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    • 113. 发明授权
    • 전자부품 시험장치
    • 전자부품시험장치
    • KR100427094B1
    • 2004-04-17
    • KR1019990052759
    • 1999-11-25
    • 가부시키가이샤 어드밴티스트
    • 사이토노보루다카하시히로유키이가라시노리유키후쿠모토게이이치나카무라히로토와타나베유타카시마다게니치
    • G01R31/26H01L21/66
    • G01R31/01G01R1/0458G01R31/2806G01R31/2862G01R31/2863G01R31/2868G01R31/2877
    • A device testing apparatus including a connection terminal to which an electronic device under test is detachably attached, a pusher for pushing the electronic device in the direction of the connection terminal so as to connect the electronic device to the connection terminal, and a cooling unit for cooling the electronic device. As the cooling unit, an element cooling the device using electricity is for example used. The cooling unit includes a cooling medium blower for blowing a cooling medium around the electronic device and heat exchange projections or depressions for raising the cooling efficiency by blowing a cooling medium. In the device testing apparatus, even if the electronic device generates heat on its own during testing, the electronic device is cooled through the pusher, connection terminals, or socket, so the effect of the heat generated by the electronic device is canceled out and the electronic device can be tested at the predetermined temperature as prescribed in the specification.
    • 一种装置测试装置,包括:连接端子,被测试的电子设备可拆卸地连接到所述连接端子;推动器,用于朝所述连接端子的方向推动所述电子装置以将所述电子装置连接到所述连接端子;以及冷却单元, 冷却电子设备。 作为冷却单元,例如使用利用电力冷却装置的元件。 冷却单元包括用于在电子装置周围吹送冷却介质的冷却介质鼓风机和用于通过吹送冷却介质来提高冷却效率的热交换突起或凹陷。 在装置测试装置中,即使电子装置在测试期间自行产生热量,电子装置也通过推动器,连接端子或插座而被冷却,因此电子装置产生的热量的效应被抵消,并且 电子设备可以按照规范中规定的预定温度进行测试。
    • 119. 发明公开
    • 접촉 구조체 및 그 제조 방법
    • 接触结构及其制造方法
    • KR1020010082160A
    • 2001-08-29
    • KR1020010006999
    • 2001-02-13
    • 가부시키가이샤 어드밴티스트
    • 커리씨오도에이.앨다즈로버트에드워드
    • H01L21/66
    • G01R3/00G01R1/06733G01R1/07307H01R12/57H01R13/2407
    • PURPOSE: A contact structure and its manufacturing method are provided to have a large number of contactors for electrically contacting with contact targets with a high frequency bandwidth, high pin counts and high contact performance as well as high reliability. CONSTITUTION: The contact structure includes a contact substrate and contactors. In an application of semiconductor test, the contact structure is positioned, for example, over a semiconductor device such as a silicon wafer to be tested. When the silicon wafer is moved upward, the lower ends of the contactors contact with the pads on the semiconductor wafer to establish electrical communication therebetween. The contactors are mounted on the contact substrate via through holes at the middle portion so that an upper part and a lower part of the contactor are projected from the contact substrate. The middle portion of the contactor may be loosely coupled to the contact substrate so that the contactor is movable when the contact structure is pressed against a contact target, such as the semiconductor wafer.
    • 目的:提供一种接触结构及其制造方法,具有大量用于与接触目标电接触的接触器,具有高频带宽,高引脚数和高接触性能以及高可靠性。 构成:接触结构包括接触基板和接触器。 在半导体测试的应用中,接触结构例如位于待测试的硅晶片等半导体器件上。 当硅晶片向上移动时,接触器的下端与半导体晶片上的焊盘接触,以在它们之间建立电连通。 接触器通过中间部分的通孔安装在接触基板上,使得接触器的上部和下部从接触基板突出。 接触器的中间部分可以松动地联接到接触基板,使得当接触结构被压靠在诸如半导体晶片的接触靶上时,接触器可移动。