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    • 7. 发明专利
    • Capacitance type physical quantity sensor
    • 电容式物理量传感器
    • JP2014016341A
    • 2014-01-30
    • JP2013103188
    • 2013-05-15
    • Denso Corp株式会社デンソー
    • OGAWA AKIRA
    • G01P15/125H01L29/84
    • G01P15/135G01C19/5747G01P15/0802G01P15/125G01P15/13G01P15/18G01P2015/0882
    • PROBLEM TO BE SOLVED: To provide a capacitance type physical quantity sensor of which the reduction in detection accuracy of a physical quantity is suppressed by attitudinal control.SOLUTION: The capacitance type physical quantity sensor includes an anchor (30), a detection beam (20) connected to a substrate via the anchor, a weight part (17) connected to the detection beam, a movable electrode (18) formed on the weight part, and a fixed electrode (19) facing the movable electrode. A first movable detection electrode and a first fixed detection electrode face each other in a first y direction, and a second movable detection electrode and a second fixed detection electrode face each other in a second y direction, and a first movable damping electrode is located at the center between two first fixed damping electrodes and faces one first fixed damping electrode in the first y direction and faces the other first fixed damping electrode in the second y direction, and a plurality of first movable damping electrodes are located point-symmetrically with respect to a center (CP) of the weight part or line-symmetrically with respect to a center line (CL) passing the center and being in the y direction.
    • 要解决的问题:提供通过态度控制来抑制物理量的检测精度降低的电容式物理量传感器。解决方案:电容式物理量传感器包括锚(30),检测光束(20) ),连接到所述检测光束的重量部分(17),形成在所述重物部分上的可动电极(18)和面对所述可动电极的固定电极(19)。 第一移动检测电极和第一固定检测电极在第一y方向上彼此面对,第二可移动检测电极和第二固定检测电极在第二y方向上彼此面对,并且第一可动阻尼电极位于 两个第一固定阻尼电极之间的中心,并且在第一y方向上面向一个第一固定阻尼电极,并且在第二y方向上面对另一个第一固定阻尼电极,并且多个第一可动阻尼电极相对于 重量部分的中心(CP)或相对于通过中心并在y方向上的中心线(CL)线对称的中心(CP)。
    • 9. 发明专利
    • Method and device for detecting state of motion
    • 用于检测运动状态的方法和装置
    • JP2011164047A
    • 2011-08-25
    • JP2010029844
    • 2010-02-15
    • Seiko Epson Corpセイコーエプソン株式会社
    • YAMADA HIDEAKINAGAISHI MICHIHIRO
    • G01P15/135A61B5/11G01P3/44
    • G01P15/135G01P13/00
    • PROBLEM TO BE SOLVED: To develop a sensor which is used in place of a conventional acceleration sensor or angular velocity sensor and consumes little power. SOLUTION: The sensor includes electrodes in a pair which are disposed in opposition and in a fixed mutual positional relation and a movable spherical conductor which is present between the paired electrodes and puts them in either a conductive state or a non-conductive state. Using the sensor, a first level value and a second level value determined by a rate of occupation by the time of the conductive state in a unit time are calculated. When a first detected value based on the square sum of the first level value is a first prescribed value or below, the first detected value is made a measured value, and when the first detected value exceeds the first prescribed value, a second detected value based on the square sum of the second level value is made the measured value. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:开发用于代替常规加速度传感器或角速度传感器并且消耗很少功率的传感器。 解决方案:传感器包括一对相对设置并且具有固定的相互位置关系的电极和位于成对电极之间的可移动球形导体,并将它们置于导电状态或非导通状态 。 使用传感器,计算在单位时间内由导通状态的时间由占用率确定的第一电平值和第二电平值。 当基于第一电平值的平方和的第一检测值是第一规定值以下时,将第一检测值作为测量值,并且当第一检测值超过第一规定值时,基于第二检测值 对二级值的平方和作为测量值。 版权所有(C)2011,JPO&INPIT