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    • 3. 发明公开
    • 플라즈마 화학기상증착장치 및 이를 이용한나이트라이드막 형성방법
    • 等离子体增强化学蒸气沉积装置和使用其形成氮化物层的方法
    • KR1020030033914A
    • 2003-05-01
    • KR1020010066104
    • 2001-10-25
    • 삼성전자주식회사
    • 한재종김경석안병호신승목김화식박홍배
    • C23C16/513
    • C23C16/4558C23C16/345C23C16/4404C23C16/4405C23C16/505H01J37/3244H01J37/32623
    • PURPOSE: A plasma enhanced chemical vapor deposition (PECVD) apparatus capable of forming nitride layer of high quality used widely in semiconductor device manufacturing process, and a method for forming nitride layer using the apparatus are provided. CONSTITUTION: The plasma enhanced chemical vapor deposition apparatus comprises a process chamber comprising a dome shaped upper chamber(40), and a lower chamber(42) clamped to the upper chamber in such a manner that an insulator is installed between the upper and lower chambers; a reaction gas emission ring(44) installed inside the process chamber to emit reaction gas to the upper direction inside the process chamber; a susceptor(52) which is installed inside the process chamber of the lower part of the reaction gas emission ring, in which a heater for controlling internal temperature of the process chamber and temperature of a wafer(56) is installed, and which is capable of rotating the wafer with the wafer being fixed; a plasma correcting ring(54) installed on the outer side of the upper part of the susceptor; a vacuum pump connected to the process chamber; and a power supply connected to the upper and lower chambers.
    • 目的:提供能够形成半导体器件制造工艺中广泛使用的高质量氮化物层的等离子体增强化学气相沉积(PECVD)装置,以及使用该装置形成氮化物层的方法。 构成:等离子体增强化学气相沉积装置包括一个处理室,该处理室包括一个圆顶形的上部腔室(40)和一个下部腔室(42),该下部腔室(42)以这样一种方式夹紧,该绝缘体安装在上部和下部腔室 ; 反应气体排放环(44),其安装在所述处理室内部以在所述处理室内向上方输出反应气体; 安装在反应气体排放环的下部的处理室内的基座(52),其中安装有用于控制处理室的内部温度的加热器和晶片(56)的温度,并且其能够 在晶片固定的状态下旋转晶片; 安装在所述基座的上部的外侧的等离子体校正环(54) 连接到处理室的真空泵; 以及连接到上部和下部腔室的电源。
    • 4. 发明公开
    • 반도체 제조공정 설비의 가스공급 제어장치
    • 用于控制半导体制造进度设备中的气体供应的装置
    • KR1020000007652A
    • 2000-02-07
    • KR1019980027100
    • 1998-07-06
    • 삼성전자주식회사
    • 김화식
    • G05D16/00
    • PURPOSE: An apparatus for controlling a gas supply in a semiconductor manufacturing progress equipment is provided, which uses an electromagnetic valve for controlling a pneumatic valve to be switched for adjusting a flow of a gas supplied to the reaction road. CONSTITUTION: An apparatus for controlling a gas supply comprises: a single electromagnetic valve (30) for performing a center exhaust operation to control a switching of pneumatic valves (10, 15), wherein the single electromagnetic valve (30) controls the pneumatic valves (10, 15) so that other gas is not supplied to the pneumatic valve (10) while one gas is supplied to the pneumatic valve (15), and wherein the entire pneumatic valves (10, 15) are turned off in case that a voltage is simultaneously supplied to the both terminals of the electromagnetic valve (30). Therefore, the mixing of a gas occurred by an inverse current and the pollution is prevented.
