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1. 发明专利

JPH11214352A MANUFACTURE OF SEMICONDUCTOR DIAPHRAGM 失效
公开(公告)号：JPH11214352A
公开(公告)日：1999-08-06
申请号：JP2255498
申请日：1998-01-21
申请人： ZEXEL CORP
发明人： MIZUNO JUN , AMEMORI MASANORI , KANAI YOSHITAKA
IPC分类号： G01L9/04 , G01L9/00 , H01L21/306 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a highly versatile manufacturing method capable of uniformly manufacturing a thin film with high finish accuracy. SOLUTION: A monitoring window 3 with a depth which is equal to the film thickness of a desired diaphragm 2 is prepared in advance near a place at which the diaphragm 2 is formed. Then, etching is finished when and wet- etching is carried out for the both, light passes through the monitoring window 3, light which is radiated from an opposite side is received by a photosensitive element 21 and a specified alarm is obtained by an alarm circuit 22. Therefore, the diaphragm 2 with a desired film thickness can be obtained with high finish precision.

2. 发明专利

JPH11304563A COMPOSITE FLOW SENSOR 失效
公开(公告)号：JPH11304563A
公开(公告)日：1999-11-05
申请号：JP12273798
申请日：1998-04-17
申请人： ZEXEL CORP
发明人： KAI NOTTMAYER , OLIVER BERBERICH , KANAI YOSHITAKA , AMEMORI MASANORI , MIZUNO JUN
IPC分类号： G01F1/86
摘要： PROBLEM TO BE SOLVED: To provide a sensor by which the dynamic pressure, differential pressure and temperature can be measured. SOLUTION: An electrode 25 for measuring dynamic pressure faces a first boss part 9 on a first diaphragm 8 through a gap. Since fluctuation of dynamic pressure causes displacement of the first diaphragm 8 and the first boss part 9, it can be determined as the capacity fluctuation of a capacitor comprising the electrode 25 for measuring dynamic pressure and the first boss part 9. On the other hand, fluctuation of differential pressure can be determined as the capacity fluctuation of a capacitor comprising an electrode 26 for measuring differential pressure and the second boss part 16. Furthermore, a temperature sensor 3 comprising a resistor is provided and thereby dynamic pressure, differential pressure and temperature can be measured at one point.

3. 发明专利

JPH11101669A IMPELLER TYPE FLOW METER 失效
公开(公告)号：JPH11101669A
公开(公告)日：1999-04-13
申请号：JP26003997
申请日：1997-09-25
申请人： ZEXEL CORP
发明人： MAEHARA ISATO , AMEMORI MASANORI , IWASAKI TAKAO
IPC分类号： G01F1/06 , G01F1/08
摘要： PROBLEM TO BE SOLVED: To improve the flow rate measurement of a fluid by fitting an impeller to an impeller hold section so that the protruded quantity of the impeller protruded into a pipe, in which the fluid to be measured flows, becomes a half or smaller of the outer diameter of the impeller or a half or smaller of the inner diameter of an injection pipe. SOLUTION: An impeller 3 having multiple blade sections 2 is rotatably supported on a holder 4, which is an impeller hold section via a shaft 5 in the cylindrical injection pipe 1 of a fuel injection device so that its upper section is exposed in the injection pipe 1. The inner diameter of the injection pipe 1 is set to D, the distance (protruded quantity) from the wall face 1a on the impeller 3 side of the inner wall of the injection pipe 1 to the tip of the impeller 3 protruded into the injection pipe 1 is set to (h), and the outer diameter of the impeller 3 is set to P. The impeller 3 is fitted to the holder 4 so that the protruded quantity (h) of the impeller 3 becomes 1/2 or smaller of the outer diameter P of the impeller 3 or 1/2 or smaller of the inner diameter D of the injection pipe 1, thereby the effect given to the revolving speed of the impeller 3 by a fluid entering the lower section side of the impeller 3 can be reduced.

