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    • 2. 发明专利
    • Stage device
    • 舞台设备
    • JP2009071178A
    • 2009-04-02
    • JP2007239901
    • 2007-09-14
    • Sumitomo Heavy Ind Ltd住友重機械工業株式会社
    • NAKAJIMA RYUTAMASHITA HIDEHIKO
    • H01L21/027G05D3/00G12B5/00
    • G03F7/709G03F7/70725G05B19/232G05B19/404G05B2219/37517G05B2219/41117G05B2219/41148H01L21/682
    • PROBLEM TO BE SOLVED: To suppress vibration of a second table supported on a first table which is movable in one horizontal direction. SOLUTION: The device 1 includes: an XY-axis table 2 movable in the X direction; a Z-axis table 4 supported by a supporting device 3 above the XY-axis table 2; a pair of scales 10a, 10b arranged spaced apart in the X direction from each other for detecting a Z-directional velocity of the Z-axis table 4; a pair of motors 11a, 11b arranged spaced apart in the X direction from each other for driving the Z-axis table 4 in the vertical direction; and a controller 12 for controlling drive of the motors 11a, 11b based on a detected Z-directional velocity. The stage device 1 performs processes of: detecting the Z-directional velocity by the scales 10a, 10b to make out a pitching vibration behavior of the Z-axis table 4; and driving the motors 11a, 11b to rotate the Z-axis table 4 in the pitching direction P so as to compensate for the pitching vibration. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:抑制支撑在可沿一个水平方向移动的第一工作台上的第二工作台的振动。 解决方案:装置1包括:可沿X方向移动的XY轴台2; 由XY轴台2上方的支撑装置3支撑的Z轴台4; 布置在X方向上彼此间隔开的用于检测Z轴台4的Z方向速度的一对标尺10a,10b; 一对电动机11a,11b,其彼此沿X方向间隔设置,用于沿垂直方向驱动Z轴台4; 以及用于基于检测到的Z方向速度来控制电动机11a,11b的驱动的控制器12。 舞台装置1执行以下步骤:通过刻度尺10a,10b检测Z方向速度,以产生Z轴台4的俯仰振动特性; 驱动马达11a,11b,使Z轴台4在俯仰方向P上旋转,以补偿俯仰振动。 版权所有(C)2009,JPO&INPIT
    • 3. 发明专利
    • Voltage control method for actuator
    • 执行器电压控制方法
    • JP2008211904A
    • 2008-09-11
    • JP2007045921
    • 2007-02-26
    • International Manufacturing & Engineering Services Co Ltd株式会社アイメス
    • ONO HIROYUKIHISANO TEIJI
    • H02P29/00
    • G05B13/044G05B2219/41117G05B2219/41337G05B2219/41355
    • PROBLEM TO BE SOLVED: To provide a voltage control method for an actuator capable of enhancing positioning accuracy by greatly improving acceleration disturbance removal performance in DC voltage-driving of a DC drive source. SOLUTION: This voltage control method for controlling a voltage source for voltage-driving the DC motor of an actuator by a controller, includes: a step for expressing the actuator in a transfer function including the inductance, resistance and counter electromotive force of the coil of the DC motor to compensate for the gain of the inductance, resistance and counter electromotive force with the transfer function; and a step for controlling the voltage drive source of the DC motor by a control signal to which the compensated gain is applied. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种能够通过大大提高直流驱动源的直流电压驱动中的加速度干扰去除性能来提高定位精度的致动器的电压控制方法。 解决方案:用于控制通过控制器对致动器的直流电动机进行电压驱动的电压源的电压控制方法包括:用于将致动器表达在传递函数中的步骤,包括电感,电阻和反电动势 直流电机的线圈补偿电感,电阻和反电动势的增益与传递函数; 以及通过施加了补偿增益的控制信号来控制DC电动机的电压驱动源的步骤。 版权所有(C)2008,JPO&INPIT
    • 7. 发明专利
    • Servo controller
    • 伺服控制器
    • JP2011003137A
    • 2011-01-06
    • JP2009147730
    • 2009-06-22
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • TAKEUCHI KATSUYOSHIYAMAMOTO HIDEAKI
    • G05D3/12G05B19/404G05D3/00H02P29/00
    • G05B19/404G05B2219/41117G05B2219/41128
    • PROBLEM TO BE SOLVED: To provide a servo controller that improves accuracy of position control.SOLUTION: The servo controller is applied to a numerical control apparatus including: a screw feeding part for converting rotary motion of a motor into linear motion; a driven part linearly moved by the screw feeding part; and a support body for supporting the screw feeding part and the driven part. The servo controller controls the motor such that a position of the driven part is aligned with a position instruction. The servo controller includes a support body reaction force compensation part 311 compensating vibration of the driven part by vibration reaction force of the support body, and a rigidity item of the driven part is included in a transfer function of the support body reaction force compensation part 311.
    • 要解决的问题:提供一种提高位置控制精度的伺服控制器。解决方案:伺服控制器应用于数控设备,包括:用于将电机的旋转运动转换成直线运动的螺旋进给部; 被驱动部分由螺杆进给部线性地移动; 以及用于支撑螺旋进给部和被驱动部的支撑体。 伺服控制器控制电动机,使得被驱动部件的位置与位置指令对齐。 伺服控制器包括支撑体反作用力补偿部311,其通过支撑体的振动反作用力补偿被驱动部的振动,并且被驱动部的刚性项包括在支撑体反作用力补偿部311的传递函数中 。