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1. 发明专利

JPH0222342B2 失效
公开(公告)号：JPH0222342B2
公开(公告)日：1990-05-18
申请号：JP1557679
申请日：1979-02-10
申请人： HORIBA LTD
发明人： KOTANI HARUO , HAGA TOMOYUKI
IPC分类号： G01N27/76 , G01N27/74

2. 发明专利

JPS6141950A Fluorescent x-ray measuring instrument 失效
标题翻译：荧光X射线测量仪器
公开(公告)号：JPS6141950A
公开(公告)日：1986-02-28
申请号：JP16468384
申请日：1984-08-04
申请人： Horiba Ltd
发明人： KUMAKURA KOICHI , USUI YOSHIHIKO , HAGA TOMOYUKI
IPC分类号： G01N23/223 , G21B1/15
CPC分类号： G01N23/223 , G01N2223/076
摘要： PURPOSE:To make possible exact measurement by providing a collimator having a vacuum chuck port which can fix a sample to the end of a probe contg. a detecting element of an X-ray detector therein. CONSTITUTION:A glass microballoon (GMB)20 carried to the position approximately right under the vacuum chuck port 7 by the stepping of a conveyor 10 is attracted and fixed to the port 7 by the strong sucking force generated when a vacuum pump is operated and the air near the through-hole 7a is discharged through a hollow space 6 to the outside of the collimator 5. The fluorescent X-rays (x) are emitted from the GMB20. The X-rays x arrive at the detecting element 1 through the hole 7a, the hollow space 6 and a transmission window 4 so that prescribed counting is executed. When the measurement of the fluorescent X-rays with one GMB20 is completed, the operation of the vacuum pump is stopped or a regulating valve provided to a discharge pipe 8 is opened to release the measured GMB20 from the port 7. The removed GMB is returned to the conveyor 10 and the conveyor 10 is stepped so as to be ready for the next measurement.
摘要翻译：目的：通过提供具有真空吸盘端口的准直器来进行精确测量，该真空吸盘端口可以将样品固定到探头末端。其中的X射线检测器的检测元件。构成：通过输送机10的步进运送到位于真空吸盘口7正下方的位置的玻璃微球（GMB）20被真空泵操作时产生的强吸力吸引并固定到端口7，通孔7a附近的空气通过中空空间6排出到准直仪5的外部。荧光X射线（x）从GMB20发射。 X射线x通过孔7a，中空空间6和透射窗4到达检测元件1，从而执行规定的计数。当一个GMB20的荧光X射线的测量完成时，停止真空泵的操作或打开设置到排出管8的调节阀，以从端口7释放所测量的GMB20。返回的去除的GMB 输送机10和输送机10是阶梯式的，以准备进行下一次测量。

3. 发明专利

JPS632090B2 失效
公开(公告)号：JPS632090B2
公开(公告)日：1988-01-16
申请号：JP20632982
申请日：1982-11-24
申请人： HORIBA LTD
发明人： KOTANI HARUO , HAGA TOMOYUKI
IPC分类号： H01S3/08 , G02B27/00 , H01S3/00

4. 发明专利

JPS6141949A Fluorescent x-ray measuring instrument 失效
标题翻译：荧光X射线测量仪器
公开(公告)号：JPS6141949A
公开(公告)日：1986-02-28
申请号：JP16468284
申请日：1984-08-04
申请人： Horiba Ltd
发明人： USUI YOSHIHIKO , HAGA TOMOYUKI , KUMAKURA KOICHI
IPC分类号： G01N23/223 , G21B1/15
CPC分类号： G01N23/223 , G01N2223/076
摘要： PURPOSE:To improve measuring efficiency by providing freely rotatably, attachably and detachably a table having a vacuum chuck port which can fix descretely plural samples to the inside of a chamber. CONSTITUTION:Measurement of H is executed by fixing first glass microballoons (GMB)40 to the vacuum chuck port 15 on a sample table 14 and closing a door 12. The table 14 is then placed to the prescribed position in the chamber 10. When a pump P is operated here, air is pulled through a through-hole 16, a vertical hole 17, a flow passage 20, a cross hole 18, a vertical hole 19, the hollow part of a revolving shaft 24 and a discharge pipe 28 and therefore the GM40 on the hole 16 is fixed to the port 15. The shaft 24 is revolved in a prescribed direction by a worm gear 27 and a gear 25 when a motor 26 is run in succession thereto. The table 40 is rotated about 36 deg. and the next GMB40 is subjected to the measurement when the fluorescent X-ray quantity from one GMB40 is measured by a detector 31. The pump P and the motor 26 are stopped upon ending of the measurement with all the GMBs40 and the GMBs40 are removed from the port 15, by which the measuring efficiency is improved.
摘要翻译：目的：通过可自由旋转地，可拆卸地提供具有真空吸盘端口的台面来提高测量效率，该真空吸盘端口能将分散的多个样品固定在室内。构成：通过将第一玻璃微球（GMB）40固定到样品台14上的真空吸盘端口15并关闭门12来执行<3> H的测量。然后将工作台14放置在室10中的规定位置当在这里操作泵P时，空气通过通孔16，竖直孔17，流动通道20，十字孔18，垂直孔19，转动轴24的中空部分和排出口管28，因此孔16上的GM40固定到端口15.当马达26连续运行时，轴24通过蜗轮27和齿轮25在规定方向上旋转。台40旋转约36度。并且当通过检测器31测量来自一个GMB40的荧光X射线量时，接下来的GMB40进行测量。当所有GMB40和GMB40从...中移除时，泵P和电动机26在结束测量时停止端口15，由此提高了测量效率。

