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    • 4. 发明专利
    • LIGHT BEAM SCANNING DEVICE
    • JPH0228610A
    • 1990-01-30
    • JP17869888
    • 1988-07-18
    • FUJI PHOTO FILM CO LTD
    • SUMI KATSUTOKAWAMURA YOSHINORITAKADA TSUNEHISA
    • G12B7/00G02B26/10
    • PURPOSE:To suppress the temperature difference in an optical path and to obtain an image of high quality by controlling the temperature of an optical surface plate, etc., so that the temperature is equalized to outer ambient temperatures as much as possible. CONSTITUTION:An optical system 12 which records an image, etc., is arranged on the optical surface plate 14 and temperature detectors 52 and 40 are provided which detect the environmental temperature nearby the light beam scanning device 10 and the temperature of the optical surface plate 14. Further, the optical surface plate 14 is provided with heat generating bodies 42a and 42b, which is brought under temperature control according to the detected temperature difference between the temperature detectors 52 and 40. Therefore, the temperature which affects the light beam is easily uniformed without being affected by the temperature nearby the device, e.g. at low temperature in winter or at the start of the device. Consequently, the image of thigh quality which has neither distortion nor unevenness can be recorded.
    • 5. 发明专利
    • ROTATIONAL ANGULAR VELOCITY DETECTOR
    • JPH01292258A
    • 1989-11-24
    • JP12249288
    • 1988-05-19
    • KOMATSU MFG CO LTD
    • MATSUDA TOMOO
    • G01C19/00G12B7/00
    • PURPOSE:To markedly shorten an aging time, by detecting the temp. of the enclosure surrounding the unit of a rotary angle velocity detection means to perform temp. control so as to bring the temp. of the enclosure to set temp. by an electronic heating/cooling element. CONSTITUTION:The temp. in a uniform temp. layer 102 is always held to a definite temp. by a feedback circuit for holding the set temp. of a temp. setting device 112 to an objective value. Since the equal temp. layer 102 is made of material quality having good heat conductivity, even if the deposit of heat distribution is generated in the uniform temp. layer 102 by the local heat generation of a thermally connected rate gyroscope 101, said locally generated heat is immediately dispersed in the uniform temp. layer 102 to be averaged. When the average temp. thereof becomes higher or lower than the set temp., said temp. is detected by a temp. sensor 107 and the temp. in the uniform temp. layer 102 is held by the aforementioned feedback circuit so as to always maintain the set temp.
    • 6. 发明专利
    • MOUNT FOR MEASURING WAFER WITHOUT DEWING OR ICING EVEN IN LOW TEMPERATURE RANGE
    • JPS62265738A
    • 1987-11-18
    • JP11024086
    • 1986-05-14
    • OKADA YUKIHIKO
    • OKADA YUKIHIKO
    • H01L21/66G01B21/00G01N21/88G01N21/956G01R31/26G12B7/00
    • PURPOSE:To obtain a structure that a low temperature range is produced in an atmosphere by forming at the peripheral edge of a mount in a vessel of hermetically sealing structure and covering the outer periphery of the vessel with a heat insulating material. CONSTITUTION:The peripheral edge of the surface of a wafer mount 1 is formed as a vessel 2 of hermetically sealing structure, the outer periphery is covered with a heat insulating material 3, a thermos 4 is mounted in the vessel 2, a metal strip 5 is connected with the lower part of the mount 1 to be suspended, and its end is inserted into the bottle 4. Liquefied gas is fed by an inlet tube 6 into the bottle 4 to cool the strip 5 with a cold material to transfer the heat of the mount 1. Thus, the cold material of the quantity of heat which cooled the mount 1 is evaporated to be filled in the vessel 2 of the hermetically sealing structure. Further, the evaporated gas is heated by an electric heater 9 on the way through a drain tube 7 to be injected in parallel with the whole surface of the mount 1. Thus, the surface of the mount 1 is separated from the atmosphere to prevent the water content in the atmosphere from being dew-condensed or iced. An electric heater 11 is secured to the rear side of the mount 1 to control the mount 1 to an arbitrary temperature.
