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    • 7. 发明专利
    • MAGNETIC FIELD GENERATOR FOR MAGNETRON PLASMA
    • JPH0927277A
    • 1997-01-28
    • JP17588995
    • 1995-07-12
    • SHINETSU CHEMICAL CO
    • MIYATA KOJI
    • H05H1/46C23F4/00H01J23/02
    • PROBLEM TO BE SOLVED: To provide a uniform plasma density distribution by providing a clearance in the center of the length of each of anisotropic segment columnar magnets in a dipole ring magnet, and setting the size of the clearance to match the place of the columnar magnet. SOLUTION: Anisotropic segment columnar magnets 50 (1 to 16) are oriented, as the dipole ring magnet of a magnetic field generator, in the direction of magnetization shown in the Fig. so that a magnetic field shown by the arrow 53 is produced within the ring. Each of the columnar magnets 50 (1 to 16) has a clearance 54 provided in its center along its longitudinal direction, the sizes 55 of the clearances 54 getting smaller in areas where the strength of the magnetic field is made higher and getting larger in areas where the strength is made lower. For the gradient of the magnetic field to show a distribution in which the magnetic field gets higher in the positive direction of Y-axis and lower in the negative direction, the sizes 55 of the clearances are determined to match the places where the columnar magnets 50 (1 to 16) are placed along the direction of Y-axis. Therefore, a plasma that is uniform over a wide range can be obtained by use of the magnetic field generator in a magnetron.
    • 9. 发明专利
    • JPH05250997A
    • 1993-09-28
    • JP8463692
    • 1992-03-06
    • NEC CORP
    • KAWAI HIDEMASA
    • H01J23/02
    • PURPOSE:To prevent dielectric breakdown from being caused between metallic electrodes due to creeping discharge on the surface of ceramics when high voltage is impressed between the metallic electrodes sandwiching the ceramics between them. CONSTITUTION:Ring shape metallic electrodes 2 larger respectively than an outer diameter of ceramics 1 are fixed on one edge surfaces of two sets of cylindrical ceramics 1. A ring shape support body 5 larger than an outer diameter of the ceramics 1 is sandwiched/joined between the other surfaces. Since a ceramic body structure is composed of this ring shape metallic support body 5, even if step parts and so on are not processed on the outer periphery or on the inner peripheral surface of the ceramics 1, creeping discharge can be prevented easily.