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    • 3. 发明公开
    • 프로브 카드
    • 探针卡
    • KR1020090057902A
    • 2009-06-08
    • KR1020080118297
    • 2008-11-26
    • 가부시키가이샤 니혼 마이크로닉스
    • 나리타,사토시나리타,히사오야마구치,노부유키
    • H01L21/66
    • G01R1/07364G01R1/07342
    • A probe card is provided to prevent a contact between probes by alternately positioning probe tips of a third probe group and a fourth probe group. A plurality of connection parts is arranged on a bottom surface of a substrate. A first probe group, a second probe group, a third probe group, and a fourth probe group(46a-46d) include base parts connected to the connection parts and main body parts extended from a bottom end of the base parts to a right and left direction. A probe tip part is extended from a front end of the main body part to a bottom side. The main body part of the probe of the first probe group and the third probe group is extended from a bottom end of the base part to a probe side of the second probe group and the fourth probe group. The main body part of the probe of the second probe group and the fourth probe group is extended from a bottom end of the base part to a probe side of the first probe group and the third probe group.
    • 提供探针卡以通过交替地定位第三探针组和第四探针组的探针尖来防止探针之间的接触。 多个连接部件布置在基板的底表面上。 第一探针组,第二探针组,第三探针组和第四探针组(46a-46d)包括连接到连接部的基部和从基部的底端向右延伸的主体部,以及 左方向 探针尖端部分从主体部分的前端延伸到底侧。 第一探针组和第三探针组的探针的主体部分从基部的底端延伸到第二探针组和第四探针组的探针侧。 第二探针组和第四探针组的探针的主体部分从基部的底端延伸到第一探针组和第三探针组的探针侧。