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1. 发明授权

KR101360159B1 이중관 구조의 냉매가스 분사관 및 이를 이용한 핸들러 장치 有权
标题翻译：具有双管结构的制冷剂注射管，并与之同时处理
公开(公告)号：KR101360159B1
公开(公告)日：2014-02-13
申请号：KR1020120091279
申请日：2012-08-21
申请人： 허경삼
发明人： 권오석
IPC分类号： H01L21/66 , G01R31/26
摘要： Disclosed is a refrigerant gas injection tube having a double-tube structure for a handler. The injection tube includes a dry air tube injecting/discharging dry air; a refrigerant gas tube having an external diameter which is smaller than the inner diameter of the dry air tube and arranged in the dry air tube; and a refrigerant gas injection hole penetrating the dry air tube and the refrigerant gas tube. The refrigerant gas injection hole may be formed to spray the refrigerant gas injected to the refrigerant gas injection tube to the outside of the dry air tube without spraying the refrigerant gas into the dry air tube.
摘要翻译：公开了一种具有用于处理器的双管结构的制冷剂气体注入管。注射管包括注入/排放干燥空气的干燥空气管; 制冷剂气体管，其外径小于所述干燥空气管的内径，并布置在所述干燥空气管中; 以及贯穿干燥空气管和制冷剂气体管的制冷剂气体注入孔。制冷剂气体注入孔可以形成为将喷射到制冷剂气体注入管的制冷剂气体喷射到干燥空气管的外部，而不将制冷剂气体喷射到干燥空气管中。

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