人： 에이엠에스 인터내셔널 에이쥐
发明人： 반빅,조제프토마스마티너스 , 반더아브루트,캐스퍼
IPC分类号： G01R33/038 , G01R33/028 , G01C17/28
CPC分类号： G01R33/0286 , G01C17/28 , G01R33/0283 , G01R33/038
摘要： 다양한예시적인실시예는발진주파수를측정하기위한자력계디바이스에관한것이며, 상기자력계디바이스는증폭기및 금속박막의제1 입력부에연결된전압바이어스를포함하는피드스루루프; 박막출력부에연결된박막접지부; 상기증폭기의제2 입력부에연결된제1 고정판출력부를포함하는고정판으로서, 상기고정판은상기금속박막으로부터물리적으로분리되어있지만그러나로렌츠힘에의해상기금속박막에연결되고, 상기물리적분리는전류의방향에대한자기장의각도로인해상이한, 고정판; 로렌츠힘에민감한제2 고정판출력부; 및상기로렌츠힘에기초하여자기력의각도를계산하기위해, 상기제2 고정판출력부에연결된회로를포함한다.

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