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1. 发明专利

JPH0694657A THERMAL CONDUCTIVITY MEASURING DEVICE 失效
公开(公告)号：JPH0694657A
公开(公告)日：1994-04-08
申请号：JP26913192
申请日：1992-09-14
申请人： YAMATAKE HONEYWELL CO LTD
发明人： JOUNTEN SHOJI
IPC分类号： G01N25/18 , B81B3/00 , G01N25/20 , G01N27/18 , G01N30/66
摘要： PURPOSE:To improve the gas substitution property near an electrical heating element and to measure a thermal conductivity with high sensitivity and accuracy by setting the area of section which is vertical to the direction of flow of a channel to a size exceeding the section area at a cavity part of a substrate below a membrane. CONSTITUTION:A detector 20 is constituted so that the sectional area of a channel 30 is larger than the sectional area which is vertical to a flow direction F of a cavity part 25. Therefore, since the volume of the channel 30 near the cavity part 25 is larger than the area of the cavity part 25, the amount of gas being supplied to the channel 30 is large. For example, when a gas B which is different from a gas A flowing the channel 30 flows to the detector 20 via the channel 30, mutual diffusion occurs via a slit 23 of a membrane 24 between the gas A and the gas B staying inside the cavity part 25. Then, the concentration of the gas A inside the nearby channel 30 is maintained to be lower than that inside the cavity part 25 until the gas A near the electrical heating element 22 of the membrane 24 is totally substituted with the gas B and also the concentration of the gas B inside the nearby channel 30 is maintained to be higher than that inside the cavity part 25, thus speeding up the substitution from the gas A to the gas B (substitution between the carrier gas and the sample gas) and achieving a high-sensitivity and high-accuracy measurement.

2. 发明专利

JPH0469521A FLOWMETER 失效
公开(公告)号：JPH0469521A
公开(公告)日：1992-03-04
申请号：JP18069490
申请日：1990-07-10
申请人： YAMATAKE HONEYWELL CO LTD
发明人： TSUMURA TAKASHI , INABA TAKASHI , JOUNTEN SHOJI
IPC分类号： G01F1/68 , G01F1/684
摘要： PURPOSE:To improve the detection sensitivity of a flow sensor by dividing the flow passage in a conduit into plural parts and increasing the speed distribution gradient nearby the flow sensor. CONSTITUTION:At the center part of a semiconductor substrate 21 made of, for example, silicon, a thin film type diaphragm part 23 which is thermally insulated from the semiconductor substrate 21 through a gap part 22 is formed and at the center part of the surface on the diaphragm part 23, a thin film type heater element 24 is formed; and thin film type temperature measuring resistance elements 25 and 26 which are independent of each other are formed at both sides of the heater element 24. In the flow meter which is thus formed, gas A flowing in the conduit 1 is divided into two and flows since a partition plate 3 is installed in the duct 1, so the speed distribution gradient of the gas A on the internal wall surface of the conduit 1 and the wall surface of the partition plate 3 becomes large.

3. 发明专利

JPH0458111A FLOW RATE MEASURING INSTRUMENT 失效
公开(公告)号：JPH0458111A
公开(公告)日：1992-02-25
申请号：JP16819990
申请日：1990-06-28
申请人： YAMATAKE HONEYWELL CO LTD
发明人： AOSHIMA SHIGERU , HISANAGA TETSUO , OSADA MITSUHIKO , JOUNTEN SHOJI , GUNJI TAKASHI , KUBODERA SETSUO
IPC分类号： G01F1/20
摘要： PURPOSE:To measure a flow rate with high accuracy without being affected by external vibration by detecting the fluidic oscillation of a fluidic flowmeter by a flow sensor. CONSTITUTION:Pressure intake holes 8A and 8B are bored in a flow passage part where pressure increase and decrease vary reciprocally in a barrel body 2 which constitute the fluidic flowmeter 1 and, for example, a microflow sensor 11 as the flow sensor which measures the flow velocity of gas flowing in the flow passage 10 coupling those pressure intake holes 8A and 8B is installed in the flow passage 10. Further, >=2 sets of the couple of open holes, flow passage 10, and flow sensor 11 are provided. Consequently, the flow sensor 11 is used as a detector to make the vibration, etc., of the fluidic flowmeter 1 hard to detect, thereby enabling high-accuracy measurement.

