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    • 3. 发明专利
    • Low-noise voltage controlled oscillation circuit
    • 低噪声电压控制振荡电路
    • JP2010283728A
    • 2010-12-16
    • JP2009137114
    • 2009-06-08
    • Nippon Dempa Kogyo Co Ltd日本電波工業株式会社
    • KITAYAMA YASUODEMURA HIROYUKI
    • H03B5/12
    • H03B5/1231H03B5/1203H03B5/1237
    • PROBLEM TO BE SOLVED: To provide a low-noise voltage controlled oscillation circuit capable of making characteristics of low-frequency noise excellent by canceling power supply noise.
      SOLUTION: The present invention relates to a low-noise voltage controlled oscillation circuit where a capacitor C11 is provided between a base of a drive transistor Q1 and a GND, thereby canceling low-frequency noise inputted to the base and the drive transistor Q1 is made into transistor of low hFE, thereby canceling low-frequency noise inputted from a power source. A coil L3 is provided at an emitter side of an oscillation transistor Q2, thereby band-widening frequency characteristics to make frequency characteristics of phase noise excellent a resonant frequency in a resonance circuit comprised of a capacitor C7 and the coil L3 at the emitter side of the oscillation transistor Q2 is set to around the center of an oscillation frequency band of a VCO, thereby providing the oscillation frequency which is hardly affected by noise.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种能够通过消除电源噪声来优化低频噪声特性的低噪声压控振荡电路。 解决方案:本发明涉及一种低噪声压控振荡电路,其中电容器C11设置在驱动晶体管Q1和GND的基极之间,从而抵消输入到基极的低频噪声和驱动晶体管 Q1被制成低hFE的晶体管,从而消除从电源输入的低频噪声。 在振荡晶体管Q2的发射极侧设置有线圈L3,从而使频率特性变宽,使包含电容器C7和发射极侧的线圈L3的谐振电路的谐振频率的相位噪声的频率特性优异 振荡晶体管Q2被设置在VCO的振荡频带的中心附近,从而提供几乎不受噪声影响的振荡频率。 版权所有(C)2011,JPO&INPIT
    • 8. 发明专利
    • System and method for automatically tuning power and frequency of rf generator in bimodal mode
    • 射频发生器在双模式下自动调谐功率和频率的系统与方法
    • JP2013240042A
    • 2013-11-28
    • JP2013060644
    • 2013-03-22
    • Mks Instruments Incエム ケー エス インストルメンツ インコーポレーテッドMks Instruments,Incorporated
    • FISK II LARRY JRUGHOONUNDON AMISH
    • H04B1/04H03F3/20H03F3/68H05H1/46
    • H03B5/1237H01J37/32082H01J37/32174H03F3/20H03K3/55
    • PROBLEM TO BE SOLVED: To provide a radio frequency generator in which a plurality of RF power signals generated by a plurality of RF generators are accurately controlled to effectively execute plasma etching.SOLUTION: A radio frequency generator includes: power control modules 74 and 76 generating power signals indicating power levels for a plurality of target states of power amplifiers 42 and 44; frequency control modules 78 and 80 generating frequency signals indicating frequencies for the plurality of target states of the power amplifiers 42 and 44; and pulse generating modules 70 and 72 supplying an output signal to the power amplifiers 42 and 44, recalling at least one of the latest power level and the latest frequency for one of the plurality of target states of the power amplifiers 42 and 44, and on the basis of the power signals, the frequency signals and at least one of the latest power level and the latest frequency of the power amplifiers 42 and 44, adjusting a current power level and a current frequency of the output signal.
    • 要解决的问题:提供一种射频发生器,其中由多个RF发生器产生的多个RF功率信号被精确地控制以有效地执行等离子体蚀刻。解决方案:射频发生器包括:功率控制模块74和76,产生 指示功率放大器42和44的多个目标状态的功率电平的功率信号; 频率控制模块78和80产生指示功率放大器42和44的多个目标状态的频率的频率信号; 以及向功率放大器42和44提供输出信号的脉冲发生模块70和72,回收功率放大器42和44的多个目标状态中的一个的最新功率电平和最新频率中的至少一个,并且接通 功率信号的基础,频率信号和功率放大器42和44的最新功率电平和最新频率中的至少一个,调整当前功率电平和输出信号的当前频率。