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    • 2. 发明公开
    • 자동초점 조절장치
    • 控制自动对焦的装置
    • KR1020130096551A
    • 2013-08-30
    • KR1020120018092
    • 2012-02-22
    • 삼성전자주식회사
    • 이현재안명기김광수서인호최창훈
    • G02B7/28G03B13/36G02B7/09
    • G02B27/40G02B3/10G02B7/38
    • PURPOSE: An automatic focus control apparatus is provided to overlap light receiving planes of a focal line and an image sensor, thereby facilitating determining the deviation of a focal point. It easily determines to cross each other with focal point. CONSTITUTION: A beam splitter (12) splits the path of a beam of light. The path of the beam of light is classified into an incident path to a sample and a reflected path from the sample. An objective (13) concentrates the beam of light at the sample. A focal point deviation detection unit detects the deviation of a focal point of the sample. The detection is performed based on an optical spot image. [Reference numerals] (16) Control unit; (17) Stage moving unit; (18) Stage
    • 目的:提供一种自动聚焦控制装置,用于重叠焦线和图像传感器的光接收平面,从而有助于确定焦点的偏差。 它很容易确定用焦点交叉。 构成:分束器(12)分裂光束的路径。 光束的路径被分类为样品的入射路径和来自样品的反射路径。 物镜(13)将光束聚集在样品上。 焦点偏差检测单元检测样品焦点的偏差。 基于光点图像进行检测。 (附图标记)(16)控制单元; (17)舞台移动单元; (18)舞台
    • 4. 发明公开
    • 광학 현미경의 자동 초점 조절 장치
    • 自动聚焦装置用于光学显微镜
    • KR1020130030686A
    • 2013-03-27
    • KR1020110094318
    • 2011-09-19
    • 삼성전자주식회사
    • 김광수최창훈서인호이현재안명기전병환이성진
    • G02B7/28G01B9/04G01N21/956
    • G02B21/245G02B7/38G02B27/106G02B27/14
    • PURPOSE: An auto focusing apparatus for an optical microscope is provided to automatically adjust the focus of the optical microscope using a laser scanning mode. CONSTITUTION: An auto focusing apparatus for an optical microscope using a laser scanning mode includes a focus detection unit(210), a space filter unit and a control unit. The focus detection unit includes a light emitter(212), a wedge mirror(218), a first light receiver(226) and a second light receiver(228). The light emitter emits light having a specific wavelength. The wedge mirror capable of rotating projects the emitted light to multiple spots on the surface of a sample. The first receiver and the second receiver detect the light quantity of laser light reflected at the surface of the sample. In the light reflected at the surface of the sample, a space filter unit removes light which is out of focus and detects the light quantity of light which is in focus. The control unit generates a control signal for performing the focus adjustment of the optical microscope using light quantity information detected through the first receiver, the second receiver and the space filter unit. [Reference numerals] (130) Camera
    • 目的:提供一种用于光学显微镜的自动对焦装置,以使用激光扫描模式自动调节光学显微镜的焦点。 构成:使用激光扫描模式的光学显微镜的自动对焦装置包括焦点检测单元(210),空间滤波单元和控制单元。 焦点检测单元包括光发射器(212),楔形反射镜(218),第一光接收器(226)和第二光接收器(228)。 发光体发射具有特定波长的光。 能够将发射的光投射到样品表面上的多个点的楔形镜能够旋转。 第一接收器和第二接收器检测在样品表面反射的激光的光量。 在样品表面反射的光中,空间滤光器单元除去焦点不足的光并检测被聚焦的光的光量。 控制单元使用通过第一接收器,第二接收器和空间滤波器单元检测的光量信息产生用于执行光学显微镜的聚焦调整的控制信号。 (附图标记)(130)相机
    • 7. 发明公开
    • 프로파일 측정 시스템
    • 测量表面轮廓系统
    • KR1020140093818A
    • 2014-07-29
    • KR1020130005494
    • 2013-01-17
    • 삼성전자주식회사
    • 이현재김광수안명기전병환
    • G01B11/24
    • G01B11/24
    • A profile management system is provided. The profile measurement system comprises a light source; a beam shaper forming a light generated from the light source; a beam splitter transmitting a portion of the light formed by the beam shaper and reflecting the other portion of the light; an objective lens receiving the light from the beam splitter and emitting the light to a stage which mounts an object; and a profile estimation unit having a plurality of focuses which continuously changes. The profile estimation unit includes a focusing lens and a light receiving unit receiving the light passing through the focusing lens.
    • 提供配置文件管理系统。 轮廓测量系统包括光源; 光束整形器,形成从光源产生的光; 分束器,透射由光束整形器形成的光的一部分并反射光的另一部分; 接收来自分束器的光并将光发射到安装物体的台的物镜; 以及具有连续变化的多个焦点的轮廓估计单元。 轮廓估计单元包括聚焦透镜和接收穿过聚焦透镜的光的光接收单元。