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1. 发明专利

JP4186727B2 switch 有权
公开(公告)号：JP4186727B2
公开(公告)日：2008-11-26
申请号：JP2003184204
申请日：2003-06-27
申请人：松下電器産業株式会社
发明人：邦彦中村 , 淑人中西 , 康幸内藤 , 紀智清水
IPC分类号： B81B3/00 , H01H59/00 , H01H49/00
CPC分类号： H01H59/0009 , H01G5/40 , H01H2001/0078 , H01H2059/0027
摘要： A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling.

2. 发明专利

JP2006526267A Multi-stearyl Bull micro-electro-mechanical switch switch and a method of manufacturing the same 有权
公开(公告)号：JP2006526267A
公开(公告)日：2006-11-16
申请号：JP2006510109
申请日：2004-04-16
申请人：メドトロニック・インコーポレーテッド
发明人：ダンズル，ラルフ・ビー , ハーベッツ，プィリッペ , ホーベン，リヒャルト，ペー・エム , マテス，マイケル・エフ , レチェフェウアー，ロジェール
IPC分类号： H01H59/00 , B81B3/00 , B81B5/00 , H01H49/00
CPC分类号： H01H59/0009 , B81B3/0054 , B81B2201/018 , B81B2203/051 , H01H2001/0042 , H01H2001/0078 , Y10T29/49105
摘要：【課題】
【解決手段】医療装置にて使用するのに適したマイクロ電子機械（ＭＥＭＳ）スイッチは、該ＭＥＭＳスイッチを製造し且つ使用する方法と共に提供される。１つの形態において、受容端子と電気的に協働する形態とされた可動部材を有するマイクロ電子機械スイッチが基板上に形成される。可動部材及び受容端子の各々は、基板に近接する絶縁層と、基板と対向した絶縁層に近接する伝導層とを有している。色々な実施の形態において、可動部材及び（又は）受容端子の伝導層は、基板から外方に伸びて可動部材の伝導層及び受容端子を切り替え可能に連結し、これにより、スイッチを形成する突出領域を備えている。該スイッチは、例えば、静電エネルギを使用して作動させることができる。

3. 发明专利

JP2006228717A Electromechanical switch 有权
标题翻译：电动开关
公开(公告)号：JP2006228717A
公开(公告)日：2006-08-31
申请号：JP2006012529
申请日：2006-01-20
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： NAKANISHI YOSHITO
IPC分类号： H01H59/00 , B81B3/00 , H01H37/52 , H01H55/00 , H01H57/00
CPC分类号： H01H59/0009 , H01H50/005 , H01H2001/0078 , H01H2001/0084 , H01H2057/006 , H01H2061/006
摘要： PROBLEM TO BE SOLVED: To provide an electromechanical switch capable of responding to switching at a high speed by low driving voltage. SOLUTION: An electromechanical switch body 10 being a MEMS switch has a first movable electrode 14 and a second movable electrode 16 having both ends fixed and installed by a first anchor 12 and a second anchor 13 formed on a silicon substrate 2, and a fixed electrode 18 opposed to these movable electrodes. A first electromechanical switch 22 drivable by low voltage is composed of the first movable electrode 14 of relatively weak spring force and the fixed electrode 18. By constituting a second electromechanical switch 24 capable of latching by low voltage driving out of the the second movable electrode 16 of relatively strong spring force and the fixed electrode 18, the first movable electrode 14 is displaced at a high speed by the low driving voltage, and the first electromechanical switch is turned on at a high speed. The second movable electrode 16 causes natural vibration at a high speed by restoring force, and the second electromechanical switch is turned off at a high speed, and latches the returned second movable electrode 16 by the low driving voltage, and turns on the second electromechanical switch. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够以低驱动电压高速切换的机电开关。解决方案：作为MEMS开关的机电开关体10具有第一可动电极14和第二可动电极16，第一可动电极14和第二可动电极16的两端由形成在硅基板2上的第一锚固件12和第二锚固件13固定和安装，以及与这些可动电极相对的固定电极18。由低电压驱动的第一机电开关22由相对较弱的弹簧力的第一可移动电极14和固定电极18组成。通过构成第二机电开关24，其能够通过低电压驱动而从第二可移动电极16中闩锁相对较强的弹簧力和固定电极18，第一可动电极14通过低驱动电压高速移位，并且第一机电开关以高速接通。第二可动电极16通过恢复力而高速地进行自然振动，第二机电开关高速关断，并通过低驱动电压使返回的第二可动电极16锁定，并将第二机电开关。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP3709847B2 Electrostatic actuator 有权
公开(公告)号：JP3709847B2
公开(公告)日：2005-10-26
申请号：JP2002014759
申请日：2002-01-23
申请人：株式会社村田製作所
发明人：浩史川合
IPC分类号： B81B3/00 , F16H49/00 , H01H59/00 , H02N1/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01H2001/0078 , H01H2059/0063

