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    • 83. 发明公开
    • 질량 유량계 모니터링
    • 质量流量控制器监控
    • KR1020120132358A
    • 2012-12-05
    • KR1020120053141
    • 2012-05-18
    • 에스피티에스 테크놀러지스 리미티드
    • 존스,시몬송,이핑
    • G01F25/00G05D7/00G01F1/76
    • PURPOSE: A mass flow controller monitoring method is provided to prevent leakage failure in the inside of a working chamber contributing to a test result. CONSTITUTION: A mass flow controller monitoring method comprises next steps. A MFC(Mass Flow Controller) is periodically switched for generating a continuous charging cycle for a test period. The pressure of a chamber is periodically measured for the test period. The entire switch time of the MFC is at least 10% of the charging cycle. An average of pressure measurement values is obtained and compared with historical data in order to determine whether the MFC is properly operated or not. [Reference numerals] (AA) MFC(Mass Flow Controller) looping charging speed; (BB) Reference; (CC) Delay 0.01s; (DD) Delay 0.05s; (EE) Delay 0.1s; (FF) Delay 0.2s; (GG, HH) Chamber pressure; (II,NN) Pressurizing 1; (JJ,OO) Pressurizing & Delay 0.2s; (KK,PP) Pressurizing & Delay 0.1s; (MM,QQ) Pressurizing & Delay 0.05s; (MM,RR) Pressurizing & Delay 0.01s; (SS) Time; (TT) 500SCCM looping charging speed
    • 目的:提供质量流量控制器监控方法,以防止在工作室内部产生泄漏故障,从而有助于测试结果。 构成:质量流量控制器监控方法包括以下步骤。 周期性地切换MFC(质量流量控制器),以便在测试期间产生连续的充电循环。 在测试期间定期测量腔室的压力。 MFC的整个开关时间至少为充电周期的10%。 获得压力测量值的平均值并与历史数据进行比较,以确定MFC是否正确操作。 (参考号)(AA)MFC(质量流量控制器)循环充电速度; (BB)参考; (CC)延迟0.01s; (DD)延迟0.05s; (EE)延迟0.1s; (FF)延迟0.2s; (GG,HH)室压力; (II,NN)加压1; (JJ,OO)加压和延迟0.2s; (KK,PP)加压和延迟0.1s; (MM,QQ)加压和延迟0.05s; (MM,RR)加压和延迟0.01s; (SS)时间; (TT)500SCCM循环充电速度
    • 85. 发明公开
    • 투수계가 설치된 수두구배 측정장치
    • 被遗漏
    • KR1020120108406A
    • 2012-10-05
    • KR1020110026221
    • 2011-03-24
    • 한국지질자원연구원
    • 김용철김용제
    • E02D1/02E02D33/00G01N15/08G01F1/76
    • E02D1/027E02D33/00E02D2200/1685E02D2300/0001G01F1/76G01N15/0826
    • PURPOSE: A gradient measurement system with a permeameter is provided to measure a gradient using a permeameter, a pump, and a flowmeter without altitude measurement equipment. CONSTITUTION: A gradient measurement system with a permeameter comprises a water tank(30), a pump(40), a permeameter(10), a flowmeter(50), and an insertion tube(60). The water tank is installed on the ground. The pump moves water stored in the water tank. The water flowing from the pump flows into the permeameter. The permeameter is composed of a column and a case. The column is inserted into the case. The flowmeter is connected to the permeameter and measures the flow rate of water discharged from the permeameter. A connection hose connected to the flowmeter is inserted into the insertion tube, and the insertion tube is inserted into a hole formed on the ground.
    • 目的:提供具有渗透仪的梯度测量系统,以使用透度计,泵和不带高度测量设备的流量计来测量梯度。 构成:具有渗透仪的梯度测量系统包括水箱(30),泵(40),渗透仪(10),流量计(50)和插入管(60)。 水箱安装在地面上。 泵移动储存在水箱中的水。 从泵流出的水流入渗透液。 渗透仪由柱和壳组成。 将列插入到外壳中。 流量计连接到渗透仪,并测量从渗透仪排出的水的流量。 连接到流量计的连接软管插入到插入管中,插入管插入形成在地面上的孔中。
    • 90. 发明公开
    • 코리올리 유량계
    • CORIOLIS流量计
    • KR1020060124737A
    • 2006-12-05
    • KR1020067017783
    • 2004-09-24
    • 가부시키가이샤 오바루
    • 기타미히로카즈나카오유이치스케무라노리오
    • G01F1/84G01F1/76
    • G01F1/8409G01F1/8413G01F1/8477G01F1/8486G01N2009/006
    • A first bent tube section (2) and a second bent tube section (3) are set such that the distance between them becomes greater as they are away from a stationary member (8) and they are in a non-parallel state. Further, first bent sections (15, 15) of the first bent tube section (2) are connected to a first driven section (10) and second bent sections (15, 15) of the second bent tube section (3) are connected to a second driven section (10). Then, tube axes of a first inflow opening section (4), a second inflow opening section (6), a first outflow opening section (5), and a second outflow opening section (7) are positioned so as to be on the same plane. A position where the first inflow opening section (4) and the second inflow opening section (6) are fixed and a position where the first outflow opening section (5) and the second outflow opening section (7) are fixed are arranged so as to have a positionally symmetrical relationship. The first driven section (10) and the second driven section (10) are arranged so that the distance between them is less than the distance between a first connection section (16a) and a second connection section (16a).
    • 第一弯管部(2)和第二弯管部(3)被设定为使得它们之间的距离随着离开固定部件(8)而变大,并且它们处于非平行状态。 此外,第一弯管部(2)的第一弯曲部(15,15)与第一被驱动部(10)连接,第二弯曲管部(3)的第二弯曲部(15,15) 第二驱动部分(10)。 然后,将第一流入开口部(4),第二流入开口部(6),第一流出开口部(5)和第二流出开口部(7)的管轴定位成相同 平面。 第一流入开口部(4)和第二流入开口部(6)固定的位置以及第一流出开口部(5)和第二流出开口部(7)的固定位置, 具有位置对称关系。 第一从动部分(10)和第二从动部分(10)被布置成使得它们之间的距离小于第一连接部分(16a)和第二连接部分(16a)之间的距离。