    • 8. 发明专利
    • Detection meter for measurement
    • 检测仪用于测量
    • JPS6190056A
    • 1986-05-08
    • JP21207184
    • 1984-10-09
    • Tokyo Rika Kikai Kk
    • SOMEYA NOBORU
    • G01N30/62G01N30/64G01N30/74G12B7/00
    • G01N30/62
    • PURPOSE:To take a high-precision analysis with reproducibility invariably where disturbance characteristics are remarkable storing the electric system part and optical system part of a detection meter for measurement in a thermostatic casing and preventing the influence of temperature variation. CONSTITUTION:An ultraviolet spectrophotometer equipped with an optical and an electric system is installed on a shelf 16a in the thermostatic casing 16 as part of a liquid chromatography device 13 together with a pump control part 14 and a sample injection part 15. Then, the thermostatic casing 16 is provided with a water storage tank 23 which has a cooler 20 and a heater 22, and a temperature controller 27 and a recorder 28. When a temperature controller 27 is set to specific temperature, respective optical parts and electronic parts of the spectrophotometer 12, pump controller 14, and sample injection part 15 are controlled to the specific temperature and held constant. Consequently, data with invariably high sensitivity are obtained even where disturbance characteristics of a production line, etc., are remarkable without any influence of variation in room temperature, etc.
    • 目的:要进行高精度的再现性分析,其中扰动特性是显着的,将用于测量的检测仪的电气部件和光学系统部件存储在恒温套管中,并防止温度变化的影响。 构成:配备有光学和电气系统的紫外分光光度计与泵控制部分14和样品注入部分15一起安装在作为液体色谱装置13的一部分的恒温壳体16的搁板16a上。然后, 壳体16设置有具有冷却器20和加热器22以及温度控制器27和记录器28的储水箱23.当将温度控制器27设定为特定温度时,分光光度计的各个光学部件和电子部件 12,泵控制器14和样品注入部15被控制到特定温度并保持恒定。 因此,即使在生产线等的干扰特性显着而不受室温变化的影响的情况下也能获得具有高灵敏度的数据。
    • 9. 发明专利
    • Radiation detector
    • 辐射探测器
    • JPS58184565A
    • 1983-10-28
    • JP6649782
    • 1982-04-21
    • Horiba Ltd
    • HAGA TOMOYUKIKOTANI HARUO
    • G01T1/17G01T1/20G01T1/208G01T1/24G12B7/00
    • G01T1/208
    • PURPOSE:To achieve an accurate temperature compensation regardless whether the temperature coefficient of a signal to be detected is either positive or negative by enabling connection to the second temperature compensation circuit switched from the first temperature compensation circuit with the point of inflexion of the signal to be detected as boundary. CONSTITUTION:A comparator A4 produces a positive output when the temperature to be detected with a thermistor Th is lower than the temperature at the poit inflexion of a signal Si to be detected and an output '0' when it is higher than that. When the positive output is produced, transistors Tr1 and Tr3 conducts to be driven allowing a thermosensitive element RT to be connected to a feedback circuit of an arithmetic amplifier A2. This forms a first compensation circuit to effect a temperature compensation for a signal Si to be detected having a positive temperature coefficient. On the other hand, when the comparator A4 produces an output '0', an inversion takes place with an inverter IN and transistors Tr2 and Tr4 conducts to be driven allowing a thermosensitive element RT' to be connected to a feedback circuit of the arithmetic amplifier A2. This forms a second temperature compensation circuit to effect a temperature compensation for the signal to be detected having a negative temperature coefficient.
    • 目的:无论通过使第一温度补偿电路切换到第二温度补偿电路的连接方式与信号的拐点为准,可以实现准确的温度补偿,无论要检测的信号的温度系数是正还是负 检测为边界。 构成:当用热敏电阻Th检测的温度低于要检测的信号Si的弯曲拐点处的温度时,比较器A4产生正输出,当高于该温度时,输出“0”。 当产生正输出时,晶体管Tr1和Tr3导通被驱动,允许热敏元件RT连接到算术放大器A2的反馈电路。 这形成了对具有正温度系数的待检测信号Si进行温度补偿的第一补偿电路。 另一方面,当比较器A4产生输出“0”时,用反相器IN进行反转,并且晶体管Tr2和Tr4导通被驱动,允许热敏元件RT'连接到运算放大器的反馈电路 A2。 这形成第二温度补偿电路,以对具有负温度系数的待检测信号进行温度补偿。