4. 发明专利

JPS63171322A FLOW VELOCITY MEASURING INSTRUMENT 失效
公开(公告)号：JPS63171322A
公开(公告)日：1988-07-15
申请号：JP188987
申请日：1987-01-09
申请人： YAMATAKE HONEYWELL CO LTD
发明人： JOUNTEN SHOJI
IPC分类号： G01F1/46 , G01P5/14
摘要： PURPOSE:To enable mean flow velocity to be easily measured by constituting a flow velocity measuring instrument such that the flow velocity of fluid to be measured is calculated from difference between the values of negative pressures generated by the flow of the fluid to be measured in first and second flow velocity detecting pipes. CONSTITUTION:A pipe 1 is like, for example, a duct and fluid to be measured flows in a direction shown by an arrow in the pipe 1. A composite flow velocity detecting pipe 4 composed of first and second flow velocity detecting pipes 2 and 3, respectively, is arranged in the pipe 1 so as to cross the flow of the fluid to be measured. The detecting pipe 2 is provided with openings 5 and 6 having elevation angles theta1 and theta2, respectively, four by four at approximately equal spacings with the upstream side of the fluid to be measured as a reference. Further, the detecting pipe 3 is provided with four openings 7 having elevation angles 180 deg. with the upstream side of the fluid to be measured as a reference. The distal ends of the detecting pipes 2 and 3 are closed and the other ends are connected to pressure gages 9 and 10, respectively, outside the pipe 1 via connecting ports. The output of the pressure gates 9 and 10 is supplied to arithmetic means 11 and difference between negative pressure in the detecting pipes 2 and 3 is calculated. The flow velocity of the fluid to be measured is calculated in arithmetic means 12 in accordance with a characteristic curve obtained in advance.

5. 发明专利

JPH0933555A FLUID MEASURING METHOD AND DEVICE 失效
公开(公告)号：JPH0933555A
公开(公告)日：1997-02-07
申请号：JP18909195
申请日：1995-07-25
申请人： YAMATAKE HONEYWELL CO LTD
发明人： KOBAYASHI AKIRA , JOUNTEN SHOJI
IPC分类号： G01P5/18 , G01F1/708
摘要： PROBLEM TO BE SOLVED: To accurately detect the position of a state changing part (tracer) in a flowing fluid. SOLUTION: A tracer 4 traveling by the flow of a fluid is detected by state detection means 1a, 1b, and 1c and each output is differentially amplified by differential amplifiers 3a and 3b. By differentially amplifying the obtained two signals by a differential amplifier 3c, the secondary difference of states detected at three positions is obtained.

6. 发明专利

JPH0643906B2 失效
公开(公告)号：JPH0643906B2
公开(公告)日：1994-06-08
申请号：JP6770189
申请日：1989-03-22
申请人： YAMATAKE HONEYWELL CO LTD
发明人： OSADA MITSUHIKO , JOUNTEN SHOJI
IPC分类号： G01P5/12 , G01F1/68 , G01F1/692

7. 发明专利

JPH05223835A FLOW VELOCITY SENSING DEVICE 失效
公开(公告)号：JPH05223835A
公开(公告)日：1993-09-03
申请号：JP6655492
申请日：1992-02-07
申请人： YAMATAKE HONEYWELL CO LTD
发明人： AOSHIMA SHIGERU , JOUNTEN SHOJI
IPC分类号： G01P5/12 , G01P5/10
摘要： PURPOSE:To enhance the sensitivity of a flow speed sensing element for sensing the flow speed in the low range by furnishing a partition board or boards between a pair of oppositely arranged fluid guide plates in such a way as parallel with the surface of the sensing element. CONSTITUTION:Between a pair of fluid guide plates 5, 6 arranged opposedly to each other, two partition boards 42 are installed in parallel with the surface of a flow speed sensing element 11 and in the central part while secured by a partition board support 43 to construct a flow speed sensing part 2. Therein the flow speed distribution 44 over the sensing element 11 when the fluid is allowed to flow at a low speed is formed at a spacing as divided by the partition boards 42, so that the tangent angle theta2 of the speed gradient on the sensing element 11 becomes a large value. According to the conventional arrangement, a remarkable output drop appears when the speed V of the main stream is below 0.3m/s, which is however improved in this flow speed sensing device, and the output of the device when the direction component of the speed of fluid main stream is in the identical magnitude is never influenced by the speed V of the fluid main stream.