5. 发明专利

JPS58184565A Radiation detector 失效
标题翻译：辐射探测器
公开(公告)号：JPS58184565A
公开(公告)日：1983-10-28
申请号：JP6649782
申请日：1982-04-21
申请人： Horiba Ltd
发明人： HAGA TOMOYUKI , KOTANI HARUO
IPC分类号： G01T1/17 , G01T1/20 , G01T1/208 , G01T1/24 , G12B7/00
CPC分类号： G01T1/208
摘要： PURPOSE:To achieve an accurate temperature compensation regardless whether the temperature coefficient of a signal to be detected is either positive or negative by enabling connection to the second temperature compensation circuit switched from the first temperature compensation circuit with the point of inflexion of the signal to be detected as boundary. CONSTITUTION:A comparator A4 produces a positive output when the temperature to be detected with a thermistor Th is lower than the temperature at the poit inflexion of a signal Si to be detected and an output '0' when it is higher than that. When the positive output is produced, transistors Tr1 and Tr3 conducts to be driven allowing a thermosensitive element RT to be connected to a feedback circuit of an arithmetic amplifier A2. This forms a first compensation circuit to effect a temperature compensation for a signal Si to be detected having a positive temperature coefficient. On the other hand, when the comparator A4 produces an output '0', an inversion takes place with an inverter IN and transistors Tr2 and Tr4 conducts to be driven allowing a thermosensitive element RT' to be connected to a feedback circuit of the arithmetic amplifier A2. This forms a second temperature compensation circuit to effect a temperature compensation for the signal to be detected having a negative temperature coefficient.
摘要翻译：目的：无论通过使第一温度补偿电路切换到第二温度补偿电路的连接方式与信号的拐点为准，可以实现准确的温度补偿，无论要检测的信号的温度系数是正还是负检测为边界。构成：当用热敏电阻Th检测的温度低于要检测的信号Si的弯曲拐点处的温度时，比较器A4产生正输出，当高于该温度时，输出“0”。当产生正输出时，晶体管Tr1和Tr3导通被驱动，允许热敏元件RT连接到算术放大器A2的反馈电路。这形成了对具有正温度系数的待检测信号Si进行温度补偿的第一补偿电路。另一方面，当比较器A4产生输出“0”时，用反相器IN进行反转，并且晶体管Tr2和Tr4导通被驱动，允许热敏元件RT'连接到运算放大器的反馈电路 A2。这形成第二温度补偿电路，以对具有负温度系数的待检测信号进行温度补偿。

6. 发明专利

JPS6341499B2 失效
公开(公告)号：JPS6341499B2
公开(公告)日：1988-08-17
申请号：JP6649782
申请日：1982-04-21
申请人： HORIBA LTD
发明人： HAGA TOMOYUKI , KOTANI HARUO
IPC分类号： G01T1/17 , G01T1/20 , G01T1/208 , G01T1/24 , G12B7/00

7. 发明专利

JPH0459582B2 失效
公开(公告)号：JPH0459582B2
公开(公告)日：1992-09-22
申请号：JP10155583
申请日：1983-06-04
申请人： HORIBA LTD
发明人： HAGA TOMOYUKI , HOSOKAWA YOSHINORI
IPC分类号： G01N23/207 , H01L21/66

