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1. 发明专利

JP2000241277A CAPACITIVE MICROFLOW SENSOR 失效
公开(公告)号：JP2000241277A
公开(公告)日：2000-09-08
申请号：JP4608299
申请日：1999-02-24
申请人： ZEXEL CORP
发明人： KANAI YOSHITAKA , MIZUNO JUN , OLIVER BERBERICH , KAI NOTTMAYER
IPC分类号： G01L9/12 , G01L13/06
摘要： PROBLEM TO BE SOLVED: To avoid standing of bubbles in a fluid within a sensor. SOLUTION: A first substrate 1 is provided with a detection electrode 16 while a second substrate 2 is provided with a boss part 4 oppositely to the detection electrode 16 and a measuring recess 3 is made around the boss part 4. The second substrate 2 is further provided with passages 6a, 6b interconnecting the measuring recess 3 and the outside so that a fluid can flow into the measuring recess 3 through the interconnecting passages 6a, 6b. Furthermore, bubble discharging passages 10a, 10b communicating the measuring recess 3 are provided substantially oppositely to the interconnecting passages 6a, 6b so that bubbles generated in the measuring recess 3 can be discharged to the outside through the bubble discharging passages 10a, 10b.

2. 发明专利

JPH11230760A SEMICONDUCTOR VIBRATION GYRO SENSOR 失效
公开(公告)号：JPH11230760A
公开(公告)日：1999-08-27
申请号：JP5005298
申请日：1998-02-17
申请人： ZEXEL CORP
发明人： AMEMORI MASANORI , MIZUNO JUN , KANAI YOSHITAKA , KAI NOTTMAYER
IPC分类号： G01C19/56 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To reduce consumption power and enable massproduction by applying Colioli's force due to angular velocity to a weight on a diaphragm, and detecting displacement of the diaphragm which is caused by the Colioli's force, as an electrostatic capacity. SOLUTION: A weight part 3 of a frame body 2 is provided with weights 10a-10d and arranged on a retaining plate member 4 whose bottom part is a diaphragm 12. An electrode part 5 formed in a bottom plate member 6 consists of driving electrodes 19, 20, angular velocity detecting electrodes 21, 22, etc. Each of the electrodes 19-21 are formed at positions almost facing the respective corresponding part positions of the diaphragm 12. When an AC signal as a driving signal is applied to the driving electrodes 19, 20, the weights 10a-10d are vibrated together with the diaphragm 12 by the action of an electrostatic force. In this state, when a rotating force acts around a Z axis, Colioli's force is generated in the weights 10a-10d, displacement of the diaphragm 12 is generated, and electrostatic capacities between the detecting electrodes 21, 22 and the corresponding diaphragm 12 are changed. An angular velocity around the Z axis can be measured from the absolute value of difference between the respective electrostatic capacity values of the detecting electrodes 21 and 22.

3. 发明专利

JP2000081448A METHOD FOR DETECTING BASIC INFORMATION ABOUT MOVING BODY AND MULTIPLE SENSOR FOR BASIC INFORMATION ABOUT MOVING BODY 失效
公开(公告)号：JP2000081448A
公开(公告)日：2000-03-21
申请号：JP4570699
申请日：1999-02-24
申请人： ZEXEL CORP
发明人： MIZUNO JUN , KAI NOTTMAYER , AMEMORI MASANORI
IPC分类号： G01P15/125 , G01P15/00 , G01P15/18
摘要： PROBLEM TO BE SOLVED: To provide a sensor capable of detecting accelerations, angular velocities, and angular accelerations and suited for mass-production. SOLUTION: A multiple sensor S for basic information about a moving body includes first and second g-ω sensors 50, 51 having basically the same constitution. The first and second g-ωsensors 50, 51 are placed on a board 52 in such a way that their respective torsion bars extend along a vertical direction and that imaginary straight lines passing through the centers of the g-ωsensors 50, 51 orthogonally intersect in a direction perpendicular to the torsion bars. By comparing electrostatic capacity outputs from the sensors 50, 51, the directions and magnitudes of acceleration, angular velocity, and angular acceleration that work on a vehicle M can be detected.

4. 发明专利

JP2000035437A MANUFACTURE OF CAPACITANCE TYPE MICROFLOW SENSOR 失效
公开(公告)号：JP2000035437A
公开(公告)日：2000-02-02
申请号：JP21866898
申请日：1998-07-17
申请人： ZEXEL CORP
发明人： KANAI YOSHITAKA , AMEMORI MASANORI , MIZUNO JUN , OLIVER BERBERICH , KAI NOTTMAYER
IPC分类号： G01P5/08 , G01F1/56 , H01L21/306
摘要： PROBLEM TO BE SOLVED: To etch silicon with no erosion of an electrode so as to improve reliability. SOLUTION: Before a second silicon layer 31b is etched so that a recessed part 42a, i.e., a measurement recessed part, and the like are formed, a silicon oxide film 31a in parts 37a, 37b is etched so as to be thinned by a prescribed thickness. Then, the second silicon layer 31b is etched so that the part 42a and the like are formed (FIG. (A)). Next, the silicon oxide film 31a in the parts 37a, 37b is removed (FIG. (B)), and then, a ground electrode 20 and the like is formed by deposition (FIG. (C)).

