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    • 1. 发明公开
    • 인라인 CT 검사시스템 및 그 검사방법
    • 内联计算机检查系统及其使用方法
    • KR1020110088139A
    • 2011-08-03
    • KR1020100007902
    • 2010-01-28
    • 주식회사 쎄크
    • 김영만김선택최광남윤여송박병준오현명류기웅김종현
    • G01B11/24H05K13/08
    • PURPOSE: Inline CT inspection system and method are provided to reduce inspection hours by partial scanning of a target and parallel processing of partial image data taken through the scanning by a plurality of cores in a parallel processing unit. CONSTITUTION: An inline CT inspection system comprises a CT unit(30), an image processing unit(95), a loading unit(10), an unloading unit(70) and a control unit(90). The CT unit takes CT images of a target, an electronic part, such as semiconductor. The image processing unit parallel-processes a plurality of partial image data taken by the CT unit, with a plurality of cores in a parallel processing unit. The image processing unit re-organizes the parallel-processed data as tomography images. The image processing unit corrects slope of the tomography image, compares the images with pre-stored standard images and determines quality of the target.
    • 目的:提供在线CT检查系统和方法,以通过对目标进行部分扫描来减少检查时间,并且通过并行处理单元中的多个核心对通过扫描拍摄的部分图像数据进行并行处理。 构成:在线CT检查系统包括CT单元(30),图像处理单元(95),加载单元(10),卸载单元(70)和控制单元(90)。 CT单元接收靶的CT图像,半导体等电子部件。 图像处理单元将并行处理单元中的多个核并行处理由CT单元取得的多个部分图像数据。 图像处理单元将并行处理的数据重新组织为断层图像。 图像处理单元校正断层摄影图像的斜率,将图像与预先存储的标准图像进行比较并确定目标的质量。
    • 2. 发明公开
    • X선 검사시스템 및 이를 이용한 검사방법
    • X射线检测系统和使用它的METOHD
    • KR1020110044479A
    • 2011-04-29
    • KR1020090101178
    • 2009-10-23
    • 주식회사 쎄크
    • 김영만김형범윤중석김선택최광남윤여송박병준오현명김종현
    • H05K3/34H05K13/08G01B11/24
    • PURPOSE: An X-ray checking system and checking method using the same are provided to secure checking quality by acquiring a slice image about a checked body. CONSTITUTION: A housing(10) shields radiation. An X-ray inspection unit(30) is installed in the inner side of the housing. An inline transport unit(50) is installed in the inner side of the housing. The inline transport unit supplies a plurality of test materials. A controller(70) is electrically connected to the inline transport unit. The controller acquires the slice image through a GPU(Graphic Processing Unit) having parallel core. The controller distinguishes the first and the second brazing deformity. The controller obtains the slice image.
    • 目的:提供一种X射线检查系统及使用该X射线检查系统的检查方法,以通过获取关于检查体的切片图像来确保检查质量。 构成:一个外壳(10)屏蔽辐射。 X射线检查单元(30)安装在壳体的内侧。 内置运送单元(50)安装在壳体的内侧。 在线运输单元提供多种测试材料。 控制器(70)电连接到内联传送单元。 控制器通过具有并行核心的GPU(图形处理单元)获取切片图像。 控制器区分第一和第二钎焊变形。 控制器获取切片图像。
    • 6. 发明公开
    • 반도체칩의 CT 검사방법
    • 计算机图像检查半导体芯片的方法
    • KR1020120126660A
    • 2012-11-21
    • KR1020110044643
    • 2011-05-12
    • 주식회사 쎄크
    • 김종현김규년김영만김선택
    • H01L21/66
    • PURPOSE: A computed tomography inspecting method of a semiconductor chip is provided to regularly maintain transmission strength of x-rays for a plurality of solder balls projected onto a detector by uniformly maintaining array density of the plurality of solder balls formed on a BGA(Ball Grid Array). CONSTITUTION: A semiconductor chip is settled on an inspection pocket with a predetermined inspection angle(S1). A plurality of two dimensional transmission images is obtained by performing CT(Computer Tomography) of the semiconductor chip while rotating the inspection pocket 180degrees or 360degrees(S2). The plurality of two dimensional transmission images is reorganized to a three-dimensional tomography image(S3). The three-dimensional tomography image is compared with standard video data which is stored in advance(S4). [Reference numerals] (S1) A BGA is settled with a predetermined inspection angle; (S2) Two dimensional transmission image data acquisition; (S3) Reorganization to three-dimensional tomography image data; (S4) Bad quality judgment
    • 目的:提供半导体芯片的计算机断层摄影检查方法,以通过均匀地保持形成在BGA上的多个焊球的阵列密度(球形网格)来定期地保持投射到检测器上的多个焊球的x射线的透射强度 阵列)。 构成:半导体芯片以预定的检查角度安装在检查口袋上(S1)。 通过在检查袋旋转180度或360度(S2)的同时,通过执行半导体芯片的CT(计算机断层扫描)来获得多个二维透射图像。 将多个二维透射图像重组为三维断层图像(S3)。 将三维断层图像与预先存储的标准视频数据进行比较(S4)。 (参考号)(S1)以预定的检查角度确定BGA; (S2)二维传输图像数据采集; (S3)重组为三维断层图像数据; (S4)质量差评