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    • 6. 发明专利
    • Package for housing optical component
    • 住房光学元件的包装
    • JP2006145610A
    • 2006-06-08
    • JP2004331855
    • 2004-11-16
    • Shinko Electric Ind Co Ltd新光電気工業株式会社
    • ODA TAKUYAOHASHI TATSUSUKE
    • G02B26/08H01L23/02
    • B81B7/0051B81C2203/0109B81C2203/0145
    • PROBLEM TO BE SOLVED: To make it possible for a package for housing an optical component to mount the optical component therein with sufficient airtightness by securing flatness of a flange part of a metallic cap in bonding the metallic cap to a package body by seam welding even when chips of the optical component and the metallic cap are upsized.
      SOLUTION: In the package for housing the optical component provided with a substrate (10) having a component mounting part where the optical component (12) is mounted on the upper surface, a metallic frame (30) fixed on the upper surface of the substrate around the component mounting part, and the metallic cap (40) which keeps a glass window (24) airtight in the center part and has a flange part (44) bonded to the metallic frame at its periphery by thermo-compression bonding, and which airtightly houses the optical component inside, the flange part (44) of the metallic cap (40) comprises a stress absorbing part (46) inside the part bonded to the metallic frame (30).
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了使得用于容纳光学部件的包装件可以通过固定金属盖的凸缘部分的平坦度来将金属盖接合到包装体的方式将包含主体的光学部件安装在其中以具有足够的气密性 即使当光学部件和金属盖的芯片变大时,也可进行缝焊。 解决方案:在用于容纳设置有基板(10)的光学部件的封装中,所述基板具有安装在上表面上的光学部件(12)的部件安装部,固定在上表面上的金属框架(30) 和金属盖(40),其将玻璃窗(24)气密地保持在中心部分,并且具有通过热压粘合在其周边处接合到金属框架的凸缘部分(44) ,并且其内部密封地容纳光学部件,金属盖(40)的凸缘部(44)包括在与金属框架(30)接合的部分内的应力吸收部(46)。 版权所有(C)2006,JPO&NCIPI
    • 7. 发明专利
    • Piezoelectric vibrator, and manufacturing method thereof
    • 压电振动器及其制造方法
    • JP2008193581A
    • 2008-08-21
    • JP2007028045
    • 2007-02-07
    • Epson Toyocom Corpエプソントヨコム株式会社
    • ISHIKAWA KAZUOTONEGAWA YUKIHIROHARA AKITOSHI
    • H03H9/02H01L23/02H03H3/02
    • B81B7/0051
    • PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator and a manufacturing method thereof such that a lid is prevented from breaking and/or cracking and the lid and a package are joined with a small width to prevent a wax material from spreading.
      SOLUTION: A piezoelectric vibrator has a bottom portion 62 where a piezoelectric vibration chip 1 is fixed and a frame wall portion 64 enclosing the bottom portion 62, and has the package 60 having an opening above the bottom portion 62. The lid 72 overlaps the bottom portion 62 and frame wall portion 64 to close the opening of the package 60. The wax material 78 is interposed between an upper end surface 66 of the frame wall portion 64 and the lid 72 to join the frame wall portion 64 and lid 72. The upper end surface 66 is made of metal. The lid 72 is characterized in that at least portion of a region 82 opposed to the upper end surface 66 is made of metal and a leak prevention region 80 which comprises a surface made of oxide or an organic substance and one of frame-shaped projection and recess surfaces made of metal and prevents wet spreading of a fused solder material 78 is formed on a sealing space side inside at least the opposed region 82.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 解决的问题:提供一种压电振动器及其制造方法,以防止盖子破裂和/或破裂,并且盖子和包装件以小的宽度接合以防止蜡材料扩散。 解决方案:压电振动器具有固定有压电振动芯片1的底部62和封闭底部62的框架壁部64,并且具有在底部62上方的开口的封装60。盖72 与底部62和框架壁部分64重叠以封闭包装件60的开口。蜡材料78介于框架壁部分64的上端表面66和盖子72之间,以将框架壁部分64和盖子 上端面66由金属制成。 盖72的特征在于,与上端面66相对的区域82的至少一部分由金属制成,防漏区域80包括由氧化物或有机物质构成的表面和框状突起之一, 至少在相对区域82内的密封空间侧形成由金属制成的凹陷表面并防止熔融焊料78的湿扩展。(C)2008,JPO&INPIT
    • 8. 发明专利
    • Mems element package and its manufacturing method
    • MEMS元件封装及其制造方法
    • JP2006247833A
    • 2006-09-21
    • JP2006060445
    • 2006-03-07
    • Samsung Electronics Co Ltd三星電子株式会社Samsung Electronics Co.,Ltd.