8. 发明专利

JPH0380255B2 失效
公开(公告)号：JPH0380255B2
公开(公告)日：1991-12-24
申请号：JP16468284
申请日：1984-08-04
申请人： HORIBA LTD
发明人： USUI YOSHIHIKO , HAGA TOMOYUKI , KUMAKURA KOICHI
IPC分类号： G01N23/223 , G21B1/15

9. 发明专利

JPS59225339A APPARATUS FOR MEASURING INCLINATION ANGLE OF CRYSTAL SURFACE 失效
公开(公告)号：JPS59225339A
公开(公告)日：1984-12-18
申请号：JP10155583
申请日：1983-06-04
申请人： HORIBA LTD
发明人： HAGA TOMOYUKI , HOSOKAWA YOSHINORI
IPC分类号： G01N23/207 , H01L21/66
摘要： PURPOSE:To make it possible to rapidly measure an inclination angle and to attain to simplify and miniaturize the titled apparatus, by calculating the inclination angle of a crystal surface by calculating the max. value or the min. value of diffraction X-ray energy by rotating a specimen stand turntable. CONSTITUTION:X-rays are incident to a specimen 3 such as a silicon wafer at an angle of 45 deg. to the specimen surface 3b and a specimen stand turntable 1 is rotated while the min. value Emin or the max. value Emax of diffraction X-ray energy is detected by an energy dispersing type X-ray detector 6 and operation of formulae (3), (4) are performed by an operation processing part 10 to calculate the inclination angle theta0 of a crystal surface 3a. In the formulae (3), (4); (n) is an integer; (h) is Planck's constant; (c) is luminous flux; (h), (k) and l are mirror constant and (a) is grating constant. The angle theta can be measured by rotating the specimen stand turntable only once and a spectral crystal such as a wavelength dispersing system and a means for rotating the same is dispensed with.

10. 发明专利

JPS57124586A Co2 laser working device 失效
标题翻译： CO2激光工作装置
公开(公告)号：JPS57124586A
公开(公告)日：1982-08-03
申请号：JP1106981
申请日：1981-01-27
申请人： Horiba Ltd
发明人： SAKURAGI SHIROU , IMAGAWA KIYOUSHIROU , KOTANI HARUO , SAITOU MITSUNORI , HAGA TOMOYUKI
IPC分类号： B23K26/08 , B23K26/00 , B23K26/02 , B23K26/03 , B23K26/10
CPC分类号： B23K26/034 , B23K26/02 , B23K26/10
摘要： PURPOSE:To improve the work precision of a laser working device by reducing the size of the device by simplifying an optical system structure by using a CO2 laser oscillator and a flexible cable containing a fiber for infrared-ray transmission. CONSTITUTION:A focusing part 5 is positioned right over a power meter 11 and a CO2 laser oscillator 1 is put in operation. Consequently, a 10.6mum laser beam generated by the oscillator 1 is transmitted to the focusing part 5 through a fiber for infrared-ray transmission incorporated in a flexible cable 3 to irradiate the power meter 11 with the beam. Then, the output signal of the power metar 11 is used to confirm whether the output of the oscillator 1 has an enough level for print work and when so, the work is started. At this time, a control signal is outputted from a controller 12 on the basis of data to open or close a shutter 2 in the laser oscillator 1. On the other hand, the focusing part 5 moves along the surface of a work W through the members 9 and 10 of a driver 7 to print a figure on the surface of the work W.
摘要翻译：目的：通过使用CO2激光振荡器和包含用于红外线传输的光纤的柔性电缆，通过简化光学系统结构，通过减小器件的尺寸来提高激光加工装置的工作精度。构成：聚焦部分5位于功率计11的正上方，并且CO 2激光振荡器1投入运行。因此，由振荡器1产生的106mum激光束通过结合在柔性电缆3中的用于红外线透射的光纤传输到聚焦部分5，以用光束照射功率计11。然后，功率元11的输出信号用于确认振荡器1的输出是否具有足够的打印作业水平，并且当这样做时，工作开始。此时，基于数据，从控制器12输出控制信号，以打开或关闭激光振荡器1中的快门2.另一方面，聚焦部分5沿着工件W的表面通过驱动器7的构件9和10，以在工件W的表面上打印图形。

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