4. 发明专利

JPH1022514A HIGH SENSITIVE ACCELERATION SENSOR AND ITS MANUFACTURE 失效
公开(公告)号：JPH1022514A
公开(公告)日：1998-01-23
申请号：JP19164996
申请日：1996-07-03
申请人： ZEXEL CORP , ESASHI MASAKI
发明人： MIZUNO JUN , AMEMORI MASANORI , KAI NOTTMAYER , ESASHI MASAKI
IPC分类号： G01P15/125 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To form stably and surely a capacitor gap with the order of submicron in its length, by regulating the capacitance gap through the film thickness of the silicon oxide film formed on the opposite surface to the fixed electrode of the stopper of a capacitor. SOLUTION: When an acceleration acts on a sensitive acceleration sensor from its rear surface direction to its front surface direction, first and second moving weights 10a, 11a of a first sensor portion 4 and first and second moving weights 10b, 11b of a second sensor portion 5 are displaced respectively from its front surface direction to its rear surface direction by their inertial forces. Further, the first and the second moving weights 10a, 10b, 11a, 11b are displaced respectively to the places in which the deflection forces of supporting beams 2a, 2b, 13a, 13b and auxiliary supporting beams 16a, 16b, 17a, 17b are balanced respectively with the foregoing inertial forces. That is, since the capacitances of the capacitors C1-C4 are increased and the capacitances of the capacitors C5-C8 are decreased, both by the increases and decreases of the capacitances of the capacitors C1-C8 and by the magnitudes the direction and the magnitude of the acceleration can be detected and a comparably cheap high sensitive acceleration sensor can be obtained.

5. 发明专利

JPH1183886A CAPACITANCE TYPE MICROFLOW SENSOR, ITS MANUFACTURE, AND FIXTURE FOR EXTERNALLY ATTACHING THE SAME 失效
公开(公告)号：JPH1183886A
公开(公告)日：1999-03-26
申请号：JP26292497
申请日：1997-09-11
申请人： ZEXEL CORP
发明人： KANAI YOSHITAKA , AMEMORI MASANORI , MIZUNO JUN
IPC分类号： G01P5/00 , G01F1/28 , G01F1/38 , G01F1/40 , G01P5/14 , H01L21/306 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To measure flow velocities in two directions. SOLUTION: A first and a second detection electrodes 5, 6 are provided on a first substrate 1, and a first measuring recess 10 and a second measuring recess 11 are formed, in the parts of a second substrate 2 around a first boss part 15 and a second boss part 20 respectively; first sensor part communicating passages 16a, 16b communicating the first measuring recess 10 to the outside and second sensor part communicating passages 21a, 21b communicating the second measuring recess 11 to the outside have their respective opening parts oriented in opposite directions. Differential pressure produced by flow velocities works on diaphragms 13a, 13b, so that the capacitance between the first detection electrode 5 and the first boss part 15 and the capacitance between the second detection electrode 6 and the second pass part 20 can become proportional to the differential pressure, the capacitances being derived from flow velocities in opposite directions.

6. 发明专利

JPH1096744A MANUFACTURE OF CAPACITANCE TYPE ACCELERATION SENSOR 失效
公开(公告)号：JPH1096744A
公开(公告)日：1998-04-14
申请号：JP26909596
申请日：1996-09-20
申请人： ZEXEL CORP
发明人： MIZUNO JUN , AMEMORI MASANORI , KANAI YOSHITAKA
IPC分类号： G01P15/125 , B81B3/00 , B81C1/00 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method in which harmful gas for an operator is not generated, and the processing schedule is simple. SOLUTION: After forming an approximate shape by silicon etching against the part positions of a silicon substrate 20 corresponding to the parts to be a frame body and first and second weights, a Ni film is formed on one side of the silicon substrate 20 in which a fixed position, namely, a part position to be a cavity after completing is removed, thereafter through etching is executed by reactive ion beam etching (a), and hence the part to be a cavity after completing is formed without using laser beam (b).

7. 发明专利

JPH08338342A FUEL INJECTION NOZZLE 失效
公开(公告)号：JPH08338342A
公开(公告)日：1996-12-24
申请号：JP17161295
申请日：1995-06-15
申请人： ZEXEL CORP
发明人： HASEGAWA TOSHIYUKI , NOZAKI MASAYA , MIYAMOTO TAKESHI , AMEMORI MASANORI , KOBAYASHI TAKASHI
IPC分类号： F02M61/04 , F02M61/10 , F02M61/18
摘要： PURPOSE: To substantially adjust a nozzle hole total area, and furthermore prevent the occurrence of after-dripping and secondary injection by slidably and rotatably providing a rotary valve with a fuel leak mechanism which allows fuel to leak to a fuel leaking passage when a nozzle hole is closed by a nozzle hole area variation mechanism. CONSTITUTION: When injection is in the middle, or after injection has been over, a rotary valve is rotated so as to be suspended at a position for an angle of rotation where the fuel guide hole 73 of a lower part body 7b is communicated with neither a nozzle hole 35a nor a nozzle hole 35b, and the fuel gas groove 72 of an upper part body 7a is thereby communicated with a fuel leaking passage 307. By this constitution, fuel staying in the upper area of the upper part body 7a and the area of the lower part body 7b is spilled to the fuel leaking passage 307 low in pressure, the fuel flows to a fuel discharge port 106 from the fuel leaking passage 307, and is returned to a fuel tank 15 through a pipeline 150. Therefore, a fuel injection machine is thereby controlled, and the occurrence of the after-dripping and secondary injection of fuel can thereby be prevented.

