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    • 22. 发明授权
    • UV 나노 임프린트 리소그래피 수행 공정 및 장치
    • 用于超紫外线纳米压印的方法和装置
    • KR100843342B1
    • 2008-07-03
    • KR1020070014390
    • 2007-02-12
    • 삼성전자주식회사
    • 조은형좌성훈손진승이병규이두현
    • H01L21/027B82Y40/00
    • B05D5/02B29C47/92B82Y10/00B82Y40/00G03F7/00G03F7/0002Y10S977/887B29C59/02
    • An ultraviolet nano-imprint lithography process and an ultraviolet nano-imprint lithography apparatus are provided to prevent the generation of a non-uniform pattern due to an air trap by performing a pressing process between a sample and a mold. A resin(3) is coated on a metal base(2) by using a spin coating method. A mold(4) is mounted on the upper surface of the resin. A PDMS(Poly-Di-Methyl Siloxane) pad(5) is mounted on the upper surface of the mold in order to apply uniform pressure. The pressure is applied to the PDMS pad by using a quartz shaft. The UV light is applied through the quartz shaft at the state the pressure is applied to the PDMS pad. The mold is separated from the resin hardened by the UV hardening reaction. A polymer residual layer between the patterns is removed by O2 plasma ashing.
    • 提供紫外线纳米压印光刻工艺和紫外线纳米压印光刻设备,以通过在样品和模具之间进行压制来防止由于空气阱而产生不均匀图案。 通过旋涂法将树脂(3)涂覆在金属基体(2)上。 模具(4)安装在树脂的上表面上。 为了施加均匀的压力,将PDMS(聚二甲基硅氧烷)垫(5)安装在模具的上表面上。 使用石英轴将压力施加到PDMS垫。 在压力施加到PDMS垫的状态下,UV光通过石英轴施加。 将模具与通过UV硬化反应固化的树脂分离。 通过O2等离子体灰化除去图案之间的聚合物残留层。
    • 25. 发明授权
    • 패턴드 미디어 및 그 제조방법
    • 패턴드미디어및그제조방법
    • KR100738101B1
    • 2007-07-12
    • KR1020060008244
    • 2006-01-26
    • 삼성전자주식회사
    • 이병규박노열손진승윤성용
    • G11B5/74G11B5/84
    • Patterned media and a fabrication method thereof are provided to obtain high recording density from fine recording patterns of tens of nano scales, and to obtain exact location information of a head in high precision from servo patterns and track partition patterns, thereby minimizing a servo error of the head. A data area(120) is a partial area on a data recording medium, and plural recording dots whose aspect ratio defined as a relativity ratio of horizontal length and vertical length does not exceed 2:1 to the maximum are patterned in a track direction on the data area. A non-data area is a partial area on the medium except the data area(120), and plural pattern marks whose aspect ratio exceeds 2:1 are arrayed on the non-data area.
    • 提供图案化介质及其制造方法,以从数十纳米级的精细记录图案获得高记录密度,并且从伺服图案和轨道分割图案以高精度获得头的精确位置信息,从而最小化伺服误差 头部。 数据区域(120)是数据记录介质上的部分区域,并且其纵横比定义为水平长度和垂直长度的相关性比率不超过2:1到最大值的多个记录点在轨道方向 数据区。 非数据区域是除数据区域(120)之外的介质上的部分区域,并且在非数据区域上排列有宽高比超过2:1的多个图案标记。
    • 29. 发明公开
    • 수직 자기 기록 매체
    • 全能磁记录介质
    • KR1020020057371A
    • 2002-07-11
    • KR1020010000370
    • 2001-01-04
    • 삼성전자주식회사
    • 이병규
    • G11B5/62
    • G11B5/66
    • PURPOSE: A perpendicular magnetic recording medium is provided to accumulate a perpendicular reinforcement layer between a plate and a perpendicular magnetic recording layer, so as to reduce a crystal lattice size difference between a perpendicular alignment under-layer and the perpendicular magnetic recording layer and improve a perpendicular alignment feature. CONSTITUTION: A perpendicular reinforcement layer(26) to increase perpendicular alignment is formed with the thickness of over 15mm between a substrate(21) and a perpendicular magnetic recording layer(23). A perpendicular alignment under-layer(22) inducing perpendicular alignment of the perpendicular magnetic recording layer is further formed between the substrate and the perpendicular reinforcement layer. A protective layer(24) and a lubricant layer(25) are formed on the perpendicular magnetic recording layer. The perpendicular reinforcement layer is made of more than one material selected in a group composed of Pt, Au and Pd. The perpendicular alignment under-layer is made of Ti or an alloy thereof. And the perpendicular magnetic recording layer is made of a CoCr alloy.
    • 目的:提供垂直磁记录介质,以在板和垂直磁记录层之间积累垂直的加强层,从而减小垂直取向底层与垂直磁记录层之间的晶格尺寸差异,并改善 垂直对准特征。 构成:在衬底(21)和垂直磁记录层(23)之间形成具有超过15mm厚度的垂直对准的垂直加强层(26)。 进一步在基板和垂直加强层之间形成引起垂直磁记录层的垂直取向的垂直对准底层(22)。 在垂直磁记录层上形成保护层(24)和润滑剂层(25)。 垂直加强层由在Pt,Au和Pd组成的组中选择的多种材料制成。 垂直取向下层由Ti或其合金制成。 垂直磁记录层由CoCr合金制成。