会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明公开
    • 기판 검사 및 리페어 방법
    • 液晶面板检查与维修方法
    • KR1020140012340A
    • 2014-02-03
    • KR1020120078931
    • 2012-07-19
    • (주) 인텍플러스
    • 임쌍근강민구송준호이현민한철희
    • G01N21/88G02F1/13
    • G01N21/95684G01N2021/95638G01N2021/95661G02F2001/136254
    • The present invention relates to a method for inspecting and repairing a substrate, wherein the method is for inspecting a defective position through a pattern inspection on the substrate, determining whether or not a short circuit or disconnection is in the defective position through image comparison, and then outputting a signal for restoration corresponding to the short circuit or the disconnection in order to automatically restore a defective area. The method for inspecting and repairing the substrate comprises: an inspecting step of optically inspecting a pattern defect on the substrate, and then transmitting information in which the pattern defect is recorded; a deciphering step of determining whether or not the short circuit or the disconnection is in the pattern defect based on the transmitted information for the pattern defect; and a restoring step of recognizing the short circuit or the disconnection in the pattern defect, and then repairing the pattern defect. [Reference numerals] (S100) Inspecting step; (S200) Deciphering step; (S300) Restoring step; (S400) Re-inspecting step
    • 本发明涉及一种用于检查和修复基板的方法,其中该方法用于通过基板上的图案检查来检查缺陷位置,通过图像比较确定短路或断开是否处于缺陷位置,以及 然后输出与短路或断开相对应的恢复信号,以便自动恢复缺陷区域。 用于检查和修复基板的方法包括:光学检查基板上的图案缺陷,然后发送记录有图案缺陷的信息的检查步骤; 根据所发送的图案缺陷信息,确定短路或断线是否处于图案缺陷的解密步骤; 以及识别图案缺陷中的短路或断开的恢复步骤,然后修复图案缺陷。 (附图标记)(S100)检查步骤; (S200)解密步骤; (S300)恢复步骤; (S400)重新检查步骤