    • 目的:提供一种用于控制半导体制造进度设备中的气体供应的装置,其使用电磁阀来控制要切换的气动阀,以调节供应到反作用道路的气体的流量。 构成:用于控制气体供应的装置包括:单个电磁阀(30),用于执行中心排气操作以控制气动阀(10,15)的切换,其中单个电磁阀(30)控制气动阀( 10,15),从而当向气动阀(15)供给一种气体时,不向气动阀(10)供给其它气体,在气压阀(10,15)的电压 同时供给电磁阀(30)的两端。 因此,通过反向电流发生气体的混合,防止了污染。
    • 7. 实用新型
    • 세탁기의 파워코드 연결구조
    • 连接到洗衣机的结构的电源线
    • KR2019980025701U
    • 1998-08-05
    • KR2019960038527
    • 1996-11-05
    • 삼성전자주식회사
    • 황정재김화식
    • D06F39/00
    • 본고안은, 세탁기의파워코드연결구조에관한것으로서, 본고안의목적은품질검사에사용되는장비의종류를단순화하고, 또한조립중인세탁기가콘베이어에의하여이송되는과정에서발생되는파워코드의손상을방지할수 있는세탁기의파워코드연결구조를제공하는것이다. 이와같은본 고안의목적은세탁기의파워코드연결구조에있어서, 상기파워코드는세탁기의전원공급부와세탁기의외벽과의사이에서연장되는제 1 코드부재및 상기제 1 코드부재에대하여착탈가능하게연결되며또한메인전원공급플러그를구비하는제 2 코드부재로구성되며, 상기제 1 코드부재와상기제 2 코드부재는, 상기제 1 코드부재의일단에마련되고또한세탁기의외벽에고정결합되어있는콘센트와상기제 2 코드부재의일단에마련된제 1 플러그가삽탈됨에의하여, 서로착탈되는것을특징으로하는세탁기의파워코드연결구조를제공함으로써달성된다.
    • 本主题创新涉及连接到洗衣机的结构的电源线,它是在本文中一个目的是简化在质量检查中使用的设备的类型,并且还防止由洗衣机被组装的过程中产生的损坏电源线是由输送机输送 能够提供连接到所述洗衣机的结构的电源线。 本发明的这个目的是在洗衣机的电源线连接结构中,电源线可拆卸地连接到所述第一码元和其自身与洗衣机电源单元和所述洗衣机外壁之间延伸的第一线构件 并且还由具有主电源插头的第二码元,并且所述第一码元和所述第二线构件在第一代码bujaeui端也出口,其被固定地联接到所述洗衣机的外壁上设置 如由所述第二绳索端部设置在第一插头是bujaeui saptal,通过提供连接到洗衣机的结构的电源线,其特征在于彼此该可拆卸的实现。
    • 10. 发明公开
    • 세탁기 및 그 탈수제어방법
    • 洗衣机和控制旋转干燥的方法
    • KR1020090030615A
    • 2009-03-25
    • KR1020070096023
    • 2007-09-20
    • 삼성전자주식회사
    • 김도원김화식
    • D06F33/02D06F33/00D06F37/36
    • D06F33/02D06F58/28D06F2058/2877D06F2204/065D06F2232/08
    • A washing machine and a dehydration control method thereof are provided to improve dehydration performance by supplying a hot wind in a section between primary dehydration and secondary dehydration. The washing machine includes a drum(12), a motor(13), a hot wind supply device(40), and a control part. The drum loads laundry. The motor rotates the drum. The hot wind supply device supplies a hot wind to an inner part of the drum. The control part decreases the number of rotations of the motor after primary dehydration at the number of set rotations, and progresses a secondary dehydration which increases the number of set rotations again. The control part supplies the hot wind in the inner part of the drum by controlling the hot wind supply device between the primary dehydration and the secondary dehydration.
    • 提供一种洗衣机及其脱水控制方法,以通过在初级脱水和二次脱水之间的区段中供应热风来改善脱水性能。 洗衣机包括鼓(12),马达(13),热风供应装置(40)和控制部分。 滚筒装载洗衣。 电机旋转鼓。 热风供应装置向鼓的内部供应热风。 控制部在初次脱水后以设定转数减少马达的转数,并且进行二次脱水,再次增加设定转数。 控制部分通过控制主要脱水和次级脱水之间的热风供应装置来供应热鼓的内部的热风。