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    • 8. 发明公开
    • 복합형 미세 압전 초음파 트랜스듀서 제작방법
    • 多功能压电微超声波超声波传感器及其制造方法
    • KR1020130115656A
    • 2013-10-22
    • KR1020120038166
    • 2012-04-12
    • 재단법인대구경북과학기술원
    • 최홍수최지웅장재은
    • G01N29/24A61B8/00H04R17/00
    • A61B8/4494A61B8/4488G01N29/24H01L41/0472H01L41/083H01L41/25
    • PURPOSE: A method for manufacturing a complex micropiezoelectric ultrasonic transducer is provided to enable the reception and the transmission of ultrasonic signals by arranging a receiving unit and a transmitting unit on a single substrate, thereby forming a compact complex micropiezoelectric ultrasonic transducer. CONSTITUTION: A complex micropiezoelectric ultrasonic transducer (100) includes a substrate (110), an ultrasonic transmitter (140), and an ultrasonic receiver (130). The ultrasonic transmitter is arranged between a pair of electrodes on the substrate and generates ultrasonic signals by using a thick film piezoelectric layer. The ultrasonic receiver, which is arranged between the electrodes on the substrate to be adjacent to the ultrasonic transmitter, includes a thin film piezoelectric layer thinner than the thick film piezoelectric layer and receives the ultrasonic waves which are transmitted by the ultrasonic transmitter, reflected by an object, and returned.
    • 目的:提供一种制造复合微电子超声波换能器的方法,通过在单个基板上布置接收单元和发送单元来实现超声波信号的接收和发送,从而形成紧凑的复合微电子超声换能器。 构成:复合微电子超声波换能器(100)包括衬底(110),超声波发射器(140)和超声波接收器(130)。 超声波发射器配置在基板上的一对电极之间,通过使用厚膜压电层产生超声波信号。 布置在与超声波发送器相邻的基板上的电极之间的超声波接收器包括比厚膜压电层薄的薄膜压电体层,并且接收由超声波发送器发送的超声波, 对象,并返回。