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    • 3. 发明公开
    • 감광성 엘리먼트, 레지스트 패턴의 형성방법 및 프린트배선판의 제조방법
    • 感光元件,形成电阻图案的方法以及印刷线路板的制造方法
    • KR1020060055547A
    • 2006-05-23
    • KR1020067005557
    • 2004-09-17
    • 히타치가세이가부시끼가이샤
    • 쿠마키타카시미야사카마사히로이치하시야스히사이토토시키카지마코토
    • G03F7/031
    • G03F7/029C08F2/50G03F7/031Y10S430/106Y10S430/114Y10S430/115
    • A photosensitive element which is excellent in sensitivity and resolution in exposure to light having a wavelength of especially 400 to 450 nm and which, through development, gives a resist pattern having a rectangular section. The photosensitive element comprises a substrate and a photosensitive resin composition layer constituted of a photosensitive resin composition comprising (A) a binder polymer, (B) a photopolymerizable compound, and (C) a photopolymerization initiator, and is characterized in that the photosensitive resin composition contains as the ingredient (C) a thioxanthone compound represented by the following formula (I) and that when the amount of the thioxanthone compound, in pts.wt. per 100 pts.wt. of the sum of the ingredients (A) and (B), is expressed by P and the thickness of the photosensitive resin composition layer is expressed by Q [mum], then R, which is the product of P and Q, satisfies the relationship (1). In the following formula (I), R1 to R8 each represents hydrogen, halogeno, or a hydrocarbon group. (1) 25.5
    • 一种感光元件,其在曝光于特别是400〜450nm的光下的灵敏度和分辨率优异,并且通过显影,得到具有矩形截面的抗蚀剂图案。 感光元件包括基材和感光性树脂组合物层,该感光性树脂组合物由(A)粘合剂聚合物,(B)光聚合性化合物和(C)光聚合引发剂组成的感光性树脂组合物,其特征在于,所述感光性树脂组合物 含有作为成分(C)由下式(I)表示的噻吨酮化合物,并且当噻吨酮化合物的量以重量计 每100 pts.wt (A)和(B)之和的总和由P表示,感光性树脂组合物层的厚度由Q [mum]表示,则作为P和Q的乘积的R满足关系式 (1)。 在下式(I)中,R 1至R 8各自表示氢,卤素或烃基。 (1)25.5 <= R <= 79.0