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    • 29. 发明公开
    • 초전도체 코팅된 테이프들용 2축-텍스처링된 막 증착
    • 用于超导体涂层的双色纹膜沉积
    • KR1020070026446A
    • 2007-03-08
    • KR1020067020957
    • 2005-04-08
    • 수퍼파워, 인크.
    • 지옹,슈밍셀바매니켐,벤카트
    • H01L39/00C23C14/46
    • C23C14/30C23C14/08C23C14/225C23C14/48H01L39/2461Y10S428/93Y10S505/73
    • Methods for depositing, at a very high deposition rate, a biaxially-textured film on a continuously moving metal tape substrate are disclosed. These methods comprise: depositing a film on the substrate with a deposition flux having an oblique incident angle of about 5‹ to about 80‹ from the substrate normal, while simultaneously bombarding the deposited film using an ion beam at an ion beam incident angle arranged along either a best ion texture direction of the film or along a second best ion texture direction of the film, thereby forming the biaxially-textured film wherein a deposition flux incident plane is arranged parallel to a direction along which the biaxially-textured film has a fast in-plane growth rate. Superconducting articles comprising a substrate, a biaxially-textured film deposited on said substrate by said methods above; and superconducting layer disposed on the biaxially-textured film are also disclosed. ® KIPO & WIPO 2007
    • 公开了以非常高的沉积速率在连续移动的金属带基材上沉积双轴织构的膜的方法。 这些方法包括:在基板上沉积具有大约5°至大约80°的斜入射角的沉积焊剂的沉积焊剂,同时使用沿离子束入射角度的离子束轰击沉积膜 是膜的最佳离子结构方向或沿着膜的第二最佳离子纹理方向,从而形成双轴织构化膜,其中沉积磁通入射平面平行于双轴织构化膜具有快速的方向 平面内增长率。 超导物品包括基底,通过上述方法沉积在所述基底上的双轴织构化膜; 并且还公开了设置在双轴织构化膜上的超导层。 ®KIPO&WIPO 2007