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1. 发明专利

JPH1183574A ELECTROMAGNETIC FLOWMETER 失效
公开(公告)号：JPH1183574A
公开(公告)日：1999-03-26
申请号：JP24512497
申请日：1997-09-10
申请人： YAMATAKE HONEYWELL CO LTD
发明人： YAMAMOTO TOMOSHIGE
IPC分类号： G01F1/60
摘要： PROBLEM TO BE SOLVED: To reduce a measurement error when an ambient temperature changes by adding an LPF and smoothing an AC flow signal within a sampling period. SOLUTION: A signal electromotive force in response to the flow rate of a fluid is detected by electrodes 10A and 10B and is outputted to a converter 11 as a detection signal. A low-frequency component in the detection signal is attenuated by an HPF1, and mixed pulsive noise and low-frequency noise are eliminated. Then, a high-frequency component is attenuated by an LPF2, and the change in an AC flow signal during a sampling period being generated due to an ambient temperature change is reduced. After that, the signal is subjected to AC amplification by an AC amplification part 3 and is outputted as an AC flow signal being nearly smoothed during the sampling period. In this manner, since an AC flow signal 12 has been smoothed, the change in the integral value of the AC flow signal during the sampling period can be suppressed even if the capacities of capacitors 1A, 1B, and 3A being arranged in series with a detection signal change according to an ambient temperature.

2. 发明专利

JP2550435B2 失效
公开(公告)号：JP2550435B2
公开(公告)日：1996-11-06
申请号：JP27637590
申请日：1990-10-17
申请人： YAMATAKE HONEYWELL CO LTD
发明人： JONTEN SHOJI , OSADA MITSUHIKO , KUROSAWA TAKASHI , YAMAMOTO TOMOSHIGE
IPC分类号： G01P5/12 , G01F1/68 , G01F1/692

3. 发明专利

JPH02107923A MICROBRIDGE FLOW SENSOR 失效
公开(公告)号：JPH02107923A
公开(公告)日：1990-04-19
申请号：JP25956588
申请日：1988-10-17
申请人： YAMATAKE HONEYWELL CO LTD
发明人： KUROSAWA TAKASHI , OSADA MITSUHIKO , YAMAMOTO TOMOSHIGE
IPC分类号： G01F1/68 , G01F1/692 , H01L35/00
摘要： PURPOSE:To enable measurement of a flow velocity over a wide flow rate range by filling a plurality of slit-shaped openings formed with a high polymer resin to block the inflow of a gas into a through hole and the building up of a foreign matter. CONSTITUTION:A heater element 7 and resistance bulb elements 8 and 9 are formed at the center of a semiconductor substrate 1 and a plurality of slit- shaped openings 2a-2e and 3a-3e and 12a-12d are cut on both sides and at the center of the elements by an anisotropic etching. Then, a through hole 4 is formed communicating with the openings to form a bridge section 5 and a coating of a high polymer resin 13 such as polyimide is applied on the substrate 1 to close all of the openings while the through hole 4 is made hollow inside. This eliminates the inflow of a gas into the through hole 4, thereby enabling detection of a flow velocity of the gas only flowing over the surfaces of the elements 7, 8 and 9.

4. 发明专利

JPH04230808A DIAPHRAGM SENSOR 失效
公开(公告)号：JPH04230808A
公开(公告)日：1992-08-19
申请号：JP10652891
申请日：1991-04-12
申请人： YAMATAKE HONEYWELL CO LTD
发明人： OSADA MITSUHIKO , JOUNTEN SHOJI , KUROSAWA TAKASHI , YAMAMOTO TOMOSHIGE
IPC分类号： G01F1/68 , G01F1/684 , G01F1/692 , G01P5/10 , G01P5/12
摘要： PURPOSE:To reduce the heat conduction from a heating part to a thermometric resistor and to prevent the adhesion of dust to the utmost by forming a slit part between the heating part and the thermometric resistor along the longitudinal direction thereof. CONSTITUTION:A thin-walled diaphragm part 23 is formed to the surface of a semiconductor substrate 21 and a heater 7 is formed thereon and thermometric resistors 8, 9 are formed on both sides of the heater 7 and, further, slit parts 24l, 24r are provided on both sides of the heater 7. Since the heat conduction from the heater 7 to the resistors 8, 9 through the member of the diaphragm part 23 is reduced by this constitution, the temp. rise of the resistors 8, 9 becomes low as compared with conventional resistors. Therefore, the output error due to the adhesion of dust becoming large in proportion to the temps. of the resistors 8, 9 and the output error due to the drift of the TCR mismatching between the upstream resistor 8 and the downstream resistor 9 becomes small. Further, since air does not enter the space part under the diaphragm part 23 and flows along the surface of the diaphragm part, the adhesion of dust becomes min.

