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1. 发明公开

KR1020140022653A 광분해 고도산화공정을 이용한 금속막의 연마 장치 및 방법 审中-实审
标题翻译：使用光催化高级氧化工艺抛光金属层的装置和方法
公开(公告)号：KR1020140022653A
公开(公告)日：2014-02-25
申请号：KR1020120089064
申请日：2012-08-14
申请人： 주식회사 동진쎄미켐
发明人： 임진혁 , 박종대 , 최정민
IPC分类号： H01L21/304
CPC分类号： H01L21/3212 , B24B37/04 , B24B57/02
摘要： The present invention discloses a device and a method for mechanically polishing a metal film using a photolysis oxidation process. The metal film polishing process comprises a step of generating an OH radical by irradiating chemical-mechanical polishing slurry with ultraviolet ray including ozone (O3); a step of making the OH radical-generated chemical-mechanical polishing slurry composition come in contact with a substrate with a metal film; and a step of polishing the metal film by moving the metal film, which is oxidized by the OH radical, along a polishing pad in which the OH radical is generated by the ultraviolet ray after the ozone reacts with the water of the chemical-mechanical polishing slurry. [Reference numerals] (AA) Step of salting washed radish in salt water; (BB) Step of dehydrating the salted radish, followed by mixing with sub-ingredients; (CC) Step of preparing a red beet dongchimi liquid
摘要翻译：本发明公开了一种使用光解氧化法机械研磨金属膜的装置和方法。金属膜抛光方法包括通过用包括臭氧（O 3）在内的紫外线照射化学机械抛光浆液而产生OH自由基的步骤; 使OH自由基产生的化学机械抛光浆料组合物与金属膜接触的步骤; 以及通过在臭氧与化学机械抛光的水反应后沿着通过紫外线产生OH自由基的抛光垫移动由OH自由基氧化的金属膜来抛光金属膜的步骤泥浆。（附图标记）（AA）盐水中洗涤萝卜盐水的步骤; （BB）将咸萝卜脱水，然后与次成分混合; （CC）准备红甜菜东芝液的步骤

2. 发明公开

KR1020100123385A 초임계 유체를 이용한 전이 금속 실리사이드의 제조방법 및 이에 의하여 제조된 전이 금속 실리사이드 有权
标题翻译：使用超临界流体和过渡金属硅化物制备过渡金属硅化物的方法
公开(公告)号：KR1020100123385A
公开(公告)日：2010-11-24
申请号：KR1020090042594
申请日：2009-05-15
申请人： 주식회사 동진쎄미켐
发明人： 임진혁 , 박종대 , 공현구 , 김종원
IPC分类号： C01B33/06 , C09K3/14 , H01L21/304
CPC分类号： Y02P20/544 , C01B33/06 , C09K3/1454 , H01L21/30625
摘要： PURPOSE: A method for manufacturing a transition metal silicide using supercritical fluid and the transition metal silicide are provided to make a transition metal compound react with a silicon compound by the supercritical fluid, thereby increasing a yield of the transition metal silicide. CONSTITUTION: A transition metal compound and organic solvent are inputted to a reaction tank. The organic solvent is heated and pressed so that the organic solvent reaches to a supercritical state. A silicone compound is inputted into the reaction tank(S20). Mixed solution is transferred to an impurity removing tank. The organic solvent and a not reacted substance are removed from the mixed solution(S30). Alcohol with 1 to 5 carbon atoms, ketone, and ether can be used as the organic solvent.
摘要翻译：目的：提供使用超临界流体和过渡金属硅化物制造过渡金属硅化物的方法，以使过渡金属化合物通过超临界流体与硅化合物反应，从而提高过渡金属硅化物的产率。构成：将过渡金属化合物和有机溶剂输入反应槽。将有机溶剂加热并加压，使有机溶剂达到超临界状态。将硅酮化合物输入反应槽（S20）。将混合溶液转移到杂质去除罐中。从混合溶液中除去有机溶剂和未反应物质（S30）。可以使用具有1至5个碳原子的醇，酮和醚作为有机溶剂。

