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1. 发明专利

JP2010092885A Cathode substrate, and method of manufacturing the same 审中-公开
标题翻译：阴极基板及其制造方法
公开(公告)号：JP2010092885A
公开(公告)日：2010-04-22
申请号：JP2010003992
申请日：2010-01-12
申请人： Ulvac Japan Ltd , Ulvac Seimaku Kk , アルバック成膜株式会社 , 株式会社アルバック
发明人： NAKANO MINAO , HIRAKAWA MASAAKI , MIURA OSAMU , MURAKAMI HIROHIKO , OKASAKA KENSUKE , KOJIMA TOMOAKI
IPC分类号： H01J1/304 , H01J9/02
摘要： PROBLEM TO BE SOLVED: To solve the following problems: electrons emitted from an emitter are diffused; the charge injection efficiency is low; and the charge injection efficiency is easily fluctuated among respective cathode substrates on the conventional anode substrate having a gate electrode. SOLUTION: The cathode substrate includes: a cathode electrode layer 12, an insulating layer 14, and a gate electrode layer 15 sequentially laminated on a processing substrate 11; an emitter E provided on a bottom of a hole 14a formed on the insulating layer; and a gate hole opening part 16 formed on the gate electrode layer. The gate hole opening is composed of a plurality of openings 16a having area smaller than that of opening of the hole of the insulating layer. Each opening is congregated just on the hole of the insulating layer so as to face the emitter. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决以下问题：从发射体发射的电子扩散; 电荷注入效率低; 并且电荷注入效率在具有栅电极的常规阳极基板上的各个阴极基板之间容易波动。解决方案：阴极基板包括：顺序层压在处理基板11上的阴极电极层12，绝缘层14和栅电极层15; 设置在形成在绝缘层上的孔14a的底部的发射体E; 以及形成在栅电极层上的栅极孔开口部16。门孔开口由具有小于绝缘层的孔的开口面积的多个开口16a构成。每个开口恰好在绝缘层的孔上聚集，以面对发射极。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2007073480A Flat lamp and its producing method 审中-公开
标题翻译：平板灯及其制作方法
公开(公告)号：JP2007073480A
公开(公告)日：2007-03-22
申请号：JP2005262430
申请日：2005-09-09
申请人： Ulvac Japan Ltd , Ulvac Seimaku Kk , アルバック成膜株式会社 , 株式会社アルバック
发明人： MURAKAMI HIROHIKO , TSUKAHARA NAOKI , NAKANO MINAO , HIRAKAWA MASAAKI , KOJIMA TOMOAKI , KAGEYAMA KAGEHIRO
IPC分类号： H01J63/06 , H01J1/304 , H01J9/02
摘要： PROBLEM TO BE SOLVED: To provide a flat lamp that is easy to control emission, and to provide a production method of the flat lamp achieving simplicity of process and low cost. SOLUTION: In a structure of a field emission display, having a cathode electrode with an emitter 43, a gate electrode 42, and an anode electrode 45, the gate electrode 42 and the cathode electrode 43 are arranged on the same plane and so that the display regions of these electrodes are parallel to each other. Furthermore, the interval between the cathode electrode with the emitter 43 and the gate electrode 42 is arranged so as to be 100 μm or smaller. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种容易控制发射的扁平灯，并提供一种实现工艺简单和低成本的扁平灯的生产方法。解决方案：在具有发射极43的阴极电极，栅极电极42和阳极电极45的场发射显示器的结构中，栅电极42和阴极电极43被布置在同一平面上，使得这些电极的显示区域彼此平行。此外，将阴极与发射极43和栅电极42之间的间隔配置为100μm以下。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2005251430A Cathode substrate and manufacturing method of the same 有权
标题翻译：阴极基板及其制造方法
公开(公告)号：JP2005251430A
公开(公告)日：2005-09-15