8. 发明专利

JPH07202220A SEMICONDUCTOR ACCELERATION SENSOR 失效
公开(公告)号：JPH07202220A
公开(公告)日：1995-08-04
申请号：JP35018593
申请日：1993-12-29
申请人： ZEXEL CORP
发明人： AMEMORI MASANORI
IPC分类号： G01P15/12 , H01L29/84
摘要： PURPOSE:To improve anti-shock characteristics in a semiconductor acceleration sensor, by making a stopper gap smaller in width. CONSTITUTION:A projected part 24 jointed with a weight body 15 while the substrate 20 is mounted on a mounting stage 18, and a groove 25 as a stopper gap with a given width around the projected part 24 are formed on a substrate 20 opposite to the weight body 15 in an etching step. After the substrate 20 is mounted on the mounting stage 18, the projected part 24 is separated from the substrate 20 in a way that the projected part 24 is put at a distance from the substrate 20 with the stopper-gap groove 25 in between. These members function as a stopper means for the weight body 15. In this way, since the projected part 24 and the stopper-gap groove 25 are formed by etching, a small stopper gap can be formed.

9. 发明专利

JP2000081448A METHOD FOR DETECTING BASIC INFORMATION ABOUT MOVING BODY AND MULTIPLE SENSOR FOR BASIC INFORMATION ABOUT MOVING BODY 失效
公开(公告)号：JP2000081448A
公开(公告)日：2000-03-21
申请号：JP4570699
申请日：1999-02-24
申请人： ZEXEL CORP
发明人： MIZUNO JUN , KAI NOTTMAYER , AMEMORI MASANORI
IPC分类号： G01P15/125 , G01P15/00 , G01P15/18
摘要： PROBLEM TO BE SOLVED: To provide a sensor capable of detecting accelerations, angular velocities, and angular accelerations and suited for mass-production. SOLUTION: A multiple sensor S for basic information about a moving body includes first and second g-ω sensors 50, 51 having basically the same constitution. The first and second g-ωsensors 50, 51 are placed on a board 52 in such a way that their respective torsion bars extend along a vertical direction and that imaginary straight lines passing through the centers of the g-ωsensors 50, 51 orthogonally intersect in a direction perpendicular to the torsion bars. By comparing electrostatic capacity outputs from the sensors 50, 51, the directions and magnitudes of acceleration, angular velocity, and angular acceleration that work on a vehicle M can be detected.

10. 发明专利

JP2000035437A MANUFACTURE OF CAPACITANCE TYPE MICROFLOW SENSOR 失效
公开(公告)号：JP2000035437A
公开(公告)日：2000-02-02
申请号：JP21866898
申请日：1998-07-17
申请人： ZEXEL CORP
发明人： KANAI YOSHITAKA , AMEMORI MASANORI , MIZUNO JUN , OLIVER BERBERICH , KAI NOTTMAYER
IPC分类号： G01P5/08 , G01F1/56 , H01L21/306
摘要： PROBLEM TO BE SOLVED: To etch silicon with no erosion of an electrode so as to improve reliability. SOLUTION: Before a second silicon layer 31b is etched so that a recessed part 42a, i.e., a measurement recessed part, and the like are formed, a silicon oxide film 31a in parts 37a, 37b is etched so as to be thinned by a prescribed thickness. Then, the second silicon layer 31b is etched so that the part 42a and the like are formed (FIG. (A)). Next, the silicon oxide film 31a in the parts 37a, 37b is removed (FIG. (B)), and then, a ground electrode 20 and the like is formed by deposition (FIG. (C)).

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