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    • 4. 发明公开
    • 상변화 메모리 장치의 제조 방법
    • 制造相变RAM的方法
    • KR1020110086453A
    • 2011-07-28
    • KR1020100006195
    • 2010-01-22
    • 에스케이하이닉스 주식회사
    • 김명섭
    • H01L27/115H01L21/8247
    • H01L45/06G11C13/0004H01L45/1233H01L45/143H01L45/144H01L45/1683
    • PURPOSE: A method for manufacturing a phase change memory device is provided to reduce resistance distribution in the upper/lower areas of a lower electrode contact, thereby increasing the performance and integration rate of the phase change memory device. CONSTITUTION: A first conductive film(152) is deposited on an interlayer insulating film(140) and a lower electrode contact hole. A second conductive film is deposited on the first conductive film to fill the lower electrode contact hole. The first and second conductive films are anisotropically etched so that a first lower electrode contact is formed in the lower part of the lower electrode contact hole. A spacer(160) covers the first conductive film. A gap-fill insulating film(185) is formed on the spacer and the first lower electrode contact.
    • 目的:提供一种用于制造相变存储器件的方法,以减小下部电极接触件的上部/下部区域中的电阻分布,从而提高相变存储器件的性能和积分率。 构成:第一导电膜(152)沉积在层间绝缘膜(140)和下电极接触孔上。 第二导电膜沉积在第一导电膜上以填充下电极接触孔。 第一和第二导电膜被各向异性地蚀刻,使得第一下电极接触形成在下电极接触孔的下部。 间隔物(160)覆盖第一导电膜。 间隔填充绝缘膜(185)形成在间隔物和第一下电极接触件上。
    • 6. 发明公开
    • 상변화 메모리 소자 및 그 제조 방법
    • 相变随机访问存储器件及其制造方法
    • KR1020110044407A
    • 2011-04-29
    • KR1020090101052
    • 2009-10-23
    • 에스케이하이닉스 주식회사
    • 김명섭최강식
    • H01L27/115H01L21/8247
    • H01L45/06H01L45/1233H01L45/141H01L45/1683
    • PURPOSE: A phase-change memory device and manufacturing method thereof are provided to form a metal oxide film between a phase-change material layer and an interlayer insulating film, thereby preventing the interface of the phase-change material layer from being separated. CONSTITUTION: An interlayer insulating film(103) is formed on a semiconductor substrate(101). A thin adhesive film(105) is formed on the interlayer insulating film. A contact hole is formed by patterning the thin adhesive film and the interlayer insulating film wherein the contact hole exposes the semiconductor device. A lower electrode contact(109A) is formed in the contact hole. A phase-change material layer(111) contacts the lower electrode contact and the thin adhesive film.
    • 目的:提供相变存储器件及其制造方法以在相变材料层和层间绝缘膜之间形成金属氧化物膜,从而防止相变材料层的界面分离。 构成:在半导体衬底(101)上形成层间绝缘膜(103)。 在层间绝缘膜上形成薄的粘合膜(105)。 通过图案化薄的粘合剂膜和层间绝缘膜形成接触孔,其中接触孔暴露半导体器件。 在接触孔中形成下电极接触件(109A)。 相变材料层(111)与下电极接触部和薄粘接膜接触。
    • 7. 发明授权
    • 반도체메모리장치
    • 半导体存储器件
    • KR100275108B1
    • 2000-12-15
    • KR1019970030138
    • 1997-06-30
    • 에스케이하이닉스 주식회사
    • 이풍엽김명섭
    • G11C11/34
    • PURPOSE: A semiconductor memory device is provided to arbitrarily adjust the load ratio of a sense amplifier upon verification of memory devices without variations in the manufacture process. CONSTITUTION: A semiconductor memory device includes a load transistor(2) of a reference cell, a memory cell array unit(3), a reference cell array unit(4) and a load transistor unit(100) of a memory cell consisting of three blocks. A transistor block(101) has a gate fro receiving an input signal of ER via an inverter(I3) upon verification. A transistor block(102) has a gate for receiving an input signal of PGMb via an inverter(I4). A transistor block(103) receives an input signal of SARb from each of storage devices and changes the load ratio.
