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    • 10. 发明公开
    • 반도체 리소그래피를 위한 공중합체, 조성물 및 티올화합물
    • 用于SEMICONDUCTOR LITHOGRAPHY,COMPOSITION AND THIOL COMPOUND的共聚物
    • KR1020060126385A
    • 2006-12-07
    • KR1020060049737
    • 2006-06-02
    • 마루젠 세끼유가가꾸 가부시키가이샤
    • 이이지마미노루야마기시다카노리
    • G03F7/004
    • C07C323/17C07C2602/42C08F220/18C08F220/28G03F7/0397
    • Provided are a copolymer for semiconductor lithography preferably used in accurate processing using UV, X-ray, or electron beam, a composition comprising the copolymer, and a thiol compound forming the copolymer. The copolymer comprises at least (A) a repeating unit having a structure comprising alkali-soluble group protected with acid-dissociable, solution inhibitive group, and (B) a terminal structure represented by formula(F). In the formula(F), each X1 and X2 is independently hydrogen atom, halogen atom, or C1-C4 hydrocarbon group which may be substituted with halogen atom, each Y11 to Y14 is independently hydrogen atom, or ether bond formed between Y11 and Y12, or Y 13 and Y14 respectively, or C1-C2 hydrocarbon group, each Y21 to Y25 is independently hydrogen atom, or C1-C4 hydrocarbon group, and n is an integer of 0 or 1. The composition for semiconductor lithography comprises the copolymer and a radiation-sensitive acid generator. The thiol compound is represented by the formula F.
    • 提供一种用于半导体光刻的共聚物,优选用于使用UV,X射线或电子束的精确加工,包含该共聚物的组合物和形成该共聚物的硫醇化合物。 共聚物至少包含(A)具有由酸解离的溶液抑制基团保护的碱溶性基团的结构的重复单元和(B)由式(F)表示的末端结构。 式(F)中,X 1和X 2各自独立地为氢原子,卤素原子或可被卤原子取代的C 1〜C 4烃基,Y 11〜Y 14各自独立地为氢原子,Y 11和Y 12之间形成的醚键 或Y 13和Y 14或C 1 -C 2烃基,每个Y 21至Y 25独立地为氢原子或C 1 -C 4烃基,n为0或1的整数。半导体光刻用组合物包含共聚物和 辐射敏感的酸发生器。 硫醇化合物由式F表示。