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    • 9. 发明专利
    • Integrated circuit and manufacturing method therefor
    • 集成电路及其制造方法
    • JP2007158105A
    • 2007-06-21
    • JP2005352396
    • 2005-12-06
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • SETO CHIKAUCHIDA MIKIYAKANEZAKI EMIMIMURO KEN
    • H01L21/8236H01L27/088H01L27/146
    • H01L21/761H01L21/823412H01L21/823418H01L21/8236H01L21/823807H01L21/823814H01L27/0883
    • PROBLEM TO BE SOLVED: To provide an integrated circuit having both of enhancement-type and depression-type MOS transistors that have different thresholds, in at least one conductive transistor where the variance of the threshold and modulation degree are small and the modulation degree is large, and to provide a solid-state imaging device equipped with the integrated circuit and a manufacturing method of them.
      SOLUTION: The integrated circuit is provided with a first conductive semiconductor substrate, enhancement-type MOS transistors, and depression type MOS transistors formed on the semiconductor substrate and having a channel region under a gate electrode 12. On one or more depression-type MOS transistors, an injection region 5a is formed having first conductive impurities of the same concentration as that of the semiconductor substrate and second conductive impurities which serves as a reverse conductive type, and the concentration of the second conductive impurities in the injection area is higher than that of the first conductive impurities.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供一种具有不同阈值的增强型和凹陷型MOS晶体管两者的集成电路,其中阈值和调制度的变化小的至少一个导电晶体管和调制 程度大,并且提供配备有集成电路的固态成像装置及其制造方法。 解决方案:集成电路设置有形成在半导体衬底上并在栅电极12下方具有沟道区的第一导电半导体衬底,增强型MOS晶体管和凹陷型MOS晶体管。在一个或多个凹陷型MOS晶体管上, 形成具有与半导体衬底相同浓度的第一导电杂质和用作反向导电型的第二导电杂质的注入区5a,并且注入区中的第二导电杂质的浓度较高 比第一导电杂质的。 版权所有(C)2007,JPO&INPIT
    • 10. 发明专利
    • Manufacture of semiconductor device
    • 半导体器件的制造
    • JPS59149044A
    • 1984-08-25
    • JP2443383
    • 1983-02-15
    • Sanyo Electric Co Ltd
    • KITAMURA YUUJI
    • H01L27/088H01L21/8236H01L29/78
    • H01L21/8236
    • PURPOSE:To reduce the number of contacts, and to miniaturize and integrate a semiconductor device containing an inverter circuit by using an enhancement type transistor as an Mo gate and a depletion type transistor as an Al gate. CONSTITUTION:An Mo layer is formed on the whole surface of a P-type silicon substrate 9, an Mo gate electrode 17 is formed on a gate oxide film 13 in a transistor region 11, which must be formed to an enhancement type through etching, while an Mo mask 18 coating a gate oxide film 13 in a residual transist or region 11, which must be formed to a depletion type, and Mo wiring 19 are formed, N-type As , P , etc. are implanted and source-drain regions 14 in the transistor region 11, which must be formed to the enhancement type, are formed again through self-alignment, and gate length is determined. An inter-layer insulating film 20 is formed on the whole surface of the substrate 9, the insulating film 20 on the Mo mask 18 and the Mo mask 18 are removed, and an N type impurity, such as As , P , etc. is implanted through the gate oxide film 13 to form the transistor region 11 to the depletion type. Al Wirings 23 to the source-drain regions 14, etc. are formed while an Al gate electrode 24 is formed on the gate oxide film 13 in the depletion type transistor region 11.
    • 目的:通过使用增强型晶体管作为Mo栅极和耗尽型晶体管作为Al栅极,减少触点数量,并且使包含反相器电路的半导体器件小型化并集成。 构成:在P型硅衬底9的整个表面上形成Mo层,在栅极氧化膜13上形成Mo栅电极17,晶体管区域11必须通过蚀刻形成为增强型, 而Mo形掩模18在必须形成为耗尽型的残留转移区域11中形成栅极氧化膜13,并且形成Mo布线19,N型As +,P ++等。 并且必须通过自对准再次形成必须形成为增强型的晶体管区域11中的源极 - 漏极区域14,并且确定栅极长度。 在基板9的整个表面上形成层间绝缘膜20,除去Mo掩模18和Mo掩模18上的绝缘膜20,并将N型杂质如As + +等等通过栅极氧化膜13注入,以形成耗尽型晶体管区域11。 在耗尽型晶体管区域11中的栅极氧化膜13上形成Al栅电极24至源极 - 漏极区域14等。