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1. 发明公开

KR1020070121113A 기판 엣지 노광 장치 有权
标题翻译：用于边缘边缘的接触装置
公开(公告)号：KR1020070121113A
公开(公告)日：2007-12-27
申请号：KR1020060055748
申请日：2006-06-21
申请人： 주식회사 코디엠 , 이우영 , 진경복
发明人： 지이권 , 박용규 , 이우영 , 진경복
IPC分类号： H01L21/027
CPC分类号： G03F7/2028 , G03F7/70175 , G03F7/702
摘要： An apparatus for exposing the edge of a substrate is provided to eliminate the necessity for a process for removing an edge photoresist layer by cleanly removing a photoresist layer deposited at the edge of a substrate. A reflection plate reflects the light emitted from a lamp downward. A first reflection mirror reflects the light transferred from the lamp and the reflection plate to modify a path. A second reflection mirror(230) reflects the light transferred from the first reflection mirror to modify a path. A slot plate has a slot through which more than part of the light transferred from the second reflection mirror passes. Light is transferred to the edge of the substrate positioned under the slot plate through the slot. A lens is disposed between the second reflection mirror and the slot plate, condensing the light transferred from the second reflection mirror and transferring the condensed light to the slot plate.
摘要翻译：提供了用于暴露基板边缘的装置，以消除通过干净地去除沉积在基板边缘处的光致抗蚀剂层来去除边缘光致抗蚀剂层的工艺的必要性。反射板将从灯发出的光向下反射。第一反射镜反射从灯传输的光和反射板来修改路径。第二反射镜（230）反射从第一反射镜传输的光以改变路径。狭槽板具有狭槽，多个部分从第二反射镜传递的光通过该狭槽通过。光通过槽转移到位于槽板下方的衬底的边缘。透镜设置在第二反射镜和狭槽板之间，将从第二反射镜传送的光聚焦并将聚光的光转移到狭槽板。

2. 发明授权

KR100823179B1 기판 엣지 노광 장치 有权
标题翻译：基板边缘曝光装置
公开(公告)号：KR100823179B1
公开(公告)日：2008-04-18
申请号：KR1020060055748
申请日：2006-06-21
申请人： 주식회사 코디엠 , 이우영 , 진경복
发明人： 지이권 , 박용규 , 이우영 , 진경복
IPC分类号： H01L21/027
摘要： 본 발명의 기판 엣지 노광 장치는 램프; 상기 램프로부터 발광 되는 빛을 하부로 반사시키는 반사판; 상기 램프 및 반사판으로부터 전달되는 빛을 반사시켜 경로를 변경하는 제1 반사 미러; 상기 제1 반사 미러로부터 전달되는 빛을 반사시켜 경로를 변경하는 제2 반사 미러; 및 상기 제2 반사 미러로부터 전달되는 빛의 일부 이상을 통과시키는 슬롯이 구비되어 있는 슬롯 플레이트;를 포함하며, 상기 슬롯을 통해 빛을 상기 슬롯 플레이트 하부에 위치되어진 기판의 엣지에 전달한다.
기판 엣지, 반사 미러

3. 发明授权

KR100823182B1 액체분사용 슬릿 노즐 有权
标题翻译：用于喷雾液体的液体喷嘴
公开(公告)号：KR100823182B1
公开(公告)日：2008-04-21
申请号：KR1020070026694
申请日：2007-03-19
申请人： 주식회사 코디엠 , 이우영 , 김종원
发明人： 강흥석 , 박용규 , 이우영 , 김종원
IPC分类号： G02F1/13
CPC分类号： B05C5/0254 , B05B1/044 , B05C5/0262 , B05C11/10 , G02F1/1303
摘要： A slit nozzle for injecting liquid is provided to secure the uniform liquid injection pressure over the entire slit nozzle, thereby injecting the liquid into an object with wide area uniformly. A supply member has an inlet connected with a pipe for supplying liquid. A longitudinally formed guide groove is communicated with the inlet. A distribution member(200) is closely combined with a side of the guide groove and has a longitudinally formed distribution groove at the other side thereof. The distribution groove and guide groove are communicated by plural distribution holes. A fixing member(300) is combined with the other side of the distribution member. A gap plate(400) is installed between the distribution member and the fixing member and forms a gap so that the liquid is injected downwardly toward the distribution member and the fixing member. The section shape of the guide groove and the distribution groove is a semi-circle or a semi-ellipse.
摘要翻译：设置用于注入液体的狭缝喷嘴以确保在整个狭缝喷嘴上均匀的液体喷射压力，从而将液体均匀地喷射到具有广泛区域的物体中。供给构件具有与用于供应液体的管连接的入口。纵向成形的引导槽与入口连通。分配构件（200）与导向槽的一侧紧密结合，并且在其另一侧具有纵向形成的分配槽。分配槽和引导槽通过多个分配孔连通。固定构件（300）与分配构件的另一侧组合。间隔板（400）安装在分配构件和固定构件之间并形成间隙，使得液体朝向分配构件和固定构件向下注入。引导槽和分配槽的截面形状是半圆形或半椭圆形。

4. 发明授权

KR100823181B1 냉각장치가 구비된 노광설비 有权
标题翻译：具有冷却装置的曝光装置
公开(公告)号：KR100823181B1
公开(公告)日：2008-04-21
申请号：KR1020070026693
申请日：2007-03-19
申请人： 주식회사 코디엠 , 이우영 , 서화일 , 김종원
发明人： 강흥석 , 박용규 , 이우영 , 서화일 , 김종원
IPC分类号： H01L21/027
CPC分类号： G03F7/70891 , G03F7/7015 , G03F7/702
摘要： Exposure equipment with a cooling apparatus is provided to adjust the temperature in a chamber by supplying and circulating water of low temperature to cooling pipes installed in both sides of the chamber. A reflection plate for reflecting the light generated from a lamp downward is installed in a chamber. A pair of first and second reflection mirrors reflect the light transferred from the reflection plate in both lateral directions. A pair of lenses collect the light transferred as a dispersed state from the second reflection mirror to transfer the collected light to the edge of a substrate. Cooling pipes(150a,150b) uniformly maintains the inner temperature of the chamber increased by the lamp, installed in both lateral surfaces of the chamber. A sub chamber can guarantee the path of the parallel light transferred to the first reflection mirror through the reflection plate, installed between the lamp and the first reflection mirror.
摘要翻译：提供具有冷却装置的曝光设备，通过将低温水供应并循环到安装在室的两侧的冷却管道来调节室内的温度。用于将从灯泡产生的光向下反射的反射板安装在室中。一对第一和第二反射镜在两个横向上反射从反射板传递的光。一对透镜从第二反射镜收集作为分散状态传送的光以将收集的光转印到基板的边缘。冷却管（150a，150b）通过安装在室的两个侧表面中的灯均匀地保持室的内部温度升高。子室可以保证通过安装在灯和第一反射镜之间的反射板传递到第一反射镜的平行光的路径。

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