申请号：JP2004056624
申请日：2004-03-01
申请人： Ulvac Japan Ltd , Ulvac Seimaku Kk , アルバック成膜株式会社 , 株式会社アルバック
发明人： NAKANO MINAO , HIRAKAWA MASAAKI , MIURA OSAMU , MURAKAMI HIROHIKO , OKASAKA KENSUKE , KOJIMA TOMOAKI
IPC分类号： H01J9/02 , H01J1/304 , H01J3/02 , H01J29/48 , H01J31/12 , H01L29/76
CPC分类号： H01J29/481 , H01J3/021 , H01J9/025 , H01J31/127
摘要： PROBLEM TO BE SOLVED: To provide a cathode substrate having good electric charge injection efficiency by preventing diffusion of electron emitted from an emitter, of which, the electron injection efficiency is hardly scattered between respective cathode substrates, and to provide a manufacturing method of the same. SOLUTION: A cathode electrode layer 12, an insulation layer 14, and a gate electrode layer 15 are formed on a processing substrate 11 successively, and an emitter E is arranged on a bottom part of holes 14a formed on the insulation layer. In this case, a gate opening part is constructed by a plurality of openings 16 of which, opening area is smaller than that of the hole of the insulation layer, and respective openings are made to congregate just on the hole of the insulation layer so as to face the emitter. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了通过防止从发射极发射的电子的扩散来提供具有良好的电荷注入效率的阴极基板，其中电子注入效率几乎不分散在各个阴极基板之间，并且提供制造方法一样的。解决方案：连续地在处理基板11上形成阴极电极层12，绝缘层14和栅电极层15，并且在形成在绝缘层上的孔14a的底部上布置发射体E. 在这种情况下，门开口部由多个开口部16构成，开口部16的开口面积小于绝缘层的孔的开口面积，并且使各开口刚好聚集在绝缘层的孔上，以便面对发射器。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2004107118A Method for manufacturing graphite nano-fiber, electron emitting source and display element 审中-公开
公开(公告)号：JP2004107118A
公开(公告)日：2004-04-08
申请号：JP2002270104
申请日：2002-09-17
申请人： Ulvac Japan Ltd , Ulvac Seimaku Kk , アルバック成膜株式会社 , 株式会社アルバック
发明人： HIRAKAWA MASAAKI , MIURA OSAMU , MURAKAMI HIROHIKO , ONO KAZUNAO , FUJII KENJI , OKASAKA KENSUKE , SASAKI TAKAHIDE
IPC分类号： C01B31/02 , B82B3/00 , C23C16/26 , C30B25/02 , C30B29/60 , D01F9/127 , H01J1/304 , H01J9/02 , H01J31/12
CPC分类号： D01F9/127 , B82Y10/00 , B82Y30/00 , C30B25/02 , C30B29/605 , H01J1/3044 , H01J9/025 , H01J2201/30469
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing graphite nano-fibers which cause no short circuit even when utilized for an emitter and can improve unevenness of light emitting sites in manufacturing an FED (field emission display) and to provide an electron emitting source and a display element using the obtained graphite nano-fibers. SOLUTION: A gaseous mixture of a carbon supply gas and gaseous hydrogen is fed onto the surface of a substrate on which a catalyst layer of a prescribed thickness has been formed to form graphite nano-fibers consisting of a graphite nano-fiber layer of a controlled thickness and a non-fiber layer. Iron, cobalt or an alloy containing at least one of these metals is used as the catalyst, and growth is carried out at 350 to 650°C for 1 to 60 min. The electron emitting source and the display device are obtained using the obtained graphite nano-fibers. COPYRIGHT: (C)2004,JPO