5. 发明专利

JPH11336644A FLUID INJECTION VALVE 失效
公开(公告)号：JPH11336644A
公开(公告)日：1999-12-07
申请号：JP15849498
申请日：1998-05-22
申请人： ZEXEL CORP
发明人： KAI NOTTMAYER
IPC分类号： F02M61/10 , F02M61/08 , F02M61/18
摘要： PROBLEM TO BE SOLVED: To improve productivity and injection efficiency by mass production adopting micromachining technique. SOLUTION: In this injection valve, a needle 7 and a nozzle hole communication passage 8 are prepared by laminating first to fourth nozzle members 11 to 14 composed of silicon substrates. When fluid is flowed, the needle 7 is displaced. The fluid is lead from the nozzle communication passage 8 to a nozzle hole 22 through a circular passage formed around the needle 7 by the displacement of the needle 7, and injected from the nozzle hole 22.

6. 发明专利

JPH11304563A COMPOSITE FLOW SENSOR 失效
公开(公告)号：JPH11304563A
公开(公告)日：1999-11-05
申请号：JP12273798
申请日：1998-04-17
申请人： ZEXEL CORP
发明人： KAI NOTTMAYER , OLIVER BERBERICH , KANAI YOSHITAKA , AMEMORI MASANORI , MIZUNO JUN
IPC分类号： G01F1/86
摘要： PROBLEM TO BE SOLVED: To provide a sensor by which the dynamic pressure, differential pressure and temperature can be measured. SOLUTION: An electrode 25 for measuring dynamic pressure faces a first boss part 9 on a first diaphragm 8 through a gap. Since fluctuation of dynamic pressure causes displacement of the first diaphragm 8 and the first boss part 9, it can be determined as the capacity fluctuation of a capacitor comprising the electrode 25 for measuring dynamic pressure and the first boss part 9. On the other hand, fluctuation of differential pressure can be determined as the capacity fluctuation of a capacitor comprising an electrode 26 for measuring differential pressure and the second boss part 16. Furthermore, a temperature sensor 3 comprising a resistor is provided and thereby dynamic pressure, differential pressure and temperature can be measured at one point.

7. 发明专利

JPH11303712A FLUID INJECTION VALVE 失效
公开(公告)号：JPH11303712A
公开(公告)日：1999-11-02
申请号：JP12809098
申请日：1998-04-23
申请人： ZEXEL CORP
发明人： KAI NOTTMAYER , OLIVER BERBERICH
IPC分类号： F02M61/08 , F02M61/16 , F02M61/18 , H01L21/302
摘要： PROBLEM TO BE SOLVED: To provide a fluid injection valve having good productivity and high injection efficiency. SOLUTION: Members 15, 16 for first/second nozzles are formed by using silicon, a needle 17 is provided so as to be supported on an elastic beam 18 in the member 15 for the first nozzle, on the other hand, a recessed part 22 having a seat part seated with the needle 17 through a seal 23 is formed in the member 16 for the second nozzle, and a through hole 21 for an inflow of fluid is drilled in a bottom part of the recessed part 22. When a fluid flows in, it flows in an annular passage 28 formed between the needle 17 and the recessed part 22 by displacing the needle 17, and the fluid is injected from an orifice formed between the elastic beams 18.

8. 发明专利

JPH1022514A HIGH SENSITIVE ACCELERATION SENSOR AND ITS MANUFACTURE 失效
公开(公告)号：JPH1022514A
公开(公告)日：1998-01-23
申请号：JP19164996
申请日：1996-07-03
申请人： ZEXEL CORP , ESASHI MASAKI
发明人： MIZUNO JUN , AMEMORI MASANORI , KAI NOTTMAYER , ESASHI MASAKI
IPC分类号： G01P15/125 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To form stably and surely a capacitor gap with the order of submicron in its length, by regulating the capacitance gap through the film thickness of the silicon oxide film formed on the opposite surface to the fixed electrode of the stopper of a capacitor. SOLUTION: When an acceleration acts on a sensitive acceleration sensor from its rear surface direction to its front surface direction, first and second moving weights 10a, 11a of a first sensor portion 4 and first and second moving weights 10b, 11b of a second sensor portion 5 are displaced respectively from its front surface direction to its rear surface direction by their inertial forces. Further, the first and the second moving weights 10a, 10b, 11a, 11b are displaced respectively to the places in which the deflection forces of supporting beams 2a, 2b, 13a, 13b and auxiliary supporting beams 16a, 16b, 17a, 17b are balanced respectively with the foregoing inertial forces. That is, since the capacitances of the capacitors C1-C4 are increased and the capacitances of the capacitors C5-C8 are decreased, both by the increases and decreases of the capacitances of the capacitors C1-C8 and by the magnitudes the direction and the magnitude of the acceleration can be detected and a comparably cheap high sensitive acceleration sensor can be obtained.

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