5. 发明专利

JPH04152221A FLOW SPEED SENSOR 失效
公开(公告)号：JPH04152221A
公开(公告)日：1992-05-26
申请号：JP27637590
申请日：1990-10-17
申请人： YAMATAKE HONEYWELL CO LTD
发明人： JOUNTEN SHOJI , OSADA MITSUHIKO , KUROSAWA TAKASHI , YAMAMOTO TOMOSHIGE
IPC分类号： G01P5/12 , G01F1/68 , G01F1/692
摘要： PURPOSE:To decrease the power consumption of a heat emission part and sense the flow speed with high sensitivity by locating the wider portion of the resistance pattern of the heat emission part a cartain distance apart from the major portion of the heat emission part. CONSTITUTION:Wider portion 4a-4d, 5a-5d, 6a-6d of each resistance pattern of a heater element, 4, an upstream sound-measuring resistance element 5, and a downstream temp. measuring resistance element 6 is located a certain distance apart from the major portion of respective element and is provided only around the boundary between a diaphragm 3a and the large wall thickness part of a semiconductor lease board. This lessens the heat amount running away to the semiconductor base board through respective resistance pattern having a thermal conductivity several times as large as the material of diaphragm 3a. which is thus given a very good heat insulation. Therefore, the power consumption lessens in the element 4 while the sensing sensitivity is enhanced in the upstream temp.-measuring resistance element 5 and downstream temp.- measuring resistance element 6, and also dislocation of zero point resulting from different thermal conductivity of gases and shift of the sensitivity relative to the rate of flow by volume are lessened.

6. 发明专利

JPH02106975A MICRO-BRIDGE FLOW SENSOR AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH02106975A
公开(公告)日：1990-04-19
申请号：JP25956688
申请日：1988-10-17
申请人： YAMATAKE HONEYWELL CO LTD
发明人： YAMAMOTO TOMOSHIGE , OSADA MITSUHIKO
IPC分类号： G01F1/68 , G01F1/692 , H01L29/84
摘要： PURPOSE:To inhibit the undercut of a semiconductor base minimally, to make a fixed gas flow through a detecting section and to obtain a micro-bridge flow sensor having high quality by integrally forming a protruding section not etched in the face direction to the edge section of the semiconductor base. CONSTITUTION:A heater element 7 and temperature-sensing resistance elements 8, 9 are shaped at the specified positions of the surface of a wafer 20, and opening 2, 3 and trenches 24 with V-shaped cross sections to a longitudinal street section 21a and a lateral street section 21b are formed. The V-shaped etching trench 24 is shaped continuously to the lateral street section 21b, and the discontinuous V-shaped etching trench 24 having a section 25 not etched in the face direction is formed in a section crossed with the lateral street section 21b in the longitudinal street section 21a. The silicon wafer 20 is cut in the directions shown by the arrows, thus acquiring a micro-bridge flow sensor chip 26.

7. 发明专利

JPH01108702A THIN FILM RESISTANCE ELEMENT 失效
公开(公告)号：JPH01108702A
公开(公告)日：1989-04-26
申请号：JP26535587
申请日：1987-10-22
申请人： YAMATAKE HONEYWELL CO LTD
发明人： NISHIMOTO IKUO , TANAKA SHUICHI , YAMAMOTO TOMOSHIGE , OSADA MITSUHIKO
IPC分类号： H01C17/24 , H01C7/00
摘要： PURPOSE:To improve the reliability of laser-trimming and utilize a space efficiently by a method wherein a recessed part protruding inward is provided in a resistance discrete adjustment pattern. CONSTITUTION:A resistance discrete adjustment pattern 4A which has a recessed part 4a protruding inward as a part to be cut off and a resistance non- adjustment pattern 5A are connected in parallel to each other to form a resistor adjustment pattern 6A. A number of the resistor adjustment patterns 6A are connected in series between conductor patterns 2 and 3 which are resistance measurement terminals of the resistor adjustment patterns. The discrete adjustment pattern 4A and the non-adjustment pattern 5A are formed by, for instance, patterning a metel thin film made of platinum or the like by a method such as photoetching. The patterns 4A and 5A are so formed as to make the respective pattern widths equal to each other and the respective pattern lengths (resistance values) different from each other, i.e., to make the resistance of the discrete adjustment pattern 4A larger and the resistance of the non-adjustment pattern 5A smaller. The pattern 4A has protruding parts 4b and 4c and the protruding part 4b is cut off at its two positions by one shortdistance scanning of a laser beam continuously.

