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    • 3. 发明专利
    • Patterned microparticle film and method for producing patterned microparticle film
    • 图案微阵列薄膜及其制作方法
    • JP2008222788A
    • 2008-09-25
    • JP2007060548
    • 2007-03-09
    • Kagawa Univ国立大学法人 香川大学
    • OGAWA KAZUFUMI
    • C09D201/00B01J19/00B01J19/12B05D3/00C09D7/12C09D183/00
    • C07F7/0801B01J2219/00612B01J2219/00626B01J2219/00637B05D1/185B05D3/061B05D7/52B05D7/56B05D2203/35B82Y30/00B82Y40/00C08K3/08C08K5/5435C08K9/06C09D4/00C09D7/1225C09D7/62C09D183/06G03F7/165G03F7/265Y10T428/24802C08G77/14
    • PROBLEM TO BE SOLVED: To obtain a patterned monolayer microparticle film prepared by forming only one layer of microparticles arranged in a pattern on the surface of an arbitrary substrate without detriment to the inherent function of the microparticles, to provide a patterned microparticle film prepared by laminating a plurality of such layers on the surface, and to provide methods for producing them. SOLUTION: The patterned microparticle film 1 or 3 is composed of a substrate 14 coated with a patterned coating film formed from a first film compound having a first functional group and either one microparticle layer which is composed of arranged reactive microparticles 42 coated with a coating film formed from a first coupling agent having a first coupling group forming a bond by coupling with the first functional group and is bound and immobilized on the surface of the substrate 14 through the bond formed by the coupling or a plurality of layers, bound and immobilized on the substrate, which alternatingly include at least one layer of microparticles 34 coated with a coating film formed from a film compound reactive with the first coupling group and at least one layer of the microparticles 42. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了获得通过在任意基板的表面上仅形成图案布置的一层微粒而不损害微粒的固有功能而制备的图案化单层微粒膜,以提供图案化微粒膜 通过在表面上层叠多个这样的层而制备,并提供其制造方法。 解决方案:图案化微粒膜1或3由涂覆有由具有第一官能团的第一膜化合物形成的图案化涂膜的基板14和由涂布有第一官能团的布置的反应性微粒42组成的一个微粒层 由具有第一偶联基团的第一偶联剂形成的涂膜,所述第一偶联剂通过与第一官能团结合而形成键,并且通过由所述键合或多个层形成的键被结合并固定在基板14的表面上, 并固定在基板上,其交替地包括涂覆有由与第一偶联基团反应的膜化合物形成的涂层的至少一层微粒34和至少一层微粒42.版权所有(C) 2008年,JPO&INPIT
    • 10. 发明专利
    • Method and device for vapor growth
    • 用于蒸气生长的方法和装置
    • JPS6179771A
    • 1986-04-23
    • JP20123084
    • 1984-09-26
    • Applied Material Japan Kk
    • MAEDA KAZUOTOKUMASU TOKUFUKUYAMA TOSHIHIKOHIRATA TSUGUAKI
    • C23C16/44B05D3/06B05D7/24C23C16/442C23C16/455C23C16/46C23C16/48C30B25/10C30B25/14
    • C23C16/45504B05D1/60B05D3/061C23C16/455C23C16/482C23C16/487C23C16/488C30B25/105C30B25/14
    • PURPOSE:To prevent generation of particles on the film formed on a surface of a substrate by running parallel a reactive gas on the surface of a substrate and running gaseous N2 of the same temp. in parallel with the reactive gas in the upper part of the reactive gas flow in a vapor reaction device. CONSTITUTION:A wafer 22 is imposed on a hot plate 20 and is heated up to a reaction temp. The SiH4-O2 or SiH4-PH3-O2 reactive gas is preliminarily heated up to about the reaction temp. by a heating coil 34 in a gas supply pipe 32 and is ejected from the many small holes 28 of a reactive gas supply nozzle 24 provided in the upper part thereof so as to flow in a belt shape along the surface of the wafer 22, thereby forming an SiO2 film or PSG film on the wafer 22 surface. The preheated gaseous N2 is ejected from a nozzle 28 above the reactive gas flow so as to flow in parallel with the reactive gas. The resultant product of reaction formed in the reactive gas is drifted by the parallel gaseous flow without falling onto the wafer 22 and without generating particles. A reaction chamber is not always required as there is the gaseous N2 and the vapor reaction device is simplified.
    • 目的:为了防止在衬底表面上形成的膜上产生颗粒,该反应气体平行于衬底表面并运行相同温度的气态N 2。 与蒸汽反应装置中的反应气体流的上部中的反应气体平行。 构成:将晶片22施加在热板20上并加热至反应温度。 将SiH4-O2或SiH4-PH3-O2反应气体预先加热至约反应温度。 通过气体供给管32中的加热线圈34,从设置在其上部的反应性气体供给喷嘴24的许多小孔28喷出,沿着晶片22的表面沿带状流动, 在晶片22表面上形成SiO 2膜或PSG膜。 预热的气态N 2从反应气流上方的喷嘴28喷出,以与反应气体平行流动。 在反应气体中形成的反应产生的产物通过平行的气流漂移而不会落在晶片22上而不产生颗粒。 由于有气态N 2并且蒸气反应装置被简化,反应室并不总是需要的。