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1. 发明公开

KR1020070076208A 웨이퍼 수납용 캐리어. 无效
标题翻译：散热器
公开(公告)号：KR1020070076208A
公开(公告)日：2007-07-24
申请号：KR1020060005303
申请日：2006-01-18
申请人： 삼성전자주식회사
发明人： 이경순 , 정경호 , 이병암
IPC分类号： B65D85/48 , B65D85/42 , B65D85/38 , H01L21/68
摘要： A wafer carrier is provided to reduce breakage, scratches, and particles of a wafer by easily loading the wafer of 12 inches to the normal position and to improve the yield rate of semiconductor devices. The wafer carrier(100) is composed of a container(102) having an opened front side and an inner space for containing wafers; a cover(104) installed on an inner wall of the container and equipped with plural slot members(106) provided with round end portions and arranged on both sides in a line so as to form a space to which the wafers are fitted; and a door(108) for covering the front side of the container. A gap between the slot members is wider than the thickness of the wafer.
摘要翻译：提供晶片载体以通过容易地将12英寸的晶片加载到正常位置并提高半导体器件的屈服率来减少晶片的断裂，划痕和颗粒。晶片载体（100）由具有开口前侧的容器（102）和用于容纳晶片的内部空间构成; 安装在所述容器的内壁上并配备有多个槽构件（106）的盖（104），所述多个槽构件（106）设置有圆形端部并且布置在两侧的一条线上，以形成所述晶片安装的空间; 以及用于覆盖容器前侧的门（108）。狭缝构件之间的间隙比晶片的厚度宽。

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