3. 发明公开

KR1020110036294A 생촉매 페록시다아제를 포함하는 텅스텐 연마 조성물 无效
标题翻译：含有生物化学过氧化物的硫化钨抛光组合物
公开(公告)号：KR1020110036294A
公开(公告)日：2011-04-07
申请号：KR1020090093877
申请日：2009-10-01
申请人： 주식회사 동진쎄미켐
发明人： 박혜정 , 임진혁 , 박종대 , 공현구
IPC分类号： C09K3/14
CPC分类号： C09G1/02 , C09K3/1409 , C09K3/1454 , H01L21/30625
摘要： PURPOSE: A tungsten polishing composition is provided to ensure stable polishing rate while not generating Fe ions(Fe3+) and to prevent defects and erosion generated on a tungsten wafer by biocatalizer peroxidase as a catalyst. CONSTITUTION: A tungsten polishing composition comprises a peroxidase biocatalyst, abrasive and oxidizer. The peroxidase is selected from the group consisting of horseradish peroxidase, coprinus peroxidase, and glutathion peroxidase. The peroxidase is included in the amount of 0.0001~1.0 weight%. The abrasive is selected from the group consisting of γ-alumina, α-alumina, fumed silica, colloidal silica, ceria, and their mixture.
摘要翻译：目的：提供钨抛光组合物以确保稳定的抛光速率，同时不产生Fe离子（Fe3 +），并防止生物催化剂过氧化物酶作为催化剂在钨晶片上产生的缺陷和侵蚀。构成：钨抛光组合物包含过氧化物酶生物催化剂，磨料和氧化剂。过氧化物酶选自辣根过氧化物酶，香菇过氧化物酶和谷胱甘肽过氧化物酶。过氧化物酶的含量为0.0001〜1.0重量％。研磨剂选自γ-氧化铝，α-氧化铝，热解二氧化硅，胶体二氧化硅，二氧化铈及其混合物。

4. 发明授权

KR101992422B1 광분해 고도산화공정을 이용한 금속막의 연마 장치 및 방법 有权
公开(公告)号：KR101992422B1
公开(公告)日：2019-06-24
申请号：KR1020120089064
申请日：2012-08-14
申请人： 주식회사 동진쎄미켐
发明人： 임진혁 , 박종대 , 최정민
IPC分类号： H01L21/321 , B24B57/02 , B24B37/04

5. 发明授权

KR101599776B1 초임계 유체를 이용한 전이 금속 실리사이드의 제조방법 및 이에 의하여 제조된 전이 금속 실리사이드 有权
标题翻译：使用超临界流体和过渡金属硅化物制备过渡金属硅化物的方法
公开(公告)号：KR101599776B1
公开(公告)日：2016-03-04
申请号：KR1020090042594
申请日：2009-05-15
申请人： 주식회사 동진쎄미켐
发明人： 임진혁 , 박종대 , 공현구 , 김종원
IPC分类号： C01B33/06 , C09K3/14 , H01L21/304
CPC分类号： Y02P20/544
摘要： 초임계유체를이용하여, 산화성및 연마효율이우수한전이금속실리사이드의제조방법이개시된다. 상기전이금속실리사이드의제조방법은, 반응탱크에전이금속화합물및 유기용매를투입하고, 상기유기용매가초임계상태에도달하도록가열및 가압을하는단계(S 10); 상기반응탱크에실리콘화합물을투입하고혼합하는단계(S 20); 및상기혼합된혼합액을불순물제거탱크로이송하고, 상기유기용매및 미반응물을제거하는단계(S 30)를포함한다. 여기서, 상기유기용매및 미반응물을제거하는단계는, 상기불순물제거탱크를탈이온수가포함된유기용매배출탱크에연결한후, 상기불순물제거탱크의온도를상기유기용매의끓는점이상으로조절하고질소가스로퍼징하여, 상기유기용매및 미반응물을탈이온수를통하여기포로배출하는것이바람직하다.

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