8. 发明专利

JPH1183578A ELECTROMAGNETIC FLOWMETER 失效
公开(公告)号：JPH1183578A
公开(公告)日：1999-03-26
申请号：JP24881497
申请日：1997-09-12
申请人： YAMATAKE HONEYWELL CO LTD
发明人： YAMAMOTO TOMOSHIGE
IPC分类号： G01F1/60
摘要： PROBLEM TO BE SOLVED: To reduce spike-like or step-like noises without deteriorating response performance. SOLUTION: A correlation coefficient calculation part 53 is provided which calculates self correlation coefficients sequentially from sampling output signals 4 from an A-D conversion part. A time constant control part 54 selects on the basis of the calculated self correlation coefficient a relatively small damping time constant when a self correlation is satisfied, and a relatively large damping time constant when the self correlation is not satisfied. The selected damping time constant is output from the time constant control part to an LPF 52.

9. 发明专利

JPH1183576A ELECTROMAGNETIC FLOWMETER 失效
公开(公告)号：JPH1183576A
公开(公告)日：1999-03-26
申请号：JP24514697
申请日：1997-09-10
申请人： YAMATAKE HONEYWELL CO LTD
发明人： YAMAMOTO TOMOSHIGE
IPC分类号： G01F1/60
摘要： PROBLEM TO BE SOLVED: To achieve a highly accurate measurement even when a relatively high excitation frequency is used by providing a signal selection part at the front stage of an HPF, stopping the output of an AC flow signal for a specific period, and output a signal to the HPF during another period. SOLUTION: A signal electromotive force corresponding to the flow rate of a fluid is detected by electrodes 10A and 10B, is outputted to a converter 11 as a detection signal, and is amplified by an AC amplification part 1 and is outputted as an AC flow signal 12. At a signal selection part 2 being provided at the front stage of an HPF3, a switch 2A operates based on a selection period that a selection control signal 9B from a switching part 9 indicates, and the output of the AC flow signal 12 is stopped for a specific period from the start-up of an excitation signal 9C (the AC flow signal 12), thus a differential noise generated at the start-up part of each pulse is eliminated and the offset of a DC part generated by an HPF due to a differential noise is suppressed when a relatively high excitation frequency is used. Therefore, even if a relatively high excitation frequency is used, an accurate measurement can be realized.

10. 发明专利

JPH1183575A ELECTROMAGNETIC FLOWMETER 失效
公开(公告)号：JPH1183575A
公开(公告)日：1999-03-26
申请号：JP24513597
申请日：1997-09-10
申请人： YAMATAKE HONEYWELL CO LTD
发明人： YAMAMOTO TOMOSHIGE
IPC分类号： G01F1/60
摘要： PROBLEM TO BE SOLVED: To attenuate the fluctuation of measurement output attributable to a commercial power supply frequency noise by attenuating the differential frequency between an excitation frequency and a commercial power supply frequency by providing a band attenuation filtering means. SOLUTION: The fluctuation of a DC flow signal 13 is generated in the differential frequencies between an excitation frequency fex and a commercial power supply frequency fn, namely fex -fn (23) and fex +fn (24). Therefore, by providing a band attenuation filter BEF4 with a specific frequency characteristic at the later stage of a sample hold part 3 and attenuating differential frequency components 23 and 24 being included in the DC flow signal 13, fluctuation being generated due to the commercial power supply frequency noise can be attenuated. A DC flow signal 13 from the sample hold part 3 can be read as digital information via an A/D conversion part 5 in an operation-processing part 6, and a desired measurement flow value is calculated from a fluid flow rate by executing a specific operation processing before being converted to a specific signal by an output part 7.

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