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    • 10. 发明专利
    • METHOD FOR MANUFACTURING Ge-Mn MAGNETIC SEMICONDUCTOR THIN FILM
    • 制造Ge-Mn磁性半导体薄膜的方法
    • JP2005327751A
    • 2005-11-24
    • JP2003365101
    • 2003-10-24
    • Korea Advanced Inst Of Sci Technol韓国科学技術研究院
    • LIM SANG HOSONG SANG HOON
    • H01F10/193H01F10/187H01F41/20H01L29/82
    • H01F1/405
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing a Ge-Mn magnetic semiconductor thin film by which the Ge-Mn magnetic semiconductor thin film made of ferromagnetic semiconductor substance with high Curie temperature can be manufactured. SOLUTION: A vapor deposition apparatus for vapor-deposition process by heat is used to connect to electrodes provided on the vapor deposition apparatus the ends of two boats to which the Ge of a 14 group semiconductor and the Mn of a 3d transition metal are respectively given. Different electric powers are applied to the two boats through the electrodes while they are gradually changed. The respective boats produce heat by electric resistance including in themselves, and they evaporate or sublime a given sample (Ge or Mn) by the heat, and the sample is deposited on a substrate that is located at a specified position within the deposition apparatus. COPYRIGHT: (C)2006,JPO&NCIPI
    • 解决的问题:提供一种制造Ge-Mn磁性半导体薄膜的方法,通过该方法可以制造具有高居里温度的铁磁性半导体物质制成的Ge-Mn磁性半导体薄膜。 解决方案:用于通过热气相沉积工艺的气相沉积设备用于连接设置在气相沉积设备上的电极,两个船的端部,14组半导体的Ge和3d过渡金属的Mn 分别给出。 不同的电力在逐渐变化时通过电极施加到两个船上。 相应的船只通过包括其自身的电阻产生热量,并且通过加热蒸发或升温给定的样品(Ge或Mn),并且将样品沉积在位于沉积设备内的指定位置的基底上。 版权所有(C)2006,JPO&NCIPI