    • KIM JONG-SEOKKIM DUCK-HWANNAM KUANG-WOOPARK YUN-KWONYUN SEOK-CHULCHOA SUNG-HOONSO INSO
    • B81B3/00H01L23/02
    • B81B7/0051B81B7/007
    • PROBLEM TO BE SOLVED: To provide MEMS (micro-electro mechanical system) element package having stable action and high reliability.
      SOLUTION: The MEMS element package includes an element substrate 100 formed with MEMS active element 100 on one surface; a multiple sealing pad 200 for providing an electric route of the MEMS active element and surrounding the MEMS active element in multiple in order to protect the MEMS active element from the outside; a cap substrate 300 bonded to the element substrate through the multiple sealing pad and formed with a via hole 320 at a trench 310 where the MEMS active element is positioned and a portion where the multiple sealing pad is positioned; and an external electrode pad 400 formed on one surface of the cap substrate so as to form electrical connection with the multiple sealing pad through the via hole.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供具有稳定动作和高可靠性的MEMS(微机电系统)元件封装。 解决方案:MEMS元件封装包括在一个表面上形成有MEMS有源元件100的元件基板100; 用于提供MEMS有源元件的电路径并围绕MEMS有源元件多个的多重密封垫200,以便将MEMS有源元件从外部保护; 盖基板300通过多个密封垫接合到元件基板,并在MEMS活性元件所在的沟槽310处形成有通孔320和多个密封垫所在的部分; 以及形成在盖基板的一个表面上以通过通孔与多个密封垫形成电连接的外部电极焊盘400。 版权所有(C)2006,JPO&NCIPI
    • 10. 发明专利
    • Acceleration sensor
    • 加速传感器
    • JP2005077349A
    • 2005-03-24
    • JP2003311066
    • 2003-09-03
    • Mitsubishi Electric Corp三菱電機株式会社
    • YAMAGUCHI YASUONAKAMURA KUNIHIRO
    • B81B7/00G01P1/02G01P15/08G01P15/125H01L29/84
    • B81B7/0051B81B2201/0235B81C2203/0109G01P1/026G01P15/0802G01P15/125G01P2015/0814
    • PROBLEM TO BE SOLVED: To attain a miniaturization of a dimension of an acceleration sensor concerning a direction of a semiconductor substrate major face by inhibiting a propagation of a crack by an external force.
      SOLUTION: The acceleration sensor 2 comprises the semiconductor substrate 6, a frame 8 surrounding the acceleration sensor element 3 and the acceleration sensor element 3 which are arranged on the semiconductor substrate 6, the intermediate layers 34, 36 arranged on the frame 8, and a cap 5 which performs a sealing of the acceleration sensor element 3 connecting with the intermediate layers 34, 36. In each of the frame 8 and the intermediate layers 34, 36, a frame-like groove is formed nearly the same position relating to the major face of the semiconductor substrate 6. Therefore, the frame-like groove 38 is prepared as a whole.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:通过抑制由外力引起的裂纹的传播,来实现关于半导体衬底主面的方向的加速度传感器的尺寸的小型化。 解决方案:加速度传感器2包括半导体基板6,围绕加速度传感器元件3的框架8和布置在半导体基板6上的加速度传感器元件3,布置在框架8上的中间层34,36 以及进行与中间层34,36连接的加速度传感器元件3的密封的盖5.在框架8和中间层34,36中的每一个中,框状的槽形成为几乎相同的位置 到半导体基板6的主面。因此,整体地制作框状槽38。 版权所有(C)2005,JPO&NCIPI