5. 发明专利

JP2004002111A Method of forming optical thin film for display window material and optical thin film structure 审中-公开
公开(公告)号：JP2004002111A
公开(公告)日：2004-01-08
申请号：JP2002160352
申请日：2002-05-31
申请人： Ulvac Japan Ltd , Ulvac Seimaku Kk , アルバック成膜株式会社 , 株式会社アルバック
发明人： NAKAYAMA TAKAHIRO , MIURA OSAMU , MURAKAMI HIROHIKO , MATSUZAKI KANENORI , KURAUCHI TOSHIHARU , MISAWA SHUNJI , TAMAGAWA KOICHI , OKASAKA KENSUKE , FUJII KENJI , SASAKI TAKAHIDE
IPC分类号： G02B1/11 , C03C17/34 , G02B1/10 , G02B1/111 , G09F9/30 , H01L51/50 , H05B33/02 , H05B33/14
摘要： PROBLEM TO BE SOLVED: To provide a method of forming an optical thin film for a display window material by which the sticking strength of a porous silica material to a transparent conductive film is improved in forming the optical thin film by lamination while having a low refractive index film consisting of the porous silica material and the transparent conductive film in order to highly efficiently take out luminescence and an optical thin film structure formed using the method. SOLUTION: The optical thin film structure is formed by laminating the transparent conductive film 2 and the low refractive index film 3 consisting of the hydrophobic porous silica material through an intermediate adhesive layer 4 composed of a transparent insulation layer such as a SiO 2 film on a glass substrate 1. In such a case, it is desirable that the low refractive index film 3 consisting of the hydrophobic porous silica material has 0.3-2.0 μm film thickness and ≤50 nm flatness expressed by the center line average roughness and the intermediate adhesive layer 4 composed of the transparent insulation film has 5-300 nm film thickness and ≤50 nm flatness expressed by the center line average roughness. COPYRIGHT: (C)2004,JPO

6. 发明专利

JP2013121892A Method for preparing porous silica precursor coating liquid 有权
标题翻译：制备多孔二氧化硅前驱涂层液的方法
公开(公告)号：JP2013121892A
公开(公告)日：2013-06-20
申请号：JP2011270960
申请日：2011-12-12
申请人： Ulvac Japan Ltd , 株式会社アルバック
发明人： YAMAZAKI TAKAHISA , HIRAKAWA MASAAKI , MURAKAMI HIROHIKO
IPC分类号： C01B33/12
摘要： PROBLEM TO BE SOLVED: To provide a porous silica precursor coating liquid enabling to obtain a porous silica membrane, enabling to reduce membrane shrinkage occurring at firing, having 2.4 or less relative permittivity, and excellent in chemical resistance.SOLUTION: The preparation method of the porous silica precursor coating liquid to be used to form the porous silica membrane comprises: dissolving a first trialkoxysilane having an alkyl group or a polymer thereof, tetraalkoxysilane or a polymer thereof, and a second trialkoxysilane having an aryl group or a polymer thereof in a solvent together with a surfactant; hydrolyzing and dehydrocondensing this in the presence of a catalyst. The ratio of the first trialkoxysilane or the polymer thereof is set as 50-95 mol%, the ratio of the tetraalkoxysilane or the polymer thereof is set as 5-40 mol% and the ratio of the second trialkoxysilane or the polymer thereof is set as 1-20 mol%, each to total of the alkoxysilane or the polymer thereof in terms of Si atom.
摘要翻译：要解决的问题：提供一种能够获得多孔二氧化硅膜的多孔二氧化硅前体涂布液，能够减少焙烧时发生的膜收缩，相对介电常数为2.4以下，耐化学性优异。解决方案：用于形成多孔二氧化硅膜的多孔二氧化硅前体涂布液的制备方法包括：溶解具有烷基的第一三烷氧基硅烷或其聚合物，四烷氧基硅烷或其聚合物，以及第二三烷氧基硅烷，其具有芳基或其聚合物在溶剂中与表面活性剂一起使用; 在催化剂存在下水解和脱水缩合。第一三烷氧基硅烷或其聚合物的比例设定为50-95摩尔％，四烷氧基硅烷或其聚合物的比例设定为5-40摩尔％，将第二三烷氧基硅烷或其聚合物的比例设定为 1-20摩尔％，以Si原子换算为烷氧基硅烷或其聚合物。版权所有（C）2013，JPO＆INPIT