8. 发明专利

JPH04158263A FLOW SPEED SENSOR 失效
公开(公告)号：JPH04158263A
公开(公告)日：1992-06-01
申请号：JP28349190
申请日：1990-10-23
申请人： YAMATAKE HONEYWELL CO LTD
发明人： JOUNTEN SHOJI , OSADA MITSUHIKO , KUROSAWA TAKASHI , YAMAMOTO TOMOSHIGE
IPC分类号： G01P5/12 , G01P5/00
摘要： PURPOSE:To prevent formation of unnecessary temperature gradient in a temperature measuring resistor and enable stable detection of flow speed by placing a resistor pattern of a heat-generating part symmetrically with respect to a center line perpendicular to its lengthwise direction. CONSTITUTION:A diaphragm part 3a is formed via a gap 2 with respect to a semiconductor substrate, while a heater element 4 is formed at the center and temperature measuring elements 5, 6 independent from each other are formed on both sides respectively. An entire outer shape of the elements 5, 6 is formed in an approximate trapezoid symmetric with respect to an element 4 as the center while a relatively large plane region 12 is formed on both sides of the element 4. In the element 4, distances L1,L2 between edges of resistor patterns 41,42 to the center of the elements 5, 6 are approximately equal to each other. Therefore a temperature distribution by heating of the element 4 is symmetric with respect to a center line C-C' and also a temperature distribution on the elements 5, 6 is symmetric with respect to the line C-C', thereby preventing unnecessary temperature gradient from being formed in the elements 5, 6.

9. 发明专利

JPH04145372A FLOW SPEED SENSOR 失效
公开(公告)号：JPH04145372A
公开(公告)日：1992-05-19
申请号：JP26849790
申请日：1990-10-08
申请人： YAMATAKE HONEYWELL CO LTD
发明人： JOUNTEN SHOJI , OCHIAI KOICHI
IPC分类号： G01P5/12 , G01F1/68 , G01F1/692 , G01P5/00
摘要： PURPOSE:To set resistance values easily and realize highly sensitive flow speed detection by setting the resistance values in edge parts, in the lengthwise direction, of a resistance pattern for constituting an exothermic body larger than that of the central part of the resistance pattern. CONSTITUTION:A thin wall type diaphragm part 3a thermally insulated substrate 1 through a space part 2 against a semiconductor is formed in the central surface part of the semiconductor substrate 1. A heater element 4a is formed in the central part of the diaphragm 3a, and respectively independent resistance thermometer elements 5 and 6 are formed further on both sides of this heater element 4a. The heater element 4a is formed so that the resistance values on both sides can be larger than that in the central part for increasing calorific value. A uniform temperature distribution can be formed on the diaphragm 3a against gas flow from the arrow 8 direction.

10. 发明专利

JPH045572A FLOW VELOCITY SENSOR 失效
公开(公告)号：JPH045572A
公开(公告)日：1992-01-09
申请号：JP10535590
申请日：1990-04-23
申请人： YAMATAKE HONEYWELL CO LTD
发明人： OSADA MITSUHIKO , JOUNTEN SHOJI , KUROSAWA TAKASHI , YAMAMOTO TOMOSHIGE
IPC分类号： G01P5/12 , G01F1/64 , G01P5/10
摘要： PURPOSE:To increase the detection sensitivity by etching a substrate through many thin slits provided on the substrate surface and forming a large diaphragm, and making the patterns of a heat generation part and a resistance bulb part large. CONSTITUTION:A heater element 7 is provided in the center of the (100) surface of the Si substrate, resistance bulb elements 8 and 9 are provided on both sides independently of each other, and they are protected with an Si3N4 film. Many thin slits 12 are provided on the substrate 1 in specific arrangement and a direction. The lower side and periphery of the heater element 7 and resistance bulb elements 8 and 9 are etched anisotropically through the slits 12 with a KOH solution, etc., to form a gap part. The heater element 7 and resistance bulbs 8 and 9 are insulated thermally while isolated from the Si substrate spatially in a diaphragm shape to complete the diaphragm on the gap. This constitution easily forms the large diaphragm, the slits are thin, and the entry of dust into the gap is reduced; and the operation of the flow velocity sensor becomes stable, the thermal independency of the diaphragm is high, so the detection sensitivity is improved.

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