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    • 73. 发明公开
    • 포지티브형 감광성 폴리이미드 전구체 조성물
    • 正性光敏聚酰亚胺前体组合物
    • KR1020030085166A
    • 2003-11-05
    • KR1020020023327
    • 2002-04-29
    • 삼성전자주식회사
    • 정명섭박용영양상윤정성경
    • G03F7/039
    • PURPOSE: A positive photosensitive polyimide precursor composition, a photosensitive insulation or protection coating using the composition and a semiconductor device using the composition are provided, to improve the residue ratio, the physical properties, the color and the film shrinkage. CONSTITUTION: The positive photosensitive polyimide precursor composition comprises a soluble polyimide represented by the formula 1 which contains at least one repeating unit and whose at least one end is terminated by a reactive end-capping monomer; a polyamide acid represented by the formula 5 which contains at least one repeating unit and whose at least one end is terminated by a reactive end-capping monomer; a dissolution inhibitor substituted with a group capable of dissociated by an acid; a photoacid generator; and a polar solvent, wherein X is a tetravalent aromatic or aliphatic organic group; Y is a divalent aromatic or aliphatic organic group; and m is an integer of 1 or more.
    • 目的:提供使用该组合物的正性感光性聚酰亚胺前体组合物,感光性绝缘体或保护涂层以及使用该组合物的半导体装置,以提高残留率,物理性质,颜色和膜收缩率。 构成:正光敏聚酰亚胺前体组合物包含由式1表示的可溶性聚酰亚胺,其包含至少一个重复单元,并且其至少一个末端被反应性封端单体封端; 由式5表示的聚酰胺酸,其含有至少一个重复单元,并且其至少一个末端被反应性封端单体封端; 被能够被酸解离的基团取代的溶解抑制剂; 光致酸发生器; 和极性溶剂,其中X是四价芳族或脂族有机基团; Y是二价芳族或脂族有机基团; m为1以上的整数。
    • 74. 发明公开
    • 포지티브형 감광성 폴리이미드 전구체 및 이를 포함하는조성물
    • 正型型光敏聚酰亚胺前体及其组合物
    • KR1020020056818A
    • 2002-07-10
    • KR1020010069936
    • 2001-11-10
    • 삼성전자주식회사
    • 정명섭정성경박용영문봉석김봉규
    • G03F7/039
    • H01L2924/01019H01L2924/01039
    • PURPOSE: Provided are a polyamic acid ester having novel structure capable of showing excellent elongation when forming a film, and a mixture of the polyamic acid ester and polyamic acid having reactive end-capping group at its ends, and a photosensitive polyimide precursor composition containing the mixture which can show excellent patterning property. CONSTITUTION: The polyamic acid ester is one that a part of hydrogen in carboxyl group of polyamic acid is substituted with a functional group which is dissociated by acid. Also, the polyamic acid ester comprises at least one repeating units represented by formula 1(wherein each of R1 and R2 is hydrogen, or functional group which is dissociated by acid, X is a quaternary aromatic or aliphatic organic group, Y is divalent aromatic or aliphatic organic group, and m is an integer of 1 or more), and at least one end of the polyamic acid ester has an end-capping monomer.
    • 目的:提供具有新颖结构的聚酰胺酸酯,其在形成膜时具有优异的伸长率,并且其末端具有反应性封端基团的聚酰胺酸酯和聚酰胺酸的混合物和含有 可以显示优异的图案化特性的混合物。 构成:聚酰胺酸酯是聚酰胺酸羧基的一部分氢被被酸解离的官能团取代的聚酰胺酸酯。 此外,聚酰胺酸酯包含至少一个由式1表示的重复单元(其中R 1和R 2各自为氢或被酸解离的官能团,X为季芳族或脂族有机基团,Y为二价芳族或 脂肪族有机基团,m为1以上的整数),所述聚酰胺酸酯的至少一端具有封端单体。