7. 发明专利

JP2013025296A Electrode structure, manufacturing method of electrode structure and electro-optical element 有权
标题翻译：电极结构，电极结构和电光元件的制造方法
公开(公告)号：JP2013025296A
公开(公告)日：2013-02-04
申请号：JP2011163206
申请日：2011-07-26
申请人： Ulvac Japan Ltd , 株式会社アルバック , Tokyo Univ Of Science , 学校法人東京理科大学
发明人： KANAI SHOTA , MURAKAMI HIROHIKO , OKAMURA SOICHIRO , NAKAJIMA TAKAFUMI
IPC分类号： G02F1/295 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide an electrode structure capable of simply and accurately measuring the electrical characteristics of a functional organic material, a manufacturing method of the electrode structure and an electro-optical element using the manufacturing method.SOLUTION: The electrode structure of the present invention includes: a first electrode layer; an organic layer; and a second electrode layer. The organic layer formed on the first electrode layer has: a first resin region of which a height from the first electrode layer is a first height; and a second resin region of which the height from the first electrode layer is a second height less than the first height. The second electrode layer has: a first electrode region formed on the first resin region of the organic layer; and a second electrode region formed on the second resin region of the organic layer so as to be separated from the first electrode region.
摘要翻译：要解决的问题：提供能够简单且精确地测量功能性有机材料的电特性的电极结构，电极结构的制造方法和使用该制造方法的电光元件。解决方案：本发明的电极结构包括：第一电极层; 有机层; 和第二电极层。形成在第一电极层上的有机层具有：与第一电极层的高度为第一高度的第一树脂区域; 以及第二树脂区域，其中来自第一电极层的高度是比第一高度小的第二高度。第二电极层具有形成在有机层的第一树脂区域上的第一电极区域; 以及形成在所述有机层的所述第二树脂区域上以与所述第一电极区域分离的第二电极区域。版权所有（C）2013，JPO＆INPIT

8. 发明专利

JP2012146709A Bonding method of substrate and method of manufacturing laminate substrate 有权
标题翻译：基板的接合方法和制造层压基板的方法
公开(公告)号：JP2012146709A
公开(公告)日：2012-08-02
申请号：JP2011001558
申请日：2011-01-06
申请人： Ulvac Japan Ltd , 株式会社アルバック
发明人： ISHIKAWA MICHIO , TOYODA SATOSHI , MURAKAMI HIROHIKO , IRIKURA HAGANE
IPC分类号： H01L21/02 , H01L25/065 , H01L25/07 , H01L25/18 , H01L27/00 , H01L27/10
CPC分类号： H01L2924/0002 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To provide a bonding method of substrates capable of rigid bonding while suppressing warpage when a plurality of substrates are bonded.SOLUTION: The bonding method of substrates includes a first underlying layer formation step for forming a first underlying layer 35a on the surface of a first substrate Sa, a second underlying layer formation step for forming a second underlying layer 35b on the surface of a second substrate Sb, a first monomer deposition step for depositing a first monomer 13a on the first underlying layer 35a formed on the surface of a first substrate Sa, a second monomer deposition step for depositing a second monomer 13b which reacts on the first monomer 13a to form a polymer on the second underlying layer 35b formed on the surface of the second substrate Sb, and a polymer formation step for bonding the first substrate Sa and the second substrate Sb by mounting the first substrate Sa and the second substrate Sb so that the surfaces, where the monomer is deposited, face each other, and bringing the first monomer 13a and the second monomer 13b into contact with each other thereby forming a polymer by reaction.
摘要翻译：要解决的问题：提供一种当粘合多个基板时能够抑制翘曲的能够进行刚性接合的基板的接合方法。解决方案：衬底的接合方法包括用于在第一衬底Sa的表面上形成第一底层35a的第一下层形成步骤，用于在第一衬底Sa的表面上形成第二下层35b的第二下层形成步骤第二基板Sb，用于在第一基板Sa的表面上形成的第一下层35a上沉积第一单体13a的第一单体沉积步骤，用于沉积在第一单体13a上反应的第二单体13b的第二单体沉积步骤在形成在第二基板Sb的表面上的第二下层35b上形成聚合物，以及通过安装第一基板Sa和第二基板Sb来接合第一基板Sa和第二基板Sb的聚合物形成步骤，其中单体沉积的表面彼此面对，并使第一单体13a和第二单体13b彼此接触，从而形成聚合物通过反应。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2010209429A Remote plasma cvd machine 审中-公开
标题翻译：远程等离子体CVD机
公开(公告)号：JP2010209429A
公开(公告)日：2010-09-24
申请号：JP2009058539
申请日：2009-03-11
申请人： Ulvac Japan Ltd , 株式会社アルバック
发明人： NAKANO MINAO , MURAKAMI HIROHIKO
IPC分类号： C23C16/50 , C23C16/44 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a remote plasma CVD machine which can feed a raw material gas for growing a CNT (Carbon Nano-Tube) in vapor phase to a substrate at a fixed flow rate, and is excellent in maintainability.
SOLUTION: The remote plasma CVD machine M is provided with: a chamber body 1a opened to the upper part having a substrate stage 3 mounted with the substrate S to be treated; a cover body 1b mounted at the opening of the upper face of the chamber body freely attachably/detachably; a plasma generation means 7 generating plasma at the inside of the chamber body; and a planar shielding member 8c with a plurality of through-holes provided at the upper part of the substrate in such a manner that the substrate on the substrate stage is not exposed to the plasma. The peripheral part at the lower face of the cover body is provided with a plurality of supporting members 8a saggingly provided at intervals in the circumferential direction, and supporting frames 8b connected to the lower edge parts of the supporting members, and the peripheral part of the shielding member is mounted in such a manner that the thermal expansion or thermal shrinkage of the shielding member is allowable to the supporting frame.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种远程等离子体CVD机器，其能够以固定流量将用于将气相的CNT（碳纳米管）生长的原料气体供给到基板，并且维护性优异。解决方案：远程等离子体CVD机器M具有：开口于上部的室主体1a，具有安装有要处理的基板S的基板台3; 盖主体1b，其自由地安装在所述室主体的上表面的开口处; 等离子体产生装置7，在室主体的内部产生等离子体; 以及具有设置在基板的上部的多个通孔的平面屏蔽构件8c，使得基板载台上的基板不暴露于等离子体。盖体下表面的周边部分设置有沿周向间隔地下垂设置的多个支撑构件8a，以及连接到支撑构件的下边缘部分的支撑框架8b，以及支撑构件8a的周边部分屏蔽构件以这样的方式安装，使得屏蔽构件的热膨胀或热收缩可以被支撑框架允许。版权所有（C）2010，JPO＆INPIT