5. 发明专利

JP2005209625A Micro electronic mechanical system switch 审中-公开
标题翻译：微电子机械系统开关
公开(公告)号：JP2005209625A
公开(公告)日：2005-08-04
申请号：JP2004353010
申请日：2004-12-06
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： HASHIMURA AKINORI , NAITO YASUYUKI , NAKAMURA KUNIHIKO , NAKANISHI YOSHITO
IPC分类号： B81B3/00 , H01H59/00
CPC分类号： H01H59/0009 , H01H2001/0078
摘要： PROBLEM TO BE SOLVED: To provide a MEMS switch which is easy and delicate to manufacture and in which a sufficient ON/OFF electrostatic capacity variation ratio can be obtained.
SOLUTION: This is the MEMS switch which comprises a substrate 46, a conductive beam 42 formed on the surface of the substrate, and a three-layer structural beams B1, B2 which are formed on the surface of the substrate and arranged at a position opposed to the conductive beam. The three-layer structural beam includes first conductive layers 38, 40, second conductive layers 30, 32, and dielectric layers 34, 36 interposed between the first conductive layers and the second conductive layers. The first conductive layers are opposed to the conductive beam 42 and at least one of the conductive beam 42 and the three-layer structural beam is displaced by electrostatic force on the surface parallel to the substrate 46, and the conductive beam 42 and the first electrodes 38, 40 can contact. When the conductive beam 42 and the first conductive layers contact, a conductive passage is formed between the conductive beam 42 and the second conductive layers 30, 32.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种易于精细制造并且可以获得足够的开/关静电容量变化率的MEMS开关。解决方案：这是MEMS开关，其包括基板46，形成在基板的表面上的导电梁42和形成在基板的表面上并布置在其上的三层结构梁B1，B2 与导电束相对的位置。三层结构梁包括插在第一导电层和第二导电层之间的第一导电层38,40，第二导电层30,32和电介质层34,36。第一导电层与导电束42相对，并且导电束42和三层结构光束中的至少一个在平行于衬底46的表面上被静电力移位，并且导电束42和第一电极 38，40可以联系。当导电束42和第一导电层接触时，在导电束42和第二导电层30,32之间形成导电通道。（C）2005，JPO和NCIPI

6. 发明专利

JP2003071798A Micromechanical device and its manufacturing method 有权
标题翻译：微机械及其制造方法
公开(公告)号：JP2003071798A
公开(公告)日：2003-03-12
申请号：JP2001261999
申请日：2001-08-30
申请人： Toshiba Corp , 株式会社東芝
发明人： FUNAKI HIDEYUKI
IPC分类号： B81B3/00 , B81C1/00 , G02B26/00 , H01H13/80 , H01H59/00 , H03H3/007 , H03H9/24 , H03H9/46
CPC分类号： H03H9/462 , B81B3/0021 , B81B2201/016 , B81B2201/0271 , B81B2203/0109 , B81B2203/051 , H01H13/80 , H01H59/0009 , H01H2001/0078 , H01H2201/008 , H03H3/0072
摘要： PROBLEM TO BE SOLVED: To provide a micromechanical device provided with a high performance characteristic by a simple structure and process.
SOLUTION: At least a pair of adjacently arranged beams 11 is formed with a predetermined gap on a silicon substrate 10 by surface micromachine technique. Both end parts of the beams 11 are used as anchor parts 12 fixed to the substrate 10, and movable contacts 13 are formed in center parts. Driving electrodes 14 fixed to the substrate 10 are formed concurrently with the beams 11 between the beams 11. By applying a voltage to the driving electrodes 14, the beams 11 arranged on both sides of them are displaced in a direction parallel with the substrate 10, and the movable contacts 13 contact.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：通过简单的结构和工艺提供具有高性能特性的微机械装置。解决方案：通过表面微加工技术，在硅衬底10上至少形成一对相邻布置的梁11，其中预定间隙具有预定的间隙。梁11的两个端部用作固定到基板10上的固定部分12，并且活动触头13形成在中心部分。固定到基板10的驱动电极14与梁11之间的梁11同时形成。通过向驱动电极14施加电压，布置在驱动电极14的两侧的光束11沿与基板10平行的方向移位，并且可动触头13接触。

