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    • 3. 发明专利
    • Method and device for solid-liquid separation
    • 用于固体液相分离的方法和装置
    • JP2010064071A
    • 2010-03-25
    • JP2009212356
    • 2009-09-14
    • Albert Baehrベアー アルベルト
    • BAEHR ALBERT
    • B01D36/02B01D29/09B01D29/62B01D33/06
    • B01D25/1275B01D25/172B01D25/285B01D25/287B01D25/30B01D25/32B01D2201/202
    • PROBLEM TO BE SOLVED: To provide a completely new method for solid-liquid separation, and a device suited for performing this method. SOLUTION: A method for separating a mixture and suspension into solid and liquid is disclosed wherein the mixture is fed to a chamber 2 closed in a pressurized state, the chamber is provided with at least one filter face 14, and hydrostatic pressure is generated in the chamber promoting the liquid phase separation. After the liquid phase separation, the chamber is opened, and the filter face is removed from the chamber together with filter cake. The mixture is first treated with the hydrostatic pressure of maximum about 0.2 bars, and 80-90% of a feed amount is removed as the filtrate. Next, concentration residue is taken out and treated at a pressure maximum 5 bars in a closed chamber 8. By reducing the volume of the chamber, the concentration residue is finally separated at a pressure of maximum 50 bars. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:为了提供一种全新的固液分离方法,以及适用于该方法的装置。 公开了一种将混合物和悬浮液分离成固体和液体的方法,其中将混合物进料到在加压状态下封闭的室2中,该室具有至少一个过滤面14,静水压力为 在室内产生促进液相分离。 液相分离后,打开腔室,滤饼与滤饼一起从室中取出。 首先用最大约0.2巴的流体静力学压力处理该混合物,并且作为滤液除去80-90%的进料量。 接下来,取出浓缩残余物并在封闭室8中以最大5巴的压力进行处理。通过减小室的体积,最终在最大50巴的压力下分离浓缩残余物。 版权所有(C)2010,JPO&INPIT
    • 5. 发明专利
    • Processing liquid supply method, processing liquid supply device and storage medium
    • 处理液体供应方法,处理液体供应装置和储存介质
    • JP2014078562A
    • 2014-05-01
    • JP2012224331
    • 2012-10-09
    • Tokyo Electron Ltd東京エレクトロン株式会社
    • YOSHIDA YUICHINAITO RYOICHIROKOSHO TOMONOBU
    • H01L21/027B05C11/08B05C11/10B05D3/00H01L21/304
    • B01D36/001B01D19/0036B01D37/046B01D2201/202B01D2201/204B01D2221/14C02F1/20C02F2103/346C02F2209/03F04B53/20G03C2001/7437
    • PROBLEM TO BE SOLVED: To provide a technology for reducing a processing liquid to be consumed for removing air bubbles from a filter part when a novel filter part is mounted in a processing liquid supply path, and shortening a startup time.SOLUTION: A processing liquid supply method includes the steps of: filling the inside of a novel filter part with a processing liquid; then making the inside of the filter part into a first pressure atmosphere which is a negative pressure atmosphere, in order to remove air bubbles from the filter part; then boosting the inside of the filter part; conducting the processing liquid from a primary side of the filter part to the filter part thereafter while making a secondary side of the filter part into a second pressure atmosphere higher than the first pressure atmosphere; and performing liquid processing by supplying the processing liquid which has been conducted through the filter part, through a nozzle to an object to be processed. Thus, air bubbles can be speedily removed.
    • 要解决的问题:提供一种当将新型过滤器部件安装在处理液体供应路径中时减少用于从过滤器部分去除气泡的消耗处理液的技术,并且缩短启动时间。解决方案:处理液体 供给方法包括以下步骤:用处理液填充新型过滤器部件的内部; 然后使过滤器部分的内部进入作为负压气氛的第一压力气氛,以从过滤器部分除去气泡; 然后升压过滤器部件的内部; 在将过滤器部分的二次侧进入比第一压力气氛高的第二压力气氛的同时,将处理液从过滤器部分的初级侧引导到过滤器部分; 并且通过将已经通过过滤器部件进行的处理液通过喷嘴供给到被处理物体来进行液体处理。 因此,可以快速地除去气泡。