10. 发明专利

JP2010142699A Method for producing exhaust gas catalyst by using coaxial vacuum arc vapor deposition source 审中-公开
标题翻译：使用同轴真空蒸气沉积源生产排气催化剂的方法
公开(公告)号：JP2010142699A
公开(公告)日：2010-07-01
申请号：JP2008320327
申请日：2008-12-16
申请人： Kumamoto Univ , Ulvac Japan Ltd , 国立大学法人熊本大学 , 株式会社アルバック
发明人： MACHIDA MASATO , AGAWA YOSHIAKI , TSUKAHARA NAOKI , MURAKAMI HIROHIKO
IPC分类号： B01J37/02 , B01D53/94 , B01J23/63 , C23C14/14 , C23C14/24 , F01N3/10 , F01N3/28
摘要： PROBLEM TO BE SOLVED: To provide method for depositing a nanoparticle of an exhaust gas catalyst, and a method for producing the exhaust gas catalyst. SOLUTION: A pulse voltage is impressed between a trigger electrode 13 and a cathode 12 in a vacuum atmosphere by using a coaxial vacuum arc vapor deposition source 1 to generate trigger discharge. A capacitor and a DC power source are connected to each of the cathode 12 and an anode 11, and a DC discharge voltage of 60-100 V is impressed while keeping the capacitance of the capacitor within 360-1,080 μF to induce arc discharge intermittently. Charged particles of a catalytic metal to be produced are supplied to/vapor-deposited on the surface of a carrier being alumina powder or other alumina powder, in which an oxide of a metal consisting of zirconium or lanthanoid is mixed, to obtain the catalyst consisting of the catalytic metal nanoparticle-deposited carrier. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：待解决的问题：提供沉积废气催化剂的纳米颗粒的方法，以及废气催化剂的制造方法。解决方案：通过使用同轴真空电弧气相沉积源1在真空气氛中在触发电极13和阴极12之间施加脉冲电压以产生触发放电。将电容器和直流电源连接到阴极12和阳极11中的每一个，并且施加60-100V的直流放电电压，同时将电容器的电容保持在360-1,080μF内以间歇地引起电弧放电。将要生产的催化金属的带电粒子供应至/蒸镀在氧化铝粉末或其它氧化铝粉末的载体的表面上，其中由锆或镧系元素组成的金属的氧化物混合，得到催化剂组成的催化金属纳米颗粒沉积载体。版权所有（C）2010，JPO＆INPIT

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