7. 发明专利

JP2015123511A 電子デバイス、ヒューズ及び電子機器审中-公开
标题翻译：电子设备，保险丝和电子设备
公开(公告)号：JP2015123511A
公开(公告)日：2015-07-06
申请号：JP2013267429
申请日：2013-12-25
申请人：ソニー株式会社
发明人：橋本光生 , 秋葉朗 , 新倉英生 , 三谷諭司 , 盛田伸也 , 猿田訓彦
IPC分类号： B81B7/02 , B81B3/00
CPC分类号： H01H85/463 , H01H1/0036 , H01H2001/0078 , H01H2085/0275
摘要：【課題】ヒューズの作製又は破断をより容易に行うことが可能となる。【解決手段】少なくとも基板材の一部を含んで形成される第1の部材と、少なくとも前記基板材の一部を含んで形成され前記第1の部材に対して相対的に移動可能な第2の部材と、少なくとも前記基板材の一部を含んで形成され、前記基板材を介して前記第1の部材と前記第2の部材とを電気的に接続するヒューズと、を備える、電子デバイスを提供する。【選択図】図2
摘要翻译：要解决的问题：使得可以更容易地制造或断裂保险丝。解决方案：提供一种电子装置，其包括形成为包括至少一部分基板材料的第一构件，形成为至少包括所述衬底材料的一部分并且被配置为相对于所述第一构件相对移动;以及熔丝，其构造成包括所述衬底材料的至少一部分并且被配置为经由所述衬底材料将所述第一构件电连接到所述第二构件。

8. 发明专利

JP5720485B2 電子部品有权
公开(公告)号：JP5720485B2
公开(公告)日：2015-05-20
申请号：JP2011177341
申请日：2011-08-12
申请人：オムロン株式会社
发明人：佐野彰彦 , 藤原剛史 , 丸山英徳 , 積知範
IPC分类号： B81B7/02 , H01H59/00
CPC分类号： H01H59/0009 , B81C1/00238 , B81B2201/018 , B81B2207/012 , B81B2207/095 , B81C2203/035 , H01H2001/0078

9. 发明专利

JP5263203B2 Electrostatic relay 有权
公开(公告)号：JP5263203B2
公开(公告)日：2013-08-14
申请号：JP2010055556
申请日：2010-03-12
申请人：オムロン株式会社
发明人：貴弘増田 , 淳也山本
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H45/14 , H01H2001/0078 , H01H2221/036 , H01H2235/02 , H01H2239/008

10. 发明专利

JP5257383B2 Switch and a method for manufacturing the same, and relay 有权
公开(公告)号：JP5257383B2
公开(公告)日：2013-08-07
申请号：JP2010053056
申请日：2010-03-10
申请人：オムロン株式会社
发明人：健一日沼 , 隆志藤澤 , 剛史藤原 , 貴弘増田 , 直毅吉武 , 淳也山本
IPC分类号： H01H1/06 , H01H11/04 , H01H50/54 , H01H59/00
CPC分类号： H01H1/0036 , H01H1/06 , H01H3/001 , H01H59/0009 , H01H2001/0078

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