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1. 发明公开

KR1020030001306A 세정방법 및 그 장치 无效
标题翻译：清洁方法和清洁装置
公开(公告)号：KR1020030001306A
公开(公告)日：2003-01-06
申请号：KR1020020034989
申请日：2002-06-21
申请人： 요코가와 덴키 가부시키가이샤 , 후지 덴키 가부시키가이샤
发明人： 요시다다카시 , 이와사키모토아키 , 야노다츠로 , 하바야구라오 , 시로마다카히로
IPC分类号： H01L21/304
CPC分类号： B24C3/322 , B08B3/02 , B08B5/02 , B08B7/0092 , B24C1/003 , G11B23/505 , H01L21/67051 , Y10S134/902
摘要： PURPOSE: To solve the problem that it is difficult to remove minute particles of trash or the like in a cleaning solvent and the object to be cleaned is sometimes damaged since it is difficult to make the particle size of the solvent small. CONSTITUTION: The gas of the solvent (CO2) is made to pass through a line filter to remove the particles of trash or the like, which is then transformed into solid particles or liquid drops by jetting it from a nozzle. The obtained solid particles or liquid drops are jetted toward the object to be cleaned and the particle or organic matter on the surface of the object to be cleaned is removed. Since the solvent can be transformed into the solid particles or liquid drops by adjusting the gap between the nozzle and the object to be cleaned, the optimum state of the solvent can be selected according to the dirty level of the object to be cleaned. Since the particles of trash or the like in the solvent can be removed by the line filter easily, it is not necessary to use an expensive high-purity solvent and the running cost can be reduced.
摘要翻译：目的：为了解决在清洗溶剂中难以除去微小的垃圾等的问题，由于难以使溶剂的粒径变小，因此有时会损坏被清洁物。构成：使溶剂（CO2）的气体通过管线过滤器以除去垃圾颗粒等，然后通过从喷嘴喷射将其转化成固体颗粒或液滴。将获得的固体颗粒或液滴朝向要清洁的物体喷射，并且去除待清洁物体表面上的颗粒或有机物质。由于可以通过调整喷嘴和待清洁物体之间的间隙将溶剂转化成固体颗粒或液滴，所以可以根据待清洁物体的脏水平来选择溶剂的最佳状态。由于溶剂中的垃圾等的颗粒可以容易地通过线路过滤器去除，所以不需要使用昂贵的高纯度溶剂，并且可以降低运行成本。

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