    • 目的:提供一种半导体存储器件,用于在验证存储器件时任意地调整读出放大器的负载比,而不会造成制造过程的变化。 构成:半导体存储器件包括参考单元的负载晶体管(2),存储单元阵列单元(3),参考单元阵列单元(4)和由三个组成的存储单元的负载晶体管单元(100) 块。 晶体管块(101)在验证时具有通过反相器(I3)接收ER的输入信号的门。 晶体管块(102)具有用于经由逆变器(I4)接收PGMb的输入信号的栅极。 晶体管块(103)从每个存储装置接收SARb的输入信号并改变负载比。
    • 8. 发明授权
    • 래치구조를 갖는 기억 회로
    • 具有锁定结构的记忆电路
    • KR100255146B1
    • 2000-05-01
    • KR1019970043835
    • 1997-08-30
    • 에스케이하이닉스 주식회사
    • 김명섭
    • G11C29/00
    • PURPOSE: A repair fuse control circuit is provided to prevent unstable data output generated in a repair fuse initialization process and to minimize a lay-out area, by retaining data to control a repair fuse by using a current of a flash cell and a logic threshold voltage of an inverter. CONSTITUTION: A power supply voltage(Vcc) is applied to a select gate(S13) of a flash cell(11), and a voltage of about 3.8V is applied to a program gate(S12) from a power supply voltage generator, and a high voltage in a high state is applied to a drain voltage input terminal(S11). Then, the flash cell is erased and turned on. And, the high voltage drop to a low voltage in a low state via the first inverter(12) and thus the voltage of the first node(K11) becomes a low state. A voltage of the second node(K12) becomes a low state by a current path to an NMOS transistor of the first inverter through the flash cell and the first node, and a current path of a current from a PMOS transistor of the second inverter(13) to the NMOS transistor of the first node is formed through the flash cell and the first node and thus the voltage of the second node becomes a low state by a threshold voltage of the second inverter. Therefore, a low state signal is output to an output terminal(Vout) via the third and the fourth inverter(14,15). If applying a low voltage(0V) to the drain voltage input terminal and a high voltage of about 13V to the program input terminal, the flash cell is programmed. In case of performing a read operation after the flash cell is programmed, the voltage of the first node via the first inverter becomes a low state. Then, the voltage of the second node via the second inverter becomes a high state. Therefore, an output signal of a high voltage(Vcc) state is output to the output terminal via the third and the fourth inverter. That is, a repair fuse is controlled by the high voltage signal from the output terminal.
    • 目的:提供维修保险丝控制电路,以防止维修保险丝初​​始化过程中产生的不稳定数据输出,并通过使用闪存单元的电流和逻辑阈值保留数据来控制修复保险丝,从而最小化布局区域 变频器的电压。 构成:将电源电压(Vcc)施加到闪存单元(11)的选择栅极(S13),并且从电源电压发生器向程序门(S12)施加约3.8V的电压,以及 向漏极电压输入端施加高电位的高电压(S11)。 然后,闪存单元被擦除并打开。 并且,经由第一逆变器(12)到低电平的低电压降低到第一节点(K11)的电压,并且因此变为低状态。 第二节点(K12)的电压通过通过闪存单元和第一节点的第一反相器的NMOS晶体管的电流通路和来自第二反相器的PMOS晶体管的电流的电流通路 13)到第一节点的NMOS晶体管通过闪存单元和第一节点形成,因此第二节点的电压通过第二反相器的阈值电压变为低状态。 因此,低状态信号经由第三和第四反相器(14,15)输出到输出端子(Vout)。 如果向漏极电压输入端子施加低电压(0V),并向编程输入端子施加约13V的高电压,则闪存单元被编程。 在闪存单元被编程之后执行读取操作的情况下,经由第一反相器的第一节点的电压变为低状态。 然后,经由第二逆变器的第二节点的电压变为高状态。 因此,高电压(Vcc)状态的输出信号经由第三和第四反相器输出到输出端子。 也就是说,修理保险丝由输出端子的高电压信号控制。