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1. 发明公开

KR1020140012340A 기판 검사 및 리페어 방법 无效
标题翻译：液晶面板检查与维修方法
公开(公告)号：KR1020140012340A
公开(公告)日：2014-02-03
申请号：KR1020120078931
申请日：2012-07-19
申请人： (주) 인텍플러스
发明人： 임쌍근 , 강민구 , 송준호 , 이현민 , 한철희
IPC分类号： G01N21/88 , G02F1/13
CPC分类号： G01N21/95684 , G01N2021/95638 , G01N2021/95661 , G02F2001/136254
摘要： The present invention relates to a method for inspecting and repairing a substrate, wherein the method is for inspecting a defective position through a pattern inspection on the substrate, determining whether or not a short circuit or disconnection is in the defective position through image comparison, and then outputting a signal for restoration corresponding to the short circuit or the disconnection in order to automatically restore a defective area. The method for inspecting and repairing the substrate comprises: an inspecting step of optically inspecting a pattern defect on the substrate, and then transmitting information in which the pattern defect is recorded; a deciphering step of determining whether or not the short circuit or the disconnection is in the pattern defect based on the transmitted information for the pattern defect; and a restoring step of recognizing the short circuit or the disconnection in the pattern defect, and then repairing the pattern defect. [Reference numerals] (S100) Inspecting step; (S200) Deciphering step; (S300) Restoring step; (S400) Re-inspecting step
摘要翻译：本发明涉及一种用于检查和修复基板的方法，其中该方法用于通过基板上的图案检查来检查缺陷位置，通过图像比较确定短路或断开是否处于缺陷位置，以及然后输出与短路或断开相对应的恢复信号，以便自动恢复缺陷区域。用于检查和修复基板的方法包括：光学检查基板上的图案缺陷，然后发送记录有图案缺陷的信息的检查步骤; 根据所发送的图案缺陷信息，确定短路或断线是否处于图案缺陷的解密步骤; 以及识别图案缺陷中的短路或断开的恢复步骤，然后修复图案缺陷。（附图标记）（S100）检查步骤; （S200）解密步骤; （S300）恢复步骤; （S400）重新检查步骤

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