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    • 10. 发明公开
    • 엔드이펙터 유닛 및 이를 구비한 멀티소터의 위치제어장치
    • 最终效应器和位置控制装置
    • KR1020090061837A
    • 2009-06-17
    • KR1020070128806
    • 2007-12-12
    • 코리아테크노(주)삼성전자주식회사
    • 김환석박성수박세호이재훈김호진
    • H01L21/68
    • H01L21/67271H01L21/67259H01L21/6838H01L21/68707
    • An end effector unit and position controlling apparatus for having the same are provided to enhance the transfer efficiency of the wafers and to transfer wafers at the same time. The end effector unit comprises an end effector(110), a LM guide(120), and a screw bar(130) and a step motor(140). The end effector has a substrate member(111) and a movement bracket(112). The substrate member supports a wafer. The substrate member has the suction hole for absorbing the wafer. The movement bracket moves up and down. The LM guide is combined with the movement bracket and guides the end effector. The screw bar is screwed with the movement bracket. The step motor is positioned in the upper side of the screw bar and unites with the screw bar through the connection shaft. A position control device of the multi sorter equipped with the end effector unit comprises the end effector unit and a linear robot.
    • 提供了一种端部执行器单元和具有该端部执行器单元的位置控制装置,以增强晶片的传送效率并同时转移晶片。 末端执行器单元包括端部执行器(110),LM导轨(120)和螺杆(130)和步进马达(140)。 端部执行器具有衬底构件(111)和运动支架(112)。 衬底构件支撑晶片。 基板部件具有用于吸收晶片的吸入孔。 运动支架上下移动。 LM导轨与运动支架组合并引导末端执行器。 螺丝杆与运动支架拧紧。 步进电机定位在螺杆的上侧,并通过连接轴与螺杆连接。 配备有末端执行器单元的多分类器的位置控制装置包括端部执行器单元和线性机器人。