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2. 发明公开

KR1020130087459A 모노클로로실란용 실린더 표면 처리 有权
标题翻译：用于单氯化硅的气缸表面处理
公开(公告)号：KR1020130087459A
公开(公告)日：2013-08-06
申请号：KR1020130080234
申请日：2013-07-09
申请人： 버슘머트리얼즈 유에스, 엘엘씨
发明人： 뵘,필립이. , 맥더모트,웨인토마스 , 시아오,만차오 , 펄스테인,로날드마틴 , 로,사이-홍에이. , 데렉스케이-코박스,아그네스
IPC分类号： B65D85/84 , C23C16/448 , B65D25/14 , B65D81/24
CPC分类号： C23C16/448 , B05D7/22 , B65D25/14 , B65D81/24 , B65D85/84 , C01B33/04 , C25F3/16
摘要： PURPOSE: A method of passivating is provided to passivate a container and the inner surface of the container for stably storing mono chlorosilane without the decomposition of the mono chlorosilane. CONSTITUTION: A container has an inner surface, and contains large amount of mono chlorosilane. The inner surface contains carbon steel or stainless steel, and is reformed by the mechanical abrasion before storing the mono chlorosilane and the exposure to silicon hydride or chlorosilane. The container is capable of storing the mono chlorosilane by maintaining the degradability of the mono chlorosilane less than 0.1% per month at the ambient temperature. The mechanical abrasion is conducted by a process selected from shot blasting, glass bead blasting, or abrasive slurry polishing. The mechanical abrasion is conducted using abrasive slurry. [Reference numerals] (1) Container; (2) Container reforming, surface reforming, producing surface; (3) Charging the container; (4) Controlling the temperature of the container; (5) Storing and transferring MCS to the container; (6) Removing the MCS from the container
摘要翻译：目的：提供一种钝化方法，用于钝化容器和容器的内表面，用于稳定地储存单氯硅烷而不会分解一氯硅烷。构成：容器内表面含有大量单氯硅烷。内表面含有碳钢或不锈钢，并在储存单氯硅烷和暴露于氢化硅或氯硅烷之前通过机械磨损进行重整。该容器能够通过保持单氯硅烷在环境温度下每月低于0.1％的降解性来储存单氯硅烷。通过选自喷丸，玻璃珠喷砂或研磨浆料抛光的方法进行机械磨损。使用研磨浆进行机械磨损。（附图标记）（1）容器; （2）容器重整，表面改性，生产面; （3）充电容器; （4）控制容器的温度; （5）将MCS存放到容器中; （6）从容器中取出MCS

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