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    • 2. 发明公开
    • 반도체 장치
    • 半导体器件
    • KR1020090058470A
    • 2009-06-09
    • KR1020080122347
    • 2008-12-04
    • 닛산 지도우샤 가부시키가이샤
    • 하야시데쯔야호시마사까쯔다나까히데아끼야마가미시게하루
    • H01L29/737
    • H01L29/778H01L29/66068H01L29/66431
    • A semiconductor device is provided to suppress the concentration of leakage current in a corner part of the hetero bonding interface by supplying current to the end part of the hetero junction interface contacting with the gate insulating layer. A drift layer(2) is formed on the substrate region(1). In order to contact to the main surface facing the junction of the substrate region of the drift layer the hetero semiconductor region(3) is formed. The gate insulating layer(4) is formed in order to contact to the hetero bonding interface of the drift layer and hetero semiconductor region. The gate electrode(5) is formed on the gate insulating layer. The face to face facing the hetero bonding interface of the drift layer of the hetero semiconductor region, it is formed so that the source electrode(6) be connected ohmically through the contact hole (b). In the substrate region the drain electrode(7) is formed to be connected ohmically. An inter-layer insulating film(8) is formed in order to insulate the gate electrode and source electrode.
    • 提供一种半导体器件,通过向与栅极绝缘层接触的异质结界面的端部提供电流来抑制异质结界面的拐角部分中的漏电流的浓度。 在衬底区域(1)上形成漂移层(2)。 为了接触面向漂移层的衬底区域的接合处的主表面,形成异质半导体区域(3)。 形成栅极绝缘层(4),以便与漂移层和异质半导体区域的异质结合界面接触。 栅电极(5)形成在栅极绝缘层上。 与异质半导体区域的漂移层的异质结合界面面对面地形成为使得源电极(6)通过接触孔(b)欧姆连接。 在衬底区域中,漏电极(7)形成为欧姆连接。 形成层间绝缘膜(8),以使栅电极和源电极绝缘。
    • 4. 发明公开
    • 반도체 장치
    • 半导体器件
    • KR1020070025952A
    • 2007-03-08
    • KR1020060046823
    • 2006-05-25
    • 닛산 지도우샤 가부시키가이샤
    • 시모이다요시오호시마사까쯔다나까히데아끼하야시데쯔야시노하라도시로야마가미시게하루
    • H01L29/861
    • H01L29/7804H01L29/7818
    • A semiconductor device is provided to simplify the fabricating process of a peripheral structure by using an enhanced hetero junction diode structure. A semiconductor device comprises a switch part and a hetero junction diode. The switch part is used for controlling on/off states of current supplied to a first conductive type semiconductor base body. The hetero junction diode is used for preventing a reverse flow of the on/off currents. The switch part is formed at a first main surface of the semiconductor base body. The hetero junction diode is formed at a second main surface of the semiconductor base body. The first main surface of the semiconductor base body is opposite to the second main surface. A hetero semiconductor region(2) of the hetero junction diode is heavily doped with second conductive type ions.
    • 提供半导体器件以通过使用增强的异质结二极管结构简化外围结构的制造工艺。 半导体器件包括开关部分和异质结二极管。 开关部分用于控制提供给第一导电类型半导体基体的电流的开/关状态。 异质结二极管用于防止导通/截止电流的反向流动。 开关部形成在半导体基体的第一主面上。 异质结二极管形成在半导体基体的第二主表面。 半导体基体的第一主表面与第二主表面相对。 异质结二极管的异质半导体区域(2)被第二导电型离子重掺杂。
    • 8. 发明公开
    • 반도체 소자
    • 半导体器件
    • KR1020080059069A
    • 2008-06-26
    • KR1020070134856
    • 2007-12-21
    • 닛산 지도우샤 가부시키가이샤
    • 하야시데쯔야호시마사까쯔다나까히데아끼야마가미시게하루
    • H01L29/737
    • H01L27/088H01L21/32139H01L27/0605H01L29/0619H01L29/0623H01L29/1608H01L29/267H01L29/4236H01L29/66068H01L29/7828
    • A semiconductor device is provided to enhance reliability by reducing concentration of current to a switch structure positioned at an outermost part. A plurality of switch elements are integrated on a semiconductor chip. Each of the switch elements includes a semiconductor substrate made of a first semiconductor material, a hetero-semiconductor region(3) made of a second semiconductor material having a band gap width different from the band gap of the first semiconductor material to be hetero-adjoined with the semiconductor substrate, a gate insulation layer(4) adjoined to a heterojunction of the semiconductor substrate and the hetero semiconductor region, a gate electrode(5) adjoined to the gate insulation layer, a source electrode(6) connected to a source contact part of the hetero-semiconductor region, and a drain electrode connected to the semiconductor substrate. The switch elements include a first switch element arranged at an outermost part of the semiconductor chip and a second switch element arranged at an inner part of the semiconductor chip. The first switch element includes a mechanism in which the amount of current applied to the first switch element is smaller than the amount of current applied to the second switch element when the switch elements are in a conducting state of the current.
    • 提供半导体器件以通过减少对位于最外部的开关结构的电流的集中来提高可靠性。 多个开关元件集成在半导体芯片上。 每个开关元件包括由第一半导体材料制成的半导体衬底,由第二半导体材料制成的异质半导体区域(3),所述异质半导体区域(3)的带隙宽度不同于将被异质连接的第一半导体材料的带隙 与所述半导体衬底相邻的栅极绝缘层(4)与所述半导体衬底和所述异质半导体区域的异质结邻接,与所述栅极绝缘层邻接的栅电极(5),连接到源极触点 异源半导体区域的一部分和与半导体衬底连接的漏电极。 开关元件包括布置在半导体芯片的最外部的第一开关元件和布置在半导体芯片的内部的第二开关元件。 第一开关元件包括其中施加到第一开关元件的电流量小于当开关元件处于导通状态时施加到第二开关元件的电流量的机构。