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    • 2. 发明专利
    • CAPACITIVE PRESSURE SENSOR
    • JPH10111206A
    • 1998-04-28
    • JP26586096
    • 1996-10-07
    • DENSO CORP
    • IMAI MASATO
    • G01L9/12G01L19/00G01L23/12
    • PROBLEM TO BE SOLVED: To enable application to high pressure detection, and simultaneously realize the simplification of structure and improvement of reliability to life. SOLUTION: In a housing 11 formed of metal, a cylindrical housing main body part 12 having a pressure receiving port 12a and a diaphragm part 13 facing the pressure receiving port 12a are collectively installed in an unified body. A board 14 formed of ceramic has a circular detecting electrode 15 which faces the diaphragm part 13 in the state that a specified gap exists, and an annular reference electrode 16 which faces the peripheral part position of the housing main body part 12, having the same gap. A detecting capacitor CD whose capacitance is changed in accordance with deformation of the diaphragm part 13 is formed between the upper surface of the diaphragm part 13 and the detecting electrode 15. A reference capacitor CR whose capacitance becomes constant is formed between the upper part of a trapezoid part 12d and the reference electrode 16. An LSI 19 for a processing circuit detects the pressure acting on the diaphragm part 13, on the basis of the deviation of the respective capacitances of the detecting capacitor CD and the reference capacitor CR.
    • 4. 发明专利
    • SERVO ELECTROSTATIC CAPACITY TYPE VACUUM SENSOR
    • JPH11326093A
    • 1999-11-26
    • JP15074898
    • 1998-05-14
    • ANELVA CORPESASHI MASAKI
    • MIYASHITA HARUZOYOSHIMURA AKIKOESASHI MASAKI
    • G01L9/12G01L9/00G01L23/12
    • PROBLEM TO BE SOLVED: To provide a servo electrostatic capacity type vacuum sensor suppressing the sensitivity against vibration, reducing the dependency on thermal expansion by manufacturing dispersion and temperature, requiring no electrostatic capacity measurement by each vacuum sensor, improving measurement accuracy, capable of measuring pressure in a wide range at high sensitivity with a small size, and suitable for the measurement of fine pressure in particular. SOLUTION: This servo electrostatic capacity type vacuum sensor has a laminated structure formed with a silicon substrate 12 and Pyrex substrates 13, 13, and it is provided with an electrode section 20, an electrode for detecting an electrostatic capacity and a servo-electrode 16. A guide port 15 communicating the outside and the inside is formed. The electrode section 20 is constituted by a thin moving electrode 21 formed nearly at the center and a thick peripheral electrode 22 located on the periphery of the moving electrode 21 to support it. A fixed electrode 24 facing the moving electrode 21 and a reference electrode 25 facing the protruded servo-electrode 16 and the peripheral electrode 22 are provided.
    • 7. 发明专利
    • In-tube pressure sensor
    • 管内压力传感器
    • JP2011163926A
    • 2011-08-25
    • JP2010026855
    • 2010-02-09
    • Isuzu Motors Ltdいすゞ自動車株式会社
    • UCHIYAMA TADASHIASO MITSUHIRO
    • G01L23/18G01L23/10G01L23/12G01L23/14
    • G01L23/125G01L9/0089G01L23/14G01L23/18
    • PROBLEM TO BE SOLVED: To provide an in-tube pressure sensor that has a simple structure, is easily replaced, and is not affected by temperature.
      SOLUTION: This in-tube pressure sensor 1 is attached to an engine 11 having a cylinder block 16 outside a cylinder liner 14 as the outer shell of a cylinder 13 storing a piston 12 at a distance from it by a cooling water flow channel 15, and detects the in-tube pressure as the atmospheric pressure in the cylinder 13. The sensor 1 is equipped with: a push rod 2 penetrating through the cylinder block 16 from the outside thereof, butted on the cylinder liner 14, and displaced by in-tube pressure; and a displacement sensor for detecting the displacement of the push rod 14 outside the cylinder block 16.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种具有简单结构的管内压力传感器,易于更换并且不受温度的影响。 解决方案:该管内压力传感器1附接到发动机11,发动机11具有气缸套14外部的气缸体16作为气缸13的外壳,气缸13将活塞12与冷却水流隔开一段距离 通道15,并且将管内压力检测为气缸13中的大气压。传感器1配备有:从其外部穿过气缸体16的推杆2,对接在气缸套14上并且移位 通过管内压力; 以及用于检测推杆14在气缸体16外部的位移的位移传感器。版权所有(C)2011,JPO&INPIT
    • 8. 发明专利
    • PRESSURE SENSOR
    • JP2001050842A
    • 2001-02-23
    • JP22338899
    • 1999-08-06
    • MATSUSHITA ELECTRIC IND CO LTD
    • MATSUKAWA TAKANORINISHIWAKI HIDENORIUEDA SHINJIROINOUE TAKEHIKO
    • G01L9/12G01L19/14G01L23/12
    • PROBLEM TO BE SOLVED: To integrate the side- and bottom-surface part of a pressure measuring part for eliminating the need for reinforcement and reducing costs by fitting a target side pressure introduction pipe to a fitting part so that pressure measuring part, a pressure reception substrate, and a lid are included. SOLUTION: The pressure sensor fits a target-side pressure introduction pipe 42 to a fitting part 21 so that a pressure measuring part 26, a pressure reception substrate 30, and a lid 41 are included, and at the same time is composed for detecting the pressure of a substance 43 whose pressure is to be detected in the target-side pressure introduction pipe 42 with a pressure reception substrate 30 in the pressure measuring part 26. Therefore, when pressure inside the target side pressure introduction pipe 42 increases, the pressure operates in a direction for blocking an opening 28 of the pressure measuring part 26, thus simplifying the structure of the pressure sensor since it is not necessary to integrate the side- and bottom-surface part of the pressure measuring part 26 for reinforcement so that the lid 41 cannot deviate from the pressure measuring part 26. Also, since pressure is directly applied to the pressure reception substrate 30, output sensitivity also increases.
    • 9. 发明专利
    • PRESSURE SENSOR
    • JP2000292289A
    • 2000-10-20
    • JP10150199
    • 1999-04-08
    • YAZAKI CORP
    • TAKANOHASHI DAISUKE
    • G01L9/10G01L7/06G01L23/12
    • PROBLEM TO BE SOLVED: To obtain a pressure sensor suitable for size reduction in which even a very small pressure can be detected with high accuracy, initial position can be adjusted easily and lowering of detection accuracy due to shift of adjustment can be prevented. SOLUTION: A pressure-displacement conversion mechanism 27 for displacing a pressure detecting rod 25 depending on the fluid pressure comprises a bellows 23 expanding/contracting depending on the fluid pressure acting on a pressure receiving plane 23a, and a pressure detecting rod 25 advancing/retracting in accordance with expansion/contraction of the bellows 23. When the cover 57b of a yoke 57 containing a coil unit 47 turns through operation of a stop screw 67 for adjusting advance/retraction and the position of the pressure detecting rod 25, a detection signal output means 29 for outputting an electric signal depending on the displacement of the pressure detecting rod 25 varies the output through variation in the inductance of a coil incident to variation of gap caused by